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http://dx.doi.org/10.4313/JKEM.2007.20.5.436

A Study on Physical Properties of Carbon Nitride Films and Application for Sensor Materials  

Kim, Sung-Yeop (경남대학교 전자공학과)
Lee, Ji-Gong (경남대학교 전자공학과)
Chang, Choong-Won (경남대학교 전자공학과)
Lee, Sung-Pil (경남대학교 전자공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.20, no.5, 2007 , pp. 436-442 More about this Journal
Abstract
Physical properties and impedance-humidity characteristics of carbon nitride films were investigated for micro-humidity-sensors. Carbon nitride films were deposited in low temperature and low power for application of semiconductor fabrication process, and empirical equation was proposed for thickness evaluation. Deposited films had an uniform and compact surface comparing with previously reported results, which was expected a good candidate for humidity sensing materials. Carbon nitride humidity sensors based on Si substrate revealed good humidity-impedance characteristics with a wide range of relative humidity and showed low hysteresis.
Keywords
Carbon nitride films; Micro-humidity sensors; MIM structure; Sputtering system;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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1 D. Marton et al., 'Synthesis of carbon nitride [Review)', International Journal of Modem Physics B, Vol. 9, No. 27, p. 3527, 1995   DOI
2 M. Y. Chen et al., 'Growth and characterization of C-N thin films', Surf. Coat. Technol., Vol. 54/55, p. 360, 1992   DOI   ScienceOn
3 S. P. Lee, J. Y. Rim, and Y. K. Yoon, 'Characteristics of fine structure $TiO_2-V_2O_5-Nb_2O_5$ humidity sensors', Sensors and materials, Vol. 7, p. 23, 1995
4 J. H. Kaufman, S. Metin, and D. D. Saperstein, 'Symmetry breaking in nitrogen-doped amorphous carbon: Infrared observation of the Raman-active G and D bands', Physical Review B, Vol. 39, p. 13053, 1989   DOI   ScienceOn
5 J. G. Lee and S. P. Lee, 'Humidity sensing properties of CNx film by RF magnetron sputtering system', Sensors and Actuators, B, Vol. 108, p. 450, 2005   DOI   ScienceOn
6 S. Matsumoto, E. Q. Xie, and F. Izumi, 'On the validity of the formation of crystalline carbon nitrides, $C_3N_4$ [Review]', Diamond and Related Materials, Vol. 8, p. 1175, 1999   DOI   ScienceOn
7 R. O. Dillon, J. A. Woollam, and V. Kathanant, 'Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon films', Phys. Rev. B, Vol. 29, No.6, p. 3482, 1984   DOI
8 J. G. Lee and S. P. Lee, 'Plasma characterization of facing target sputter system for carbon nitride film deposition', Trans. EEM, Vol. 5, No.3, p. 98, 2004
9 H. U. Lee and S. P. Lee, 'Electrical properties of MIM and MIS structure using carbon nitride films', Trans. EEM, Vol. 7, No.5, p. 257, 2006   과학기술학회마을   DOI   ScienceOn
10 A. Y. Liu and M. L. Cohen, 'Prediction of new low compressibility solids', Science, Vol. 245, p. 841, 1989   DOI   ScienceOn
11 L. M. Zambov, C. Popov, M. F. Plass, A. Bock, M. Jelinek, J. Lancok, K. Masseli, and W. Kulisch, 'Capacitive humidity sensor with carbon nitride detecting element', Appl, Phys., Vol. A 70, p. 603, 2000
12 J. G. Lee, S. G. Ha, J. H. Kim, and S. P. Lee, 'A study on the humidity sensing properties of crystalline carbon nitride films', J. of KIEEME(in Korean), Vol. 17, No.5, p. 521, 2004
13 J. G. Lee and S. P. Lee, 'Impedance characteristics of carbon nitride films for humidity sensors', Sensors and Actuators, B, Vol. 117, p. 437, 2006   DOI   ScienceOn
14 S. P. Lee and J. B. Kang, 'Mechanical characteristics of crystalline carbon nitride films grown by reactive sputtering', J. of KIEEME(in Korean), Vol. 15, No. 2, p. 147, 2002