• 센서학회지
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• 제22권6호
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• pp.433-438
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• 2013

In this paper, we found surface shapes are affected by several parameters of RIE, such as RF power, pressure, temp, and process times. The reflectance of pyramid and half sphere structures show differences among shapes, size, height, and depth of those structures. We made about $1{\mu}m$ pyramid and half sphere shapes of silicon surface with RIE. For comparing the reflectance, pyramid and half sphere structures are fabricated with same height. Pyramid structure cell shows higher cell efficiency of 12.5% by 1.1% than one of half sphere structure of 11.4%. The light absorption is more increased through the pyramid structure than half sphere structure.

• 센서학회지
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• 제28권2호
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• pp.117-120
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• 2019

Graphene is recognized as a promising material for silicon photonics, since it has a wide optical-window that entirely covers the optical communication wavelength region ($1.3{\sim}1.6-{\mu}m$) and extremely high-carrier mobility that makes it possible to fabricate the high-speed photodetectors. However, the maximum absorbance of monolayer graphene is only 2.3%, which limits the photoresponse characteristics of graphene photodetectors. As a result, a low photoresponsivity of graphene photodetector is a critical issue limiting the use of graphene photodetectors in the optical communications field. In this paper, we investigated effects of optically-modulated metal-graphene contact on the photoresponsivity of graphene photodetectors. The optical modulation of the contact resistance mainly determined the photoresponse characteristics of graphene photodetectors. The Ni-contact graphene photodetector which has a characteristic of the significant optical modulation of metal-graphene contact showed a higher photoresponsivity than the Pd-contact device. This work will provide a way to improve the photoresponse characteristics of graphene-based photodetector and contribute to the development of high-speed/high-responsivity graphene photodetector.

• 센서학회지
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• 제30권1호
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• pp.56-60
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• 2021

In this study, the relationship between the transmitted light intensity and full-width-at-half-maximum (FWHM) of a Fabry-Perot filter was investigated. The measured refractive indices and absorption coefficients of the fabricated thin films were applied to the Fabry-Perot filter via simulations using optical software. Although considerable research has been conducted on Fabry-Perot filters, this study focused on the usefulness of 4.26-㎛ infrared filtering in carbon dioxide detection. Optical analysis was performed considering the effects of the thickness, refractive indices, and number of thin films in a distributed Bragg reflector. Ultimately, a clear trade-off relationship was observed wherein the transmitted light intensity decreased as the number of multilayers increased; however, the FWHM was observed to be narrower.

• 센서학회지
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• 제31권4호
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• pp.228-237
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• 2022

Two-dimensional (2D) nanomaterials have demonstrated the potential to replace silicon and compound semiconductors that are conventionally used in photodetectors. These materials are ultrathin and have superior electrical and optoelectronic properties as well as mechanical flexibility. Consequently, they are particularly advantageous for fabricating high-performance photodetectors that can be used for wearable device applications and Internet of Things technology. Although prototype photodetectors based on single microflakes of 2D materials have demonstrated excellent photoresponsivity across the entire optical spectrum, their practical applications are limited due to the difficulties in scaling up the synthesis process while maintaining the optoelectronic performance. In this review, we discuss facile methods to mass-produce 2D material-based photodetectors based on the exfoliation of van der Waals crystals into nanosheet dispersions. We first introduce the liquid-phase exfoliation process, which has been widely investigated for the scalable fabrication of photodetectors. Solution processing techniques to assemble 2D nanosheets into thin films and the optoelectronic performance of the fabricated devices are also presented. We conclude by discussing the limitations associated with liquid-phase exfoliation and the recent advances made due to the development of the electrochemical exfoliation process with molecular intercalants.

• Nuclear Engineering and Technology
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• 제54권5호
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• pp.1760-1768
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• 2022

When gamma-camera sensor modules, which are key components of radiation imagers, are derived from the coupling between scintillators and photosensors, the light collection efficiency is an important factor in determining the effectiveness with which the instrument can identify nuclides via their derived gamma-ray spectra. If the pixel area of the scintillator is larger than the pixel area of the photosensor, light loss and cross-talk between pixels of the photosensor can result in information loss, thereby degrading the precision of the energy estimate and the accuracy of the position-of-interaction determination derived from each active pixel in a coded-aperture based gamma camera. Here we present two methods to overcome the information loss associated with the loss of photons created by scintillation pixels that are coupled to an associated silicon photomultiplier pixel. Specifically, we detail the use of either: (1) light guides, or (2) scintillation pixel areas that match the area of the SiPM pixel. Compared with scintillator/SiPM couplings that have slightly mismatched intercept areas, the experimental results show that both methods substantially improve both the energy and spatial resolution by increasing light collection efficiency, but in terms of the image sensitivity and image quality, only slight improvements are accrued.

• Nuclear Engineering and Technology
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• 제54권3호
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• pp.1024-1029
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• 2022

Composite scintillation screens on a base of Gd_1.2Y_1.8Ga_2.5Al_2.5O₁₂:Ce (GYAGG) scintillator have been evaluated for neutron detection. Besides the powdered scintillator, the composite includes ⁶LiF particles; both are merged with a binder and deposited onto the light-reflecting aluminum substrate. Results obtained demonstrates that screens are suitable for use with a silicon photomultiplier readout to create a prospective solution for a compact and low-cost thermal neutron sensor. Composite GYAGG/⁶LiF scintillation screen shows a pretty matched sensitivity and γ-background rejection with a widely used ZnS/⁶LiF screens however, possesses forty times faster response.

• 센서학회지
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• 제8권2호
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• pp.115-123
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• 1999

PSG(800nm)/$Si_3N_4$ (150nm)로 구성된 유전체 membrane 윗면에 heater와 감지전극을 등일면상에 동시에 형성하였다. 제작된 소자의 전체 면적은 $3.78{\times}3.78mm^2$이고, diaphragm의 면적은 $1.5{\times}1.5mm^2$이며, 감지막치 면적은 $0.24{\times}0.24mm^2$였다. 그리고 diaphragm내의 열분포 분석을 유한요소법을 이용하여 수행하였으며, 실제로 제작된 소자의 열분포와 비교하였다. 소비전력은 동작온도 $350^{\circ}C$에서 약 85mW였다. Sn 금속막을 상온과 $232^{\circ}C$의 두 가지 기판온도에서 열증착하였고, 이를 $650^{\circ}C$의 산소분위기에서 3시간 열산화함으로써 $SnO_2$ 감지막을 형성하였다. 그리고 이를 SEM과 XRD로 특성을 분석하였다. 제작된 소자에 대해서 온도 및 습도에 대한 감지막의 영향 및 부탄가스에 대한 반응특성도 조사하였다.

• 센서학회지
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• 제8권3호
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• pp.265-273
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• 1999

본 논문에서는 MEMS 공정에 많이 사용되는 tetraethoxysilane (TEOS) 산화막, low temperature oxide (LTO), 7 wt%, 10 wt% phosphosilicate glass (PSG)의 잔류응력을 Euler beam과 bent-beam strain sensor를 제작하여 측정하였다. 이러한 산화막 잔류응력 측정 구조물을 만들기 위해 다결정실리콘을 희생층으로 사용하였으며 $XeF_2$를 이용하여 희생층 식각을 하였다. 먼저 각 산화막의 증착 당시 잔류응력을 측정한 후 $500^{\circ}C$에서 $800^{\circ}C$까지 질소분위기에서 1 시간 동안 열처리하였다. 또 표면미세가공에서 가장 많이 사용되는 $585^{\circ}C$, $625^{\circ}C$ 다결정실리콘 증착 조건에서 열처리하여 산화막의 잔류응력 변화를 측정하였다. 측정 결과 TEOS와 LTO, 7 wt% PSG는 $600^{\circ}C$ 이하에서 압축잔류응력이 줄어들다가 그 이상에서 다시 커지는 반면에 phosphorus 농도가 높은 10 wt% PSG의 경우는 $500^{\circ}C$이상에서 압축잔류응력이 증가하는 것을 확인하였다. 또 7 wt% PSG가 $585^{\circ}C$ 다결정실리콘 증착 시 가장 작은 잔류응력을 나타내었다.

• Journal of Astronomy and Space Sciences
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• 제31권3호
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• pp.277-283
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• 2014

Next Generation Small Satellite-1 (NEXTSat-1) is scheduled to launch in 2017 and Instruments for the Study of Space Storm (ISSS) is planned to be onboard the NEXTSat-1. High Energy Particle Detector (HEPD) is one of the equipment comprising ISSS and the main objective of HEPD is to measure the high energy particles streaming into the Earth radiation belt during the event of a space storm, especially, electrons and protons, to obtain the flux information of those particles. For the design of HEPD, the Geometrical Factor was calculated to be 0.05 to be consistent with the targets of measurement and the structure of telescope with field of view of $33.4^{\circ}$ was designed using this factor. In order to decide the thickness of the detector sensor and the classification of the detection channels, a simulation was performed using GEANT4. Based on the simulation results, two silicon detectors with 1 mm thickness were selected and the aluminum foil of 0.05 mm is placed right in front of the silicon detectors to shield low energy particles. The detection channels are divided into an electron channel and two proton channels based on the measured LET of the particle. If the measured LET is less than 0.8 MeV, the particle belongs to the electron channel, otherwise it belongs to proton channels. HEPD is installed in the direction of $0^{\circ}$, $45^{\circ}$, $90^{\circ}$ against the along-track of a satellite to enable the efficient measurement of high energy particles. HEPD detects electrons with the energy of 0.1 MeV to several MeV and protons with the energy of more than a few MeV. Thus, the study on the dynamic mechanism of these particles in the Earth radiation belt will be performed.

• 센서학회지
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• 제10권5호
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• pp.292-303
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• 2001

본 연구에서는 수평형 전계 방출 소자를 제작하고 그 특성을 측정하였다. 이를 진공자장 센서에 이용하기 위하여 Lorentz 원리를 응용하여 센서를 설계하고 제작하였다. $POCl_3(10^{20}cm^{-3})$ 도핑된 다결정 실리콘을 전계 방출 소자의 음극 및 양극 재료로 이용하였으며 그 두께는 각각 $2\;{\mu}m$였다. PSG(두께 $2\;{\mu}m$)를 희생층으로 사용하여 최종 단계에서 불산을 이용하여 제거하고 승화건조법을 이용하여 소자의 기판 점착 현상을 방지하였다. 제작된 소자를 유리기판 #1 위에 silver paste로 고정시키고 Cr 전극 패드와 와이어본딩 한 뒤 진공내에서 양극접합공정을 이용하여 소자를 $1.0{\times}10^{-6}\;Torr$에서 진공 실장하였다. 실장 후 게터를 활성화하여 내부진공도를 향상시켰다. 이렇게 패키징된 소자는 두달여 기간 동안 특별한 특성저하 없이 잘 동작되었으며 그 이상의 기간에 대해서는 확인하지 못하였다. 패키징된 자장 센서는 패키징하기 전 진공챔버 내에서 보인 특성치와 별다른 차이 없이 잘 동작되었으며 단지 약간의 전류 감소 현상만이 관찰되었다. 측정된 센서의 감도는 약 3%/T로서 작은 값이었으나 그 가능성을 확인할 수는 있었다.