• 제목/요약/키워드: single buffer layer

검색결과 107건 처리시간 0.023초

Synthesis of WC-CrN superlattice film by cathodic arc ion plating system

  • Lee, Ho. Y.;Han, Jeon. G.;Yang, Se. H.
    • 한국표면공학회지
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    • 제34권5호
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    • pp.421-428
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    • 2001
  • New WC-CrN superlattice film was deposited on Si substrate (500$\mu\textrm{m}$) using cathodic arc ion plating system. The microstructure and mechanical properties of the film depend on the superlattice period (λ). In the X-ray diffraction analysis (XRD), preferred orientation of microstructure was changed according to various superlattice periods(λ). During the Transmission Electron Microscope analysis (TEM), microstructure and superlattice period (λ) of the WC - CrN superlattice film was confirmed. Hardness and adhesion of the deposited film was evaluated by nanoindentation test and scratch test, respectively. As a result of nanoindentation test, the hardness of WC - CrN superlattice film was gained about 40GPa at superlattice period (λ) with 7nm. Also residual stress with various superlattice period (λ) was measured on Si wafer (100$\mu\textrm{m}$) by conventional beam-bending technique. The residual stress of the film was reduced to a value of 0.2 GPa by introducing Ti - WC buffer layers periodically with a thickness ratio ($t_{buffer}$/$t_{buffer+superlattice}$ ). To the end, for the evaluation of oxidation resistance at the elevated temperature, CrN single layer and WC - CrN superlattice films with various superlattice periods on SKD61 substrate was measured and compared with the oxidation resistance.

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Parametric Studies of Pulsed Laser Deposition of Indium Tin Oxide and Ultra-thin Diamond-like Carbon for Organic Light-emitting Devices

  • Tou, Teck-Yong;Yong, Thian-Khok;Yap, Seong-Shan;Yang, Ren-Bin;Siew, Wee-Ong;Yow, Ho-Kwang
    • Journal of the Optical Society of Korea
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    • 제13권1호
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    • pp.65-74
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    • 2009
  • Device quality indium tin oxide (ITO) films are deposited on glass substrates and ultra-thin diamond-like carbon films are deposited as a buffer layer on ITO by a pulsed Nd:YAG laser at 355 nm and 532 nm wavelength. ITO films deposited at room temperature are largely amorphous although their optical transmittances in the visible range are > 90%. The resistivity of their amorphous ITO films is too high to enable an efficient organic light-emitting device (OLED), in contrast to that deposited by a KrF laser. Substrate heating at $200^{\circ}C$ with laser wavelength of 355 nm, the ITO film resistivity decreases by almost an order of magnitude to $2{\times}10^{-4}\;{\Omega}\;cm$ while its optical transmittance is maintained at > 90%. The thermally induced crystallization of ITO has a preferred <111> directional orientation texture which largely accounts for the lowering of film resistivity. The background gas and deposition distance, that between the ITO target and the glass substrate, influence the thin-film microstructures. The optical and electrical properties are compared to published results using other nanosecond lasers and other fluence, as well as the use of ultra fast lasers. Molecularly doped, single-layer OLEDs of ITO/(PVK+TPD+$Alq_3$)/Al which are fabricated using pulsed-laser deposited ITO samples are compared to those fabricated using the commercial ITO. Effects such as surface texture and roughness of ITO and the insertion of DLC as a buffer layer into ITO/DLC/(PVK+TPD+$Alq_3$)/Al devices are investigated. The effects of DLC-on-ITO on OLED improvement such as better turn-on voltage and brightness are explained by a possible reduction of energy barrier to the hole injection from ITO into the light-emitting layer.

$YBa_2CU_3O_{7-\delta}$ coated Conductor 완충층으로의 응용을 위한 $SrTiO_3 $ 박막의 성장 조건 (Growth Conditions of $SrTiO_3 $ Film on Textured Metal Substrate for $YBa_2CU_3O_{7-\delta}$ Coated Conductor)

  • 정준기;고락길;송규정;박찬;김철진
    • 한국결정학회지
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    • 제14권2호
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    • pp.51-55
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    • 2003
  • YBa₂CU₃O/sub 7-8/(YBCO) coated conductor의 완충층 구조를 개선하기 위하여 2축배향된 Ni-3 wt%W 합금 기판위에 단일 완충층으로 SrTiO₃(STO) 박막을 증착하였다. YBCO와 STO 박막은 펄스레이저 증착법으로 성장시켰다. STO 박막의 표면은 증착온도에 따라 다른 미세조직을 보여 주었고, XRD 분석에서는 STO와 YBCO 박막이 금속기판의 배향성을 가지면서 성장되었음을 알 수 있었다. 액체질소 온도에서 1.2 MA/㎠의 임계전류밀도와 86 K의 임계온도를 가지는 짧은 길이의 coated conductor를 STO 단일완충층을 이용하여 제조하였다.

멀티레인을 지원하는 모바일 카메라용 직렬 인터페이스 프로세서 설계 (Mobile Camera Processor Design with Multi-lane Serial Interface)

  • 현유진;권순;이종훈;정우영
    • 대한전자공학회논문지SD
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    • 제44권7호통권361호
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    • pp.62-70
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    • 2007
  • 본 논문에서는 차세대 모바일 단말기의 카메라를 위한 MIPI CSI-2 / D-PHY 프로세서를 설계하였다. 설계된 프로세서는 멀티레인을 효과적으로 지원하기 위해 제안된 레인관리계층을 가지고 있다. 이 레인관리계층의 구조는 레인별로 존재하는 메모리를 하나로 통합하여, 송수신단이 지원하는 레인의 개수가 다른 경우에도 유연하게 관리되는 구조이다. 또한 패킷의 보전성을 확보하기 위해 CRC 코드를 사용하는데, 이를 실시간 생성을 위해 바이트 단위로 병렬 처리하는 CRC 생성기를 사용하였다. 마지막으로 데이터 레인으로부터 수신된 패킷들의 동기화 처리를 위한 동기 코드 검출기와 바이트 클럭 생성기도 설계하였다. 또한 설계된 프로세서는 테스트 벤치를 통해 RTL 검증되었고 동작함을 확인 할 수 있었다.

박막태양전지 버퍼층 적용을 위해 RF 스퍼터링 및 급속열처리 공정으로 제작한 황화아연 박막의 구조적 광학적 특성 (Structural and Optical Properties of ZnS Thin Films Fabricated by Using RF Sputtering and Rapid Thermal Annealing Process for Buffer Layer in Thin Film Solar Cells)

  • 박찬일;전영길
    • 한국전자통신학회논문지
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    • 제15권4호
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    • pp.665-670
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    • 2020
  • CIGS 박막 태양 전지의 버퍼층은 흡수층과 윈도우층 사이의 밴드정렬(band alignment)을 통해 에너지 변환 효율을 향상시킨다. ZnS는 무독성의 II-VI 반도체 화합물로서 직접천이형 광대역 밴드갭과 n형 전도성을 가지며, 높은 광투과성, 높은 굴절률 등의 우수한 전기적, 광학적 특성을 가지고 있고, 우수한 격자정합을 가지는 물질이다. 이 연구에서, RF 마그네트론 스퍼터링 방법에 의해 증착 후 급속 열처리에 의해 제작된 ZnS 버퍼층 박막의 구조적, 광학적 특성의 상관관계에 대해 고찰하였다. (111), (220), (311) 면의 섬아연광 입방정 구조를 확인할 수 있고, 상대적으로 저온에서 급속열처리를 수행한 시료에서는 (002) 면의 우르쯔광 육방정 구조가 함께 나타나는 다결정이 되었다. 고온에서 급속열처리 수행한 시료에서는 섬아연광 입방정 구조의 단결정으로 상전이 된다. 화학적 성분 분석을 통해서 Zn/S의 비율이 화학양론에 근접한 시료에서 섬아연광 입방정 구조의 단결정이 나타났음을 확인하였다 급속열처리 온도가 증가할수록 흡수단이 다소간 단파장 쪽으로 이동되고, 가시광 파장 범위에서 평균 광투과율이 증가하는 경향성을 보이며 500℃ 조건에서는 80.40%로 향상되었다.

중간 결합층이 적층된 측면연마 광섬유 결합기의 해석 및 결합효율 개선 (Analysis of side-polished fiber couplers with an intermediate-coupling layer and improvement of their coupling efficiency)

  • 손경락;김광택
    • 한국광학회지
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    • 제15권1호
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    • pp.28-33
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    • 2004
  • 상부 도파로와 중간 결합층이 적층된 단일모드 광섬유를 기본구조로 하는 측면 연마 광섬유 결합기를 상호 광 결합이 일어나는 영역을 다층막 도파로로 등가화하여 결합 효율을 해석하였다. 다층막 구조에서 중간 결합층의 유무에 따른 반사도를 계산하여 상부 도파로의 굴절률의 함수로 도시하였고, 상부 도파로의 굴절률이 광섬유 코어의 굴절률보다 클 경우 중간 결합층의 조건에 의해서 광 결합이 증가되어짐을 보였다. 리튬나오베이트를 상부 도파로로 가지는 결합기의 실험결과를 톤해 이론적 해석의 타당함을 보였고 계산 결과와 일치함을 보였다.

휴대용 POC 시스템을 위한 원터치형 면역 센싱 랩온어칩 (One-Touch Type Immunosenging Lab-on-a-chip for Portable Point-of-care System)

  • 박신욱;강태호;이준황;윤현철;양상식
    • 전기학회논문지
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    • 제56권8호
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    • pp.1424-1429
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    • 2007
  • This paper presents a simple and reliable one-touch type multi-immunosensing lab-on-a-chip (LOC) detecting antibodies as multi-disease markers using electrochemical method suitable for a portable point-of-care system (POCS). The multi-stacked LOC consists of a PDMS space layer for liquids loading, a PDMS valve layer with 50 im in height for the membrane, a PDMS channel layer for the fluid paths, and a glass layer for multi electrodes. For the disposable immunoassay which needs sequential flow control of sample and buffer liquids according to the designed strategies, reliable and easy-controlled on-chip operation mechanisms without any electric power are necessary. The driving forces of sequential liquids transfer are the capillary attraction force and the pneumatic pressure generated by air bladder push. These passive fluid transport mechanisms are suitable for single-use LOC module. Prior to the application of detection of the antibody as a disease marker, the model experiments were performed with anti-DNP antibody and anti-biotin antibody as target analytes. The flow test results demonstrate that we can control the fluid flow easily by using the capillary stop valve and the PDMS check valves. By the model tests, we confirmed that the proposed LOC is easily applicable to the bioanalytic immunosensors using bioelectrocatalysis.

The Influence of Al Underlayer on the Optical and Electrical Properties of GZO/Al Thin Films

  • Kim, Sun-Kyung;Kim, So-Young;Kim, Seung-Hong;Jeon, Jae-Hyun;Gong, Tae-Kyung;Kim, Daeil;Choi, Dong-Hyuk;Son, Dong-Il
    • Transactions on Electrical and Electronic Materials
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    • 제14권6호
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    • pp.321-323
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    • 2013
  • 100 nm thick Ga doped ZnO (GZO) thin films were deposited with DC and RF magnetron sputtering at room temperature on glass substrate and Al coated glass substrate, respectively. and the effect of the Al underlayer on the optical and electrical properties of the GZO films was investigated. As-deposited GZO single layer films had an optical transmittance of 80% in the visible wavelength region, and sheet resistance of 1,516 ${\Omega}/{\Box}$, while the optical and electrical properties of GZO/Al bi-layered films were influenced by the thickness of the Al buffer layer. GZO films with 2 nm thick Al film show a lower sheet resistance of 990 ${\Omega}/{\Box}$, and an optical transmittance of 78%. Based on the figure of merit (FOM), it can be concluded that the thin Al buffer layer effectively increases the performance of GZO films as a transparent and conducting electrode without intentional substrate heating or a post deposition annealing process.

도시생태계 현황파악 및 자연성 증진 방안 -서울시 강서구를 사례로- (Ecosystem Structure and Improvement of Naturalness in Urban Area -In the Case of Kangseo-gu in Seoul-)

  • 이수동;이경재
    • 한국조경학회지
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    • 제32권3호
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    • pp.1-17
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    • 2004
  • The focus of this study is the promotion of green area volumes and their naturalness, water circulation system, decline of entropy, creation of biological habitats and linkage of separated urban green space. Re-presentative urban biotope survey sites were categorized as urban biotope, semi-natural biotope, and natural forest. In the urban biotope, a residential biotope was constructed near the Han river and in mountain areas. The green-area ratio at the housing complex was about 25%. GVZ(Grunvolumenzahl) was 0.35m$^3$/m$^2$ at the 5∼10-story housing complex, and 1.53m$^3$/m$^2$ over the 11-story. As for the green-area structure of the housing complex, canopy layer, understory layer, and shrub layer were not differentiated and the green-area volume was not high enough. The green-area ratio of school areas as a public area biotope was 5∼20%. GVZ was 1.12m$^3$/m$^2$ at Myungduk High School, and 1.78m$^3$/m$^2$ at Jeonggok Elementary School. In order to convert the urban biotope into an ecological area, green areas around the buildings should be connected to urban buffer green areas, and multi-layer structures should be established with natural plant species. In the semi-natural biotope, neighbor parks were created park in the vicinity of the natural forests. GVZ was 0.28m$^3$/m$^2$, and plantation was established with single layer structure and was definitely insufficient for the area. The urban buffer green areas have been established in strip corridors with the width of 20∼123m. In those areas, GVZ was 0.16∼0.27m$^3$/m$^2$ and had a deficient canopy layer, understory layer, and shrub layer. Soil conditions were not favorable for tree growth. In the natural biotope, GVZ of the plantation was 1.03∼1.5m$^3$/m$^2$ but the high crown closure of this area reduces the chance of species change and succession. GVZ of natural forest was 2.53∼2.57m$^3$/m$^2$. It is desirable to plant diverse plants and the natural forest should be succeeded by broad-leaf deciduous tree species. To improve the value of biotope at Kangseo-Gu, building height needs to be limited to reduce the environmental deterioration in the city. In order to maintain the water circulation system, water-permeable material is recommened when the urban surface areas are paved. The establishment of a water circulation system will improve ground water levels, soil moisture, water quality, and habitats. In order to improve biological diversity, it is desirable to have multi-layer structures in urban green areas with native species.

(Glycine+Urea) 혼합연료를 이요한 자발착화 연소반응법에 의한 우수한 소결성의 초미분체 LaAlO$_3$ 분말 합성 (Synthesis of Ultrafine LaAlO$_3$ Powders with Good Sinterability by Self-Sustaining Combustion Method Using (Glycine+Urea) Fuel)

  • 남희동;최우성;이병하;박성
    • 한국세라믹학회지
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    • 제36권2호
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    • pp.203-209
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    • 1999
  • Si 기판위에 Ba2YCu3O7-$\delta$ 고온초전도체를 응용하기 위해 요구되는 buffer층으로 유망한 재료인 LaAlO3 단일상 분말을 고상반응법과 자발착한 연소반응법으로 제조하였다. 제조된 LaAlO3 분말의 입자형태와 결정상태는 scanning electron microscope (SEM)과 X-ray diffractometer (XRD)를 이용하여 분석하였다. 분말의 비표면적과 소결특성은 각각 Brunauer-Emmett-Teller(BET) 방법과 dilatometer를 측정하였다. 고상반응법으로 LaAlO3 분말을 제조할 때에는 하소온도를 150$0^{\circ}C$까지 높게 하여도 단일상을 얻는 것이 어려웠으나 자발착한 연소반응법에 의한 분말제조는 $650^{\circ}C$의 저온에서 하소하여도 쉽게 얻을 수 있었다. Dilatometer 측정을 통하여 분석해 보면, 고상반응법에 의한 분말보다 자발착한 연소반응법에 의한 분말로 제조된 소결체가 고상반응법에 의한 소결체에 비해 1.4배나 큰 소멸밀도(98.87%)를 가졌다. 이렇게 소결밀도에서 큰 차이가 나는 것은 자발착한 연소방법에 의한 분말의 평균 입자크기가 nano crystal size이고 비표면적 값(56.54 $m^2$/g)이 매우 크기 때문이다. 두가지 방법으로 제조된 분말을 이용, LaAlO3 layer를 스크린 프린팅과 소결법으로 Si 기판상에 제조하였으며 자발착한 연소합성법으로 제조된 분말은 110$0^{\circ}C$에서 우수한 소결특성을 나타내었다.

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