• International journal of advanced smart convergence
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• 제8권4호
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• pp.200-206
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• 2019

In this study, we compared the VacCAD and VacSim^(Multi), commercial vacuum simulators, to verify the advantages of VacCAD's efficiency. It was emphasized on immediacy and simplicity of simulation modelling, and characteristics of the pump combinations, pumping down curves, and vacuum materials. First, usability of simulation mechanism was estimated through the modeling schematics and obtained simulation results of each employed simulator were compared to evaluate the applicability in practice. Simulation reliability of each simulator was also probed by comparing the pumping characteristics of commercially available high vacuum systems. In addition, the degree of tolerances on VacCAD was also investigated through pumping down analysis considering outgassing effect due to chamber material variations. The higher effectiveness and expediency of VacCAD than VacSim^(Multi) has been presented, and it was expected that the utilization of VacCAD in vacuum applications to be increased.

• 한국진공학회지
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• 제20권6호
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• pp.387-394
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• 2011

진공펌프의 운전성능을 나타내는 가장 중요한 지표 중의 하나인 배기속도 측정에 관해서는 많은 연구를 통해 정립된 이론에 따라 표준장치와 측정절차에 대한 규격이 만들어지고 널리 활용되고 있다. 그러나 실제 펌프 배기속도 측정 시 이상적인 조건에 비해 변형이 불가피할 때가 있고 그 영향을 간과하면 큰 측정오차를 유발할 수 있다. 본 논문에서는 배기속도를 측정하기 위한 이상적인 또는 실용적인 다양한 방안들이 가지는 물리적 특징과 구조적 오차에 대해 분석하고 보정 식들을 제시했다.

• 한국진공학회지
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• 제15권1호
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• pp.14-23
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• 2006

스크롤 펌프는 초청정 진공 시스템에서 많이 사용되고 있지만 막상 수소 배기 특성에 대해서 잘 알려져 있지 않다 이런 정보부족은 수소를 다량 사용하는 핵융합 실험장치에서 스크롤 점프가 사용 가능한지 판단하기 어렵게 만든다 이 논문에서는 특히 수소에 대한 스크롤펌프의 배기속도, 압측비 및 역류특성을 측정하기 위해 구성한 실험장치, 측정절차와 실험결과에 대해 기술하고 논의했다.

• 한국정밀공학회지
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• 제24권6호
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• pp.86-95
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• 2007

This paper presents the optimal design of an exhaust system of a vacuum-compatible air bearing using a genetic algorithm. To use the air bearings in vacuum conditions, the differential exhaust method is adopted to minimize the air leakage, which prevents air from leaking into a vacuum chamber by recovering air through several successive seal stages in advance. Therefore, the design of the differential exhaust system is very important because several design parameters such as the number of seals, diameter and length of an exhaust tube, pumping speed and ultimate pressure of a vacuum pump, seal length and gap(bearing clearance) influence on the air leakage, that is, chamber's degree of vacuum. In this paper, we used a genetic algorithm to optimize the design parameters of the exhaust system of a vacuum-compatible air bearing under the several constraint conditions. The results indicate that chamber's degree of vacuum after optimization improved dramatically compared to the initial design, and that the distribution of the spatial design parameters, such as exhaust tube diameter and seal length, was well achieved, and that technical limit of the pumping speed was well determined.

• Applied Science and Convergence Technology
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• 제24권5호
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• pp.132-135
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• 2015

Schematic of RAON vacuum system is introduced. Vacuum test for superconducting cavity with liquid nitrogen is performed. Schematic plan for RAON vacuum system is introduced and vacuum control system for superconducting cavity test is constructed. Vacuum pressure of cavity is shown as a function of pumping time. The temperature of cavity is shown as a function of cooling time. Outgassing species from cavity is also detected. Detailed experimental procedure is presented to test the cavity vacuum with liquid nitrogen.

• 대한기계학회논문집B
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• 제28권11호
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• pp.1359-1367
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• 2004

The demand of vacuum pump has been increased in the process of semi-conduct manufacturing, as a core component. The response of the system for vacuum pump performance test can be utilized to assess the system and to obtain the reliability of the apparatus for the test. The system consists of gas supply tank, pressure chamber, measurement chamber and transmission line. Transient analysis for compressible fluid has been conducted to evaluate the dynamic characteristic of the volume terminated transmission line. Numerical approach based on the method of characteristics is used for the analysis. The response is evaluated with the important parameters for the system: i.e., length and diameter of the line, volume of the terminal tank. Using the numerical results, pumping speeds are calculated and then compared to the experimental results.

• 한국진공학회지
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• 제22권2호
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• pp.45-54
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• 2013

맥동관형 크라이오펌프 개발 사업 2단계를 맞아 우성진공(유)을 중심으로 상용화 시제품 개발이 성공적으로 끝나가고 있다. 최종 크라이오펌프 개발품은 흡기구 직경(내경) 16.5 (14) 인치에 질소 배기속도 3,600 L/s 이상을 목표로 하고 있다. 개발품의 성능확인을 위해 우선 몬테카를로 계산을 통해 배기속도를 예측하고 구조설계를 최적화했으며 이를 바탕으로 가공 조립된 크라이오펌프 시제품의 성능을 표준화된 장치에서 표준화된 절차를 통해 평가하여 설계 목표값과 비교했다. 시제품의 질소 배기속도는 4,600 L/s로 측정되어 설계값과 잘 일치하였으며 개발목표를 훨씬 상회하였다.

• Journal of Korean Vacuum Science & Technology
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• 제7권2호
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• pp.27-32
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• 2003

A large cryo-pumping system composed of 4 cryosorption pumps was designed and manufactured to satisfy the pressure requirements of the NBI test stand. The cryosorption pump consists of a thermal shield/baffle assembly and a cryopanel coated with activated carbon granules. The thermal shield is cooled by liquid nitrogen, and the cryopanel by a commercial helium refrigerator. The operation characteristics and vacuum performance of the cryosorption pump were investigated. The cooling down time of the cryopanel to 20 K was about 6 hours with a liquid nitrogen consumption rate of about 35 L/hr. The maximum pumping speed of the cryosorption pump for the hydrogen gas measured by the steady pressure method was about 90,000 L/s.

• Applied Science and Convergence Technology
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• 제24권4호
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• pp.77-83
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• 2015

Many welding processes are performed to construct cryogenic system. Leak-tight for the cryogenic system is required at low temperature environment. Helium leak detection techniques are commonly used to find leak for the cryogenic system. The helium leak detection techniques for spraying, sniffing and pressurizing techniques are introduced. High vacuum is also necessary to use helium leak detector. So, types of fluid flow, effective temperature, conductance and pumping speed are introduced for vacuum pumping. Leak test procedure is shown for pipe welding, cryomodule and low temperature test. Cryogenic seals which include copper gasket, helicoflex gasket and indium are investigated.

• 한국진공학회지
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• 제12권2호
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• pp.93-104
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• 2003

저진공펌프의 내구성평가와 관련하여 펌프의 성능이나 상태의 저하에 관한 기술적 근거를 확보함으로써 펌프의 운전상태를 진단할 수 있는 기초기술을 확보할 수 있으며, 이는 진공펌프의 기계적 결함 및 성능평가 장치의 동적 응답과 신뢰도 구축에 중점을 두고 신호 분석을 통하여 실험적으로 기계적인 동적 특성을 확인하는 과정을 통하여 수행할 수 있다. 저진공펌프의 압축일에 소요되는 전력을 이론적으로 규명하고 펌프의 압축일을 계산하였으며, 소비전력에 대한 진공펌프의 에너지 효율을 예측하여 펌프 노화에 따르는 소비전력의 증가 원인을 규명하는 자료로 활용할 수 있다. 또한 저진공펌프의 가동 중에 측정한 진동, 압력신호, 배기속도 및 소비전력을 측정하고 분석하여 펌프 운전상태를 감시하는데 매우 유용한 인자가 무엇인지 확인하였으며 추후 연구의 방향과 내구성평가의 기초기술을 확보하였다.