• Title/Summary/Keyword: substrate resistance

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The Influence of CuO on Bonding Behaviors of Low-Firing-Substrate and Cu Conductor (저온소성 기판과 Cu와의 동시소성에 미치는 CuO의 첨가효과)

  • 박정현;이상진
    • Journal of the Korean Ceramic Society
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    • v.31 no.4
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    • pp.381-388
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    • 1994
  • A new process which co-fires the low-firing-substrate and copper conductor was studied to achieve good bond strength and low sheet resistance of conductor. Cupric oxide is used as the precursor of conductive material in the new method and the firing atmosphere of the new process is changed sequently in air H2N2. The addition of cupric oxide and variations of firing atmosphere permited complete binder-burnout in comparison with the conventional method and contributed to the improvement of resistance and bonding behaviors. The potimum conditions of this experiment to obtain the satisfactory resistance and bond strength are as follows (binder-burnout temperature in air; 55$0^{\circ}C$, reducing temperature in H2; 40$0^{\circ}C$ for 30 min, ratio of copper and cupric oxide; 60:40~30:70 wt%). The bonding mechanism between the substrate and metal was explained by metal diffusion layer in the interface and the bond strength mainly depended on the stress caused by the difference of shrinkage and thermal expansion coefficient between the substrate and metal.

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Stretchable Deformation-Resistance Characteristics of Metal Thin Films for Stretchable Interconnect Applications I. Effects of a Parylene F Intermediate Layer and PDMS Substrate Swelling (신축 전자패키지 배선용 금속박막의 신축변형-저항 특성 I. Parylene F 중간층 및 PDMS 기판의 Swelling에 의한 영향)

  • Park, Donghyun;Oh, Tae Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.24 no.3
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    • pp.27-34
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    • 2017
  • We investigated the feasibility of parylene F usage as an intermediate layer between a polydimethylsiloxane (PDMS) substrate and an Au thin-film interconnect as well as the swelling effect of PDMS substrate on the stretchable deformability of an Au thin film. The 150-nm-thick Au film, which was sputtered on a PDMS substrate without a parylene F layer, exhibited an initial resistance of $11.7{\Omega}$ and an overflow of its resistance at a tensile strain of 12.5%. On the other hand, the Au film, which was formed with a 150-nm-thick parylene F layer, revealed an much improved resistance characteristics: $1.21{\Omega}$ as its initial resistance and $246{\Omega}$ at its 30% elongation state. With swelling of PDMS substrate, the resistance of an Au film substantially decreased to $14.4{\Omega}$ at 30% tensile strain.

Etch Resistance of Mask Layer modified by AFM-based Tribo-Nanolithography in Aqueous Solution (AFM 기반 액중 Tribo nanolithography 에서의 마스크 층 내식각성에 관한 연구)

  • Park Jeong-Woo;Lee Deug-Woo;Kawasegi Noritaka;Morita Noboru
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.268-271
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    • 2005
  • Etch resistance of mask layer on silicon substrate modified by AFM-based Tribo-Nanolithography (TNL) in Aqueous Solution in an aqueous solution was demonstrated. n consists or sequential processes, nano-scratching and wet chemical etching. The simple scratching can form a mask layer on the silicon substrate, which acting as an etching mask. For TNL, a specially designed cantilever with diamond tip, allowing the formation of mask layer on silicon substrate easily by a simple scratching process, has been applied instead of conventional silicon cantilever fur scanning. This study demonstrates how the TNL parameters can affect the etch resistance of mask layer, hence introducing a new process of AFM-based maskless nanolithography in aqueous solution.

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Effect of the Heat treatment and Boron on the Hot Corrosion Resistance of the Al Diffusion Coating (Al 확산피복층의 고온 내식성에 미치는 후열처리와 B첨가의 영향)

  • 김태원;윤재홍;이재현;김현수;변응선
    • Journal of the Korean institute of surface engineering
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    • v.32 no.1
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    • pp.67-77
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    • 1999
  • The Ni base superalloy Mar-M247 substrate was aluminized or aluminized after boronizing by the pack cementation under Ar atmosphere. The hot corrosion resistance and after-heat-treatment effect of aluminized specimens were studied by the cyclic hot corrosion test in $Na_2SO_4$-NaCl molten salt. XRD analysis showed that the $Ni_2Al_3$ phase was formed between the coated layer and substrate below 1273K but the NiAl phase above 1273K. The peak of the NiAl phase was developed after heat treatment. Corrosion test showed that corrosion resistance of the specimen with the NiAl phase was better than that with the $Ni_2Al_3$ phase. Corrosion resistance could be improved by heat treatment to form ductile NiAl phase, where cracks were not formed by thermal shock on coating layer. Moreover, it appeared that heat treatment played a role to improve corrosion resistance of Al diffusion coating above 1273K. The existence of boron in the Al diffusion coating layer obstructed outwared diffusion of Cr from the substrate, and it influenced on corrosion resistance of the coating layer by weakening adherence of the oxide scale.

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Stretchable Deformation-Resistance Characteristics of the Stiffness-Gradient Stretchable Electronic Packages Based on PDMS (PDMS 기반 강성도 경사형 신축 전자패키지의 신축변형-저항 특성)

  • Park, Dae Ung;Oh, Tae Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.26 no.4
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    • pp.47-53
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    • 2019
  • Stiffness-gradient stretchable electronic packages of the soft PDMS/hard PDMS/PTFE structure were processed using the polydimethylsiloxane (PDMS) as the base substrate and the more stiff polytetrafluoroethylene (PTFE) as the island substrate, and their stretchable deformation-resistance characteristics were characterized. The flip-chip joints, formed by bonding the chip bumps of 50 ㎛-diameter onto the PDMS/PTFE substrate pads, exhibited an average contact resistance of 96 mΩ. When the stretchable package of the soft PDMS/hard PDMS/PTFE structure was deformed to 30% elongation, the strain on the PTFE was restrained to 1%, resulting in a negligible resistance increase of 1% in the daisy-chain circuit formed on the PTFE island substrate. The circuit resistance increased for 1.7% after 2,500 cycles of 0~30% stretchable deformation.

Developing Low Cost, High Throughput Si Through Via Etching for LED Substrate (LED용 Si 기판의 저비용, 고생산성 실리콘 관통 비아 식각 공정)

  • Koo, Youngmo;Kim, GuSung;Kim, Sarah Eunkyung
    • Journal of the Microelectronics and Packaging Society
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    • v.19 no.4
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    • pp.19-23
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    • 2012
  • Silicon substrate for light emitting diodes (LEDs) has been the tendency of LED packaging for improving power consumption and light output. In this study, a low cost and high throughput Si through via fabrication has been demonstrated using a wet etching process. Both a wet etching only process and a combination of wet etching and dry etching process were evaluated. The silicon substrate with Si through via fabricated by KOH wet etching showed a good electrical resistance (${\sim}5.5{\Omega}$) of Cu interconnection and a suitable thermal resistance (4 K/W) compared to AlN ceramic substrate.

Salt damage resistance of mortar substrate coated by the urethane and acrylic waterproofing membranes (우레탄계와 아크릴계 도막 방수재가 도포된 바탕 모르타르의 염해 저항성 평가)

  • Lee, Jun;Miyauchi, Hiroyuki;Koo, Kyung-Mo;Choe, Gyeong-Cheol;Miyauchi, Kaori;Kim, Gyu-Yong
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2013.05a
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    • pp.329-331
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    • 2013
  • The salt damage resistance of waterproofing membrane was evaluated on the cracked mortar substrate. The types of specimens are urethane, acrylic waterproofing membrane, and no coating mortar substrate. After these specimens were cured by water curing for 4 weeks, they were cured by atmospheric curing at 20±2Co for 8 weeks. The salt water immersion test was carried out by following KS F 2737, and the penetration depth of chloride ion into substrate was measured in 1, 4, 8, and 13 weeks. As a result, in the case of non coating specimen, the chloride ion penetrated within one week. In the coated specimens, a regardless of the membrane type, the chloride ion did not penetrate during 13 weeks-tests on condition that the cracked width of substrate is less than 0.3mm. Also, the penetration speeds of the coated specimens were lower than that of non coating specimen. Therefore, our results reached a conclusion that waterproofing membrane has high salt damage resistance.

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Abnormal behaviors in electrical conductions of SOI substrate by thermal annealing temperature (열처리에 따른 SOI 기판에서의 전기전도특성의 이상 거동)

  • Cho, Won-Ju
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.126-127
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    • 2008
  • The effects annealing conditions on the electrical conductions of SOI substrate were studied. The reversible change of resistance and carrier concentration in accordance with the annealing temperature were observed for the first time in SOI substrate. The thermal donors due to interstitial oxygen atoms contribute the change of resistance and carrier concentration. Final1y, we show that the furnace annelaing at $500^{\circ}C$ at final heat treatment stage is effective for eliminate the thermal donor effects in SOI substrate.

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Effect of Organic Acids on Growth and Heat Resistance of Listeria monocytogenes Scott A (Listeria monocytogenes Scott A 의 성장과 열저항성에 미치는 유기산의 영향)

  • 이신호;조현순;김순희
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.23 no.2
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    • pp.293-297
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    • 1994
  • The effect of organic acids on growth and heat resistance of Listeria monocytogenes Scott A were investigated. The growth of L. monocytogenes was inhibited in Tryptic Soy Broth(TSB) with 0.1 or 0.2% of acetic , tartic , propionic , citric and lactic acid at 35$^{\circ}C$, respectively. The growth of l. Monocytogenes did not occur in TSB with 0.2% of acetic acid or propionic acid during 48h of incubation. The heat resistance of L.monocytogenes was affected by kind of organic acid, ph and heating substrate. L.monocytogenes showed more heat resistant in TSB with various organic acids than in 0.1M sodium phosphate with the same organic acids. Heat resistance decreased as pH of heating substrate decreased . Surface-adherent microcolony was more heat resistant than planktonic cell of L. monocytogenes. Propionic and lactic acids more affected on heat resistance of L.monocytogenes than acetic , tartaric and citric acids.

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