• 센서학회지
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• 제6권1호
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• pp.43-48
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• 1997

$Ca_{10}(PO_{4})_{6}(OH)_{2}$ 감습소자를 고상반응법을 이용하여 제조하고, 그의 감습특성을 조사하였다. 상대습도가 증가함에 따라 임피던스는 감소하며 $30{\sim}90\;%$의 습도영역에서 임피던스의 변화가 약 $10^{2}\;{\Omega}$ 정도로 우수한 감도를 보임을 알 수 있다. 또한 감습도는 주위 온도변화와 습기에의 장시간 노출에 안정된 특성을 나타내었다. 시편의 열처리에서도 감도의 변화가 없으며, 흡습 및 탈습에 따른 히스테리시스 특성은 거의 나타나지 않았다.

• 전기학회논문지
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• 제63권9호
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• pp.1227-1232
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• 2014

The purpose of this paper is to establish the optimum fabricating condition of specimens using silk screen printing, and to develop humidity sensor which has good humidity sensing properties. The specimens are fabricated under the condition of 90[wt%] $SnO_2$-10[wt%] $TiO_2$, and their microstructure, crystalline structure, humidity sensing properties are examined. From the microstructure analyses, porosity is best at 700[$^{\circ}C$]. From the crystalline structure analyses, intensity of peak becomes strong according to increasing heat treatment temperature. From the humidity sensing properties analyses, an overall results of capacitance changes, linearity and hysteresis for the specimens is best at 600[$^{\circ}C$] and 700[$^{\circ}C$]. Capacitance of specimens increases according to decreasing measurement frequency, and to increasing relative humidity.

• 한국전기전자재료학회논문지
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• 제20권5호
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• pp.436-442
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• 2007

Physical properties and impedance-humidity characteristics of carbon nitride films were investigated for micro-humidity-sensors. Carbon nitride films were deposited in low temperature and low power for application of semiconductor fabrication process, and empirical equation was proposed for thickness evaluation. Deposited films had an uniform and compact surface comparing with previously reported results, which was expected a good candidate for humidity sensing materials. Carbon nitride humidity sensors based on Si substrate revealed good humidity-impedance characteristics with a wide range of relative humidity and showed low hysteresis.

• 마이크로전자및패키징학회지
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• 제13권4호
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• pp.65-70
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• 2006

CVD 및 PECVD법으로 탄소 나노튜브를 성장하고, 그 후 $400{\sim}500^{\circ}C$에서 산화 열처리한 센서의 이산화질소 감지특성을 $200^{\circ}C$ 및 1.5ppm의 이산화질소 농도 하에서 측정하였다. 탄소 나노튜브 센서의 전기저항은 온도 증가에 따라 감소하는 반도체 특성을 보였으며, 이산화질소 흡착에 따라 전기저항은 감소하였다. 공기 중의 수분은 센서감도에 영향을 주고 있으며, 센서를 마이크로파에 3분간 노출하면 센서의 특성은 저하되었다. 또한 CVD법으로 제조한 시편에 비하여 PECVD법으로 성장한 탄소 나노튜브 센서의 감도는 향상 되었다.

• 한국환경과학회지
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• 제27권11호
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• pp.1155-1167
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• 2018

We developed a small sensor observation system (SSOS) at a relatively low cost to observe the atmospheric boundary layer. The accuracy of the SSOS sensor was compared with that of the automatic weather system (AWS) and meteorological tower at the Korea Meteorological Administration (KMA). Comparisons between SSOS sensors and KMA sensors were carried out by dividing into ground and lower atmosphere. As a result of comparing the raw data of the SSOS sensor with the raw data of AWS and the observation tower by applying the root-mean-square-error to the error, the corresponding values were within the error tolerance range (KMA meteorological reference point: humidity ${\pm}5%$, atmospheric pressure ${\pm}0.5hPa$, temperature ${\pm}0.5^{\circ}C$. In the case of humidity, even if the altitude changed, it tends to be underestimated. In the case of temperature, when the altitude rose to 40 m above the ground, the value changed from underestimation to overestimation. However, it can be confirmed that the errors are within the KMA's permissible range after correction.

• 센서학회지
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• 제29권6호
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• pp.399-406
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• 2020

Pd nanogap hydrogen sensors were developed using an elastomeric substrate and operated through an on-off mechanism. A 10 nm thick Pd thin film was formed on a polydimethylsiloxane (PDMS) substrate, and 50% of the physical strain was applied in the longitudinal direction to fabricated uniform nanogaps. The initial concentration of the hydrogen gas for the PDMS/Pd films was controlled, and subsequently, the on-off switching response was measured. We found that the average nanogap was less than 50 nm, and the Pd nanogap hydrogen sensors operated over a wide range of temperatures. In particular, the sensors work properly even at a very low temperature of -40℃ with a fast response time of 2 s. In addition, we have investigated the relative humidity and annealing effects.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1472-1473
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• 2008

Polyimide thin films were cured locally using MEMS microhotplates. The polyimide locally cured at temperature over 350$^{\circ}C$ for 1 hour was fully cured. There was no significant difference between polyimide thin films cured in a conventional convection oven and those cured locally on MEMS microhotplates. The locally cured polyimide humidity sensor showed a linearity of 0.9995, a sensitivity of 0.77 pF/%RH, a hysteresis of 0.6 %RH, and a response time of 3s. These results indicate that the locally-cured polyimide films may be used as dielectric material of high speed, highsensitivity humidity sensors.

• Macromolecular Research
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• 제16권2호
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• pp.149-154
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• 2008

UV-curable electrolytes inks were prepared by dissolving [2-[(methacryloyloxy)ethyl]dimethyl]propylaminium bromide (MEPAB), 1,5-[bis(2-methacryloxyethyl)dimethyl ammono]penthane dibromide (MDAPD), hexafunctional reactive oligomer (SP1013), trimethylolpropane triacrylate (TMPTA) and a photoinitiator in methanol/2-methoxyethanol. The compositions of the electrolyte inks were MEPAB/MDAPD/SP1013/TMPTA=6/24/17.2/12.8, 15/15/17.2/12.8 and 24/6/17.2/12.8. Humid-membranes were deposited on a gold electrode/alumina electrode using an ink-jet printer equipped with a UV lamp followed by immediate UV curing. The humidity-sensing characteristics including hysteresis, frequency and temperature dependence, response time and water durability were estimated.

• 한국축산시설환경학회지
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• 제20권2호
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• pp.49-56
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• 2014

The climate of the earth is expected to change rapidly and continuously. Despite climate change is expected to impact on productivity of crop and livestock, a study for adaptation and impact of livestock to global warming is not enough. This study was performed to develop a method to evaluate the effects of heat stress on dairy cattle. Feedlot environment and health status of livestock were measured through an infrared thermography camera and a temperature-humidity sensor. Environmental factors such as temperature and humidity were measured to calculate the Temperature humidity index (THI). The change of the milk yield was similar to THI data pattern, suggesting that THI might play an important role to predict the effect of climate change on dairy cattle. THI data would be useful to predict long-term climate change effects on dairy cattle with RCP8.5 scenario.

• 한국세라믹학회지
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• 제27권4호
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• pp.529-535
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• 1990

This paper describes the factors which control the impedance-relative humidity characteristics of the TiO2-V2O5 humidity sensor. To obtain the quantitative relationships between impedance and many manufacturing parameters such as V2O5mol%, the sintering time and temperature, various sets of samples are preared and tested. With changing relative hymidity from 20% to 80%, it is measrued that the corresponding capacitance and impedance from the semicircles which complex impedance plots make. As a result we found that the impedance-relative humidity characteristics are mainly controlled by the doping amount of V2O5 total pore volume and bulk resistence of the elements. We can assume the equivalent circuits of each samples and finally control the sintering time to get a linear humidity impedance response curve which plays an important role in device making. 4mol% V2O5-TiO2 specimen sintered at 90$0^{\circ}C$ for 10min. show liear log(Z) vs. RH characteristics and 10mol% V2O5-TiO2 specimen sintered at the same temp. for 20min. show linear (Z) vs. RH.