• Journal of the Korean institute of surface engineering
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• v.24 no.1
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• pp.1.1-1.1
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• 1991

Understanding of the detailed reaction mechanisms during MOVPE and ALE is essential to further improve the properties of the grown crystals and the controllability of the growth parameters. The unified models for the detailed reaction paths are not available at this stage. The study, however, has been advanced to the extent that consensus on some of the reaction paths can be drawn from the scattered data. Metalakyls such as TMGa and TMIn seem to nearly fully decompose in the gas phase through homogeneous reaction at the typical MOVPE growth temperature. Hydrides such as AsH3 and PH3, on the contrary. seem to decompose heterogeneously onthe substrate surfaces as well as homogeneously in the gas phase. However, at lower temperatures, where ALE crystals are typically grown, the growth process is strongly dependent on the surface reactions. It seems that steric hindrance effects which the radicals reaching the substrate exhibit on the surface the growth rate a function of the metalalkyle supply durations. In addition, dydrogens released from hydrides seem to play an essential role in removing carbons leberated from the metalalkyls. High growth temperatures also seem to be effective in desorbing carbons from surface. The understanding of the reaction mechanisms was possible though diverse appraaches utilizing many ex-situ and in-situ diagnostic techniques and genuine experimental designs. It is the purpose of this paper to review and discuss many of these efforts and to draw some possible conclusions from them.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.11
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• pp.45-53
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• 2003

This paper describes a Unified Voltage Generator that merges the pumping capacitors of boosted voltage generator (VPP) and substrate voltage generator (VBB) for DRAM. This unified voltage generator simultaneously supplies VPP and VBB voltages by using one pumping capacitor and one oscillator. The proposed generator is realized by 0.14${\mu}{\textrm}{m}$DRAM process. The generator reduces the power consumption to 30%, the area of total generator to 40% and the area of pumping capacitor to 29.6%, and improves the pumping efficiency to 13.2% at 2.0V supply voltage. In addition, the generator adopts the charge recycling technique for precharging the pumping capacitor during the period of precharge, thatcan reduces the precharge current to 75%.

• Journal of the Microelectronics and Packaging Society
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• v.31 no.2
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• pp.45-53
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• 2024

The maintenance of semiconductor equipment is crucial for the continuous growth of the semiconductor market. System management is imperative given the anticipated increase in the capacity and complexity of industrial equipment. Ensuring optimal operation of manufacturing processes is essential to maintaining a steady supply of numerous parts. Particularly, monitoring the status of substrate transfer robots, which play a central role in these processes, is crucial. Diagnosing failures of their major components is vital for preventive maintenance. Fault diagnosis methods can be broadly categorized into physics-based and data-driven approaches. This study focuses on data-driven fault diagnosis methods due to the limitations of physics-based approaches. We propose a methodology for data acquisition and preprocessing for robot fault diagnosis. Data is gathered from vibration sensors, and the data preprocessing method is applied to the vibration signals. Subsequently, the dataset is trained using Gradient Tree-based XGBoost machine learning classification algorithms. The effectiveness of the proposed model is validated through performance evaluation metrics, including accuracy, F1 score, and confusion matrix. The XGBoost classifiers achieve an accuracy of approximately 92.76% and an equivalent F1 score. ROC curves indicate exceptional performance in class discrimination, with 100% discrimination for the normal class and 98% discrimination for abnormal classes.

• Journal of agriculture & life science
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• v.44 no.5
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• pp.9-13
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• 2010

This study was conducted to identify the possibility of utilization of coconut substrates for nutrition culture of cut-chrysanthemum. The materials of substrate were composed of dust, fiber, and chip from coco-nut fruit. Dust was used in dust (100%), and dust+chip and +fiber were used in the ratio of 7:3 (v:v), respectively, as coconut mixture substrate. Perlite was used as control in this experiment. Water content in the perlite medium was lower than in dust substrate. The pH of all coconut substrates ranged from 6.5 to 5.8, whereas perlite substrate ranged from 7.3 to 6.7. While, EC of dust substrates shown to be highest but perlite substrate was lowest. The growth of chrysanthemum such as stem length, leaf area, and dry matter showed better results in coconut substrates than that of perlite and dust. However, there was no differences days to in flowering among treatments.

• Journal of Electrical Engineering and Technology
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• v.1 no.1
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• pp.110-113
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• 2006

A high rate deposition sputtering process of magnesium oxide thin film in oxide mode has been developed using a 20 kW unipolar pulsed power supply. The power supply was operated at a maximum constant voltage of 500 V and a constant current of 40 A. The pulse repetition rate and the duty were changed in the ranges of $10\sim50$ kHz and $10\sim60%$, respectively. The deposition rate increased with rising incident power to the target. Maximum incident power to the magnesium target was obtained by the control of frequency, duty and current. The deposition rate of a moving state was 9 nm m/min at the average power of 1.5 kW. This result shows higher deposition rate than any other previous work involving reactive sputtering in oxide mode. The thickness uniformities over the entire substrate area of $982mm{\times}563mm$ were observed at the processing pressure of $2.8\sim9.5$ mTorr. The thickness distribution was improved at lower pressure. This technique is proposed for application to a high through-put sputtering system for plasma display panels.

• KSBB Journal
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• v.18 no.5
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• pp.418-423
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• 2003

A laboratory jar fermenter was modified to measure the duration for cooling water supply and the temperatures of the coolant at the inlet and outlet of water jacket. Successful operation of temperature control and on-line measurement was achieved by adjusting optimum parameters of the Proportion-Integral-Derivative temperature controller. The variables measured on-line were used to estimate cooling rates from empirical equations comprised of the time period of cooling water supply and the temperatures of coolant. The measured cooling rate showed a good correlation to the specific growth rate during batch cultivation of E. coli. Cooling rate was measured and applied to programmed cell growth in a fed-batch cultivations. Three fed-batch cultivations were demonstrated by feeding substrate to follow the programmed cooling rates increasing exponentially.

• Journal of Microbiology and Biotechnology
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• v.18 no.1
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• pp.124-127
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• 2008

The behavior of Penicillium camembertii and Geotrichum candidum growing in submerged pure cultures on simple (glutamate) or complex (peptones) substrates as nitrogen and carbon sources and lactate as a second carbon source was examined. Similar to the behavior previously recorded on a simple substrate (glutamate), a clear differentiation between the carbon source and the energy source was also shown on peptones and lactate during P. camembertii growth, since throughout growth, lactate was only dissimilated, viz., used for energy supply by oxidation into $CO_2$, whereas peptides and amino acids from peptones were used for carbon (and nitrogen) assimilation. Because of its deaminating activity, G candidum preferred peptides and amino acids to lactate as energy sources, in addition to being assimilated as carbon and nitrogen sources. From this, on peptones and lactate, G candidum grew faster than P. camembertii (0.19 and 0.08 g/l/h, respectively) by assimilating the most readily utilizable peptides and amino acids; however, owing to its lower proteolytic activity, the maximum biomass was lower than that of P. camembertii (3.7 and 5.5 g/l, respectively), for which continuous proteolysis and assimilation of peptides were shown.

• Advances in Energy Research
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• v.4 no.1
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• pp.69-86
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• 2016

The quest to reduce the level of overdependence on fossil fuel product and to provide all required information on proven existing alternatives for renewable energy has resulted into rapid growth of research globally to identify efficient alternative renewable energy sources and the process technologies that are sustainable and environmentally friendly. The present study is aimed at production and characterization of bioethanol produced from sugarcane juice using a $2^4$ factorial design investigating the effect of four parameters (reaction temperature, time, concentration of bacteria used and amount of substrate). The optimum bioethanol yield of 19.3% was achieved at a reaction temperature of $30^{\circ}C$, time of 72 hours, yeast concentration of 2 g and 300 g concentration of substrate (sugarcane juice). The result of statistical analysis of variance shows that the concentration of yeast had the highest effect of 7.325 and % contribution of 82.72% while the substrate concentration had the lowest effect and % contribution of -0.25 and 0.096% respectively. The bioethanol produced was then characterized for some fuel properties such as flash point, specific gravity, cloud point, pour point, sulphur content, acidity, density and kinematic viscosity. The results of bioethanol characterization conform to American society for testing and materials (ASTM) standard. Hence, sugarcane juice is a good and sustainable feedstock for bioethanol production in Nigeria owing relative abundance, cheap source of supply and available land for large scale production.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.79-79
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• 1999

The varous techniques for fabrication of si or metal tip as a field emission electron source have been reported due to great potential capabilities of flat panel display application. In this report, 240nm thermal oxide was initially grown at the p-type (100) (5-25 ohm-cm) 4 inch Si wafer and 310nm Si3N4 thin layer was deposited using low pressure chemical vapor deposition technique(LPCVD). The 2 micron size dot array was photolithographically patterned. The KOH anisotropic etching of the silicon substrate was utilized to provide V-groove formation. After formation of the V-groove shape, dry oxidation at 100$0^{\circ}C$ for 600 minutes was followed. In this procedure, the orientation dependent oxide growth was performed to have a etch-mask for dry etching. The thicknesses of the grown oxides on the (111) surface and on the (100) etch stop surface were found to be ~330nm and ~90nm, respectively. The reactive ion etching by 100 watt, 9 mtorr, 40 sccm Cl2 feed gas using inductively coupled plasma (ICP) system was performed in order to etch ~90nm SiO layer on the bottom of the etch stop and to etch the Si layer on the bottom. The 300 watt RF power was connected to the substrate in order to supply ~(-500)eV. The negative ion energy would enhance the directional anisotropic etching of the Cl2 RIE. After etching, remaining thickness of the oxide on the (111) was measured to be ~130nm by scanning electron microscopy.

• Journal of Information Display
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• v.5 no.1
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• pp.28-33
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• 2004

A high voltage NMOSFET is proposed to drive top emission organic light emitting device (OLED) used in the organic electroluminescent (EL) display on the single crystal silicon substrate. The high voltage NMOSFET can be fabricated by utilizing a simple layout technique with a standard CMOS logic process. It is clearly shown that the maximum supply voltage ($V_{DD}$) required for the pixel-driving transistor could reach 45 V through analytic and experimental methods. The high voltage NMOSFET was fabricated by using a standard 1.5 ${\mu}m$, 5 V CMOS logic process. From the measurements, we confirmed that the high voltage NMOSFET could sustain the excellent saturation characteristic up to 50 V without breakdown phenomena.