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http://dx.doi.org/10.5369/JSST.2007.16.2.091

Room temperature operating nitrogen dioxide sensor based tellurium thin films  

Shin, Han-Jae (School of Electrical Engineering and Computer Science, Kyungpook National University)
Song, Kap-Duk (Advanced Display Manufacturing Research Cemter, Kyungpook National University)
Joo, Byung-Su (School of Electrical Engineering and Computer Science, Kyungpook National University)
Sohn, Myoung-Ho (Department of Sensor and Display Engineering, Kyungpook National University)
Lee, Duk-Dong (School of Electrical Engineering and Computer Science, Kyungpook National University)
Publication Information
Journal of Sensor Science and Technology / v.16, no.2, 2007 , pp. 91-96 More about this Journal
Abstract
The characteristic of tellurium thin films was studied for detecting nitrogen dioxide gas at room temperature. The film was deposited on $Al_{2}O_{3}$ substrate by using thermal evaporator. The subsequent process was heat treatment by several conditions. (temperature, flowed gases) Surface and grain boundary was investigated using SEM. The results showed that resistance of the tellurium film decreases reversibly in the presence of nitrogen dioxide. The sensitivity of this device depends on the gas concentration and detect lower concentrations less than 10 ppm.
Keywords
nitrogen dioxide; tellurium film; semiconductor; gas sensor;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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