• Title/Summary/Keyword: thermal evaporator

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Quantitative Analysis of Bonding States in Surface wet-etched Copper with Chemical Solution (습식식각된 구리 표면의 결합상태에 대한 정량적 분석 연구)

  • Gang, Min-Gu;Park, Hyeong-Ho
    • Korean Journal of Materials Research
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    • v.6 no.2
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    • pp.158-165
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    • 1996
  • 열증착기(thermal evaporator)로 증착시킨 Cu를 상온에서 3.5M CuCl2+0.5M HCI+0.5MKCI 용액을 사용하여 습식각하고 2일간 대기중 노출시킨 후 X-선 광전자 분광기를 이용하여 표면의 결합상태를 관찰하였다. 그 결과 습식식각된 Cu 표면에서는 C, O, Ci 및 Cu가 존재함을 알 수 있었다. 표면원소에 대한 오제이 전자 스펙트라(Auger electron spectra)와 광전자 스펙트라(photoelectron spectra)의 정량적인 비교를 통하여 표면의 모든 결합상태를 확인할 수 있었고 그 상대적인 양까지도 얻어낼 수 있었다. 식각된 Cu의 표면에는 Cu-Cu, 2Cu-O, Cu-Ci, Cu-2(OH), 및 Cu-2Cl의 결합상태가 존재함을 알 수 있었고, CuLMMAuger line spectrum의 관찰을 통하여 계산된 각 결합의 정량적인 비교를 검증할 수 있었다. 따라서 chemical shift가 거의 관찰되지 않아 결합상태 분리가 불가능한 식각된 구리표면의 정량적 결합상태는 각 결합상태의 상대적 비교를 통하여 얻어질 수 있음을 알 수 있었다.

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Influence of Temperature and Pressure on Graphene Synthesis by Chemical Vapor Deposition (CVD법을 이용한 그래핀합성에 미치는 온도와 압력의 영향)

  • Lee, Eun Young;Kim, Sungjin;Jun, Heung-Woo
    • Journal of the Korean Society for Heat Treatment
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    • v.28 no.1
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    • pp.7-16
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    • 2015
  • The fabrication of high quality graphene using chemical vapor deposition (CVD) method for application in semiconductor, display and transparent electrodes is investigated. Temperature and pressure have major impact on the growth of graphene. Graphene doping was obtained by deposition of $MoO_3$ thin films using thermal evaporator. Bilayer graphene and the metal layer graphene were obtained. According to the behavior of graphene growth P-type doping was confirmed. Graphene obtained through experiments was analyzed using optical microscopy, Raman spectroscopy, UV-visible light spectrophotometer, 4-point probe sheet resistance meter and atomic force microscopy.

Evaluation and design of Multi-layered thin films with EMP simulation (EMP simulation을 활용한 다층 박막의 평가 및 설계)

  • Kim, Jun-Sik;Jang, Gun-Ik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.312-312
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    • 2009
  • 본 연구에서는 Thermal evaporator(저항 가열 식 진공 증착법) 장비를 활용하여 ZnS/$Na_3AlF_6$/ZnS/Cu-$0.25\lambda$, ZnS/$CaF_2$/ZnS/Cu-$0.25\lambda$의 다층 박막을 glass 기판위에 증착하였다. 증착 전에 EMP(Essential Macleod Program)을 활용하여 광학적 특성을 simulation하였으며 다층 박막 제작 후 Spectrophotometer를 사용하여 반사율 및 색상을 CIE $L^*a^*b^*$ 좌표에 표시하여 고 굴절 물질에 따른 광학적 특성을 EMP simulation과 비교하였다. AES depth profile을 분석하여 막의 두께 및 층간 확산여부에 관하여 관측 하였다. 저굴절 물질을 Na3AlF6로 사용하였을 경우 simulation과 결과 값 모en purple 계통의 색상을 나타냈으며 CaF2를 사용하였을 경우 simulation은 purple 계통의 색상, 결과값은 red-yellow 계통의 색상으로 나타났다.

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Long-Term Life Test of A Stainless Steel-Sodium Heat Pipe (스테인리스 스틸-나트륨 히트파이프의 장기 수명 시험)

  • Park, S.Y.;Jung, E.G.;Boo, J.H.;Kang, H.K.;Yoo, J.H.;Park, S.H.
    • Proceedings of the KSME Conference
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    • 2004.11a
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    • pp.1058-1062
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    • 2004
  • High-temperature cylindrical stainless steel/sodium heat pipe was manufactured and tested under long-term operation. The container material was stainless steel 316L and the working fluid was sodium. The heat pipe was 25.4 mm in diameter and 1000 mm in length with a two-layer screen mesh wick. The evaporator part was 600 mm and the condenser part was 300 mm in length. Total measurement points on heat pipe were 15 points and 12 points were located in condenser part. The heat pipe was heated for 142 days(3400 hours) at $800^{\circ}C$. In the test period, the maximum temperature difference was increased from $18^{\circ}C$ o $28^{\circ}C$ and the maximum thermal resistance was as low as $0.015^{\circ}CW$.

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Room temperature operating nitrogen dioxide sensor based tellurium thin films (Te를 이용한 상온 동작형 NO2 센서 제작 및 감응 특성)

  • Shin, Han-Jae;Song, Kap-Duk;Joo, Byung-Su;Sohn, Myoung-Ho;Lee, Duk-Dong
    • Journal of Sensor Science and Technology
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    • v.16 no.2
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    • pp.91-96
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    • 2007
  • The characteristic of tellurium thin films was studied for detecting nitrogen dioxide gas at room temperature. The film was deposited on $Al_{2}O_{3}$ substrate by using thermal evaporator. The subsequent process was heat treatment by several conditions. (temperature, flowed gases) Surface and grain boundary was investigated using SEM. The results showed that resistance of the tellurium film decreases reversibly in the presence of nitrogen dioxide. The sensitivity of this device depends on the gas concentration and detect lower concentrations less than 10 ppm.

Microfluidic platform for voltammetric analysis of biomolecules (Microfludic 플랫폼을 이용한 생체 분자의 voltammetric 분석)

  • Chand, Rohit;Han, Da-Woon;Jha, Sandeep K.;Kim, Yong-Sang
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1686-1687
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    • 2011
  • A microfabricated chip with in-channel electrochemical cell using interdigitated gold electrode was fabricated for sensitive electrochemical analysis. The gold electrodes were fabricated on glass wafer using thermal evaporator and were covered using PDMS mold containing microchannel for analyte and electrolyte. The active area of each electrode was $250\;{\mu}m{\times}200\;{\mu}m$ with a gap of 200 ${\mu}m$ between the electrodes. Microelectrodes results in maximum amplification of signal, since the signal enhancement effect due to cycling of the reduced and oxidized species strongly depends on the inter electrode distance. Analytes such as methylene blue and guanosine were characterized using the fabricated electrodes and their electrochemical characteristics were compared with conventional bulk electrodes. The device so developed shall find use as disposable electrochemical cell for rapid and sensitive analysis of electroactive species.

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Plasmonic Effect on Graphene Metal Hybrid Films

  • Park, Si Jin;Kang, Seong Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.468-468
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    • 2013
  • Self-assembled silver nanoparticles were synthesized on a graphene film to investigate plasmonic effect. Graphene was synthesized on glass substrate using chemical vapor deposition method and transfer process. Silver nanoparticles were formed using thermal evaporator and post-annealing process. The shape of silver nanoparticles was measured using a scanning electron microscopy. The resonance wavelength of plasmonic effect on graphene-silver nanoparticles was measured using transmittance spectra. The plasmon resonance wavelength was increased from 400 nm to 424 nm according to the lateral dimension of silver nanoparticles. Also we confirmed a strong plasmon effect form Raman spectra, which were measured on graphene-silver nanoparticles. The result shows that plasmon resonance wavelength could be controlled by lateral dimension of silver nanoparticles, and transparent conductive films based on plasmonic graphene could be developed.

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Characteristics of pentacene transistor using Organic Flow Deposition (OFD) equipment

  • Jung, Ki-Taek;An, Young-Ung;Ji, Jong-Yeoul;Choi, Jun-Young;Lee, Young-Jong;Han, Seung-Hoon;Jang, Jin
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08b
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    • pp.1611-1614
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    • 2007
  • This paper is concerned on design of organic flow deposition system and development of the deposition process for pentacene thin film by OFD and on electrical characteristics of pentacene films deposited by it. OFD will overcome vacuum thermal evaporator's limits and it will provide a large-scale mass, uniform and good electrical performance.

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Thermal Analysis and Optimum Design of Water-Cooled, Series-Flow Type, Double-Effect Absorption Heat Pump (수냉형 직렬방식 2중효용 흡수식 냉방기의 열해석과 최적 설계)

  • Oh, M.D.;Kim, Y.L.;Kim, S.C.;Kim, Y.I.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.4 no.4
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    • pp.332-341
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    • 1992
  • An absorption heat pump cycle has been modeled and simulated to analyze the system performance of water-cooled, series-flow, double-effect absorption heat pump, which can be applied to a direct gas fired cooling system with the medium range of cooling capacity (15RT level). Effect of absorption cooling system parameters, such as concentration difference, inlet temperature of cooling water, 1st generator temperature, leaving temperature differences of condenser and evaporator and efficiency of solution heat exchanger, has been investigated in the view of system cooling performance.

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The application of separate type thermosyphon for cooling of electronic equipments (전자 장비 냉각에 있어서의 분리형 써모사이펀의 적용)

  • Kim J.H;Park S.B.;Yoon J.H.;Kim S.P;Jun C.H
    • Proceedings of the KSME Conference
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    • 2002.08a
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    • pp.725-728
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    • 2002
  • A separate type thermosyphon can be utilized as a cooling device of electronic equipments (such as CPU of a personal computer or notebook). This study was carried out to investigate the cooling effect of separate type thermosyphon and to find the adequate parameters affecting the separate type thermosyphon. The heat transfer characteristics of separate type thermosyphon were obtained from experimental results. A $50{\times}50{\times}2 mm$ heat source was copied after CPU for the experiments. The results indicate that the device is capable of dissipating 60W of thermal energy and keeping the heat plate surface temperature under 50'E and the device can transfer heat from the evaporator to the condenser through natural circulation (without any external driving forces). Some transport phenomena of the working fluid and the heat transfer characteristics of the loop were observed in the experiments and are discussed in detail below.

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