Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Si/SiO2 Multilayer-based Fabry-Perot Filter for 4.26 ㎛ Filtering in Carbon Dioxide Detection

이산화탄소 감지를 위한 4.26 ㎛ 필터용 poly-Si/SiO2 다층 박막 기반의 패브리 페로-필터

  • Do, Nam Gon (Safety System R&D Group, Korea Institute of Industrial Technology) ;
  • Lee, Junyeop (Safety System R&D Group, Korea Institute of Industrial Technology) ;
  • Jung, Dong Geon (Safety System R&D Group, Korea Institute of Industrial Technology) ;
  • Kong, Seong Ho (School of Electrical Engineering, Kyungpook National University) ;
  • Jung, Daewoong (Safety System R&D Group, Korea Institute of Industrial Technology)
  • 도남곤 (한국생산기술연구원 안전시스템연구그룹) ;
  • 이준엽 (한국생산기술연구원 안전시스템연구그룹) ;
  • 정동건 (한국생산기술연구원 안전시스템연구그룹) ;
  • 공성호 (경북대학교 전자전기공학부) ;
  • 정대웅 (한국생산기술연구원 안전시스템연구그룹)
  • Received : 2021.01.20
  • Accepted : 2021.01.29
  • Published : 2021.01.31
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Abstract

In this study, the relationship between the transmitted light intensity and full-width-at-half-maximum (FWHM) of a Fabry-Perot filter was investigated. The measured refractive indices and absorption coefficients of the fabricated thin films were applied to the Fabry-Perot filter via simulations using optical software. Although considerable research has been conducted on Fabry-Perot filters, this study focused on the usefulness of 4.26-㎛ infrared filtering in carbon dioxide detection. Optical analysis was performed considering the effects of the thickness, refractive indices, and number of thin films in a distributed Bragg reflector. Ultimately, a clear trade-off relationship was observed wherein the transmitted light intensity decreased as the number of multilayers increased; however, the FWHM was observed to be narrower.

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References

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