한국정보디스플레이학회:학술대회논문집
- 2007.08b
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- Pages.1611-1614
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- 2007
Characteristics of pentacene transistor using Organic Flow Deposition (OFD) equipment
- Jung, Ki-Taek (R&D Center, ADP Engineering CO.,LTD) ;
- An, Young-Ung (R&D Center, ADP Engineering CO.,LTD) ;
- Ji, Jong-Yeoul (R&D Center, ADP Engineering CO.,LTD) ;
- Choi, Jun-Young (R&D Center, ADP Engineering CO.,LTD) ;
- Lee, Young-Jong (R&D Center, ADP Engineering CO.,LTD) ;
- Han, Seung-Hoon (Advanced Display Research Center, Kyung Hee University) ;
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Jang, Jin
(Advanced Display Research Center, Kyung Hee University)
- Published : 2007.08.27
Abstract
This paper is concerned on design of organic flow deposition system and development of the deposition process for pentacene thin film by OFD and on electrical characteristics of pentacene films deposited by it. OFD will overcome vacuum thermal evaporator's limits and it will provide a large-scale mass, uniform and good electrical performance.