A Locally Cured Polyimied-based Humidity Sensor with High Sensitivity and High Speed

국부적 경화된 고속, 고감도 폴리이미드 습도 센서

Polyimide thin films were cured locally using MEMS microhotplates. The polyimide locally cured at temperature over 350$^{\circ}C$ for 1 hour was fully cured. There was no significant difference between polyimide thin films cured in a conventional convection oven and those cured locally on MEMS microhotplates. The locally cured polyimide humidity sensor showed a linearity of 0.9995, a sensitivity of 0.77 pF/%RH, a hysteresis of 0.6 %RH, and a response time of 3s. These results indicate that the locally-cured polyimide films may be used as dielectric material of high speed, highsensitivity humidity sensors.