Journal of Sensor Science and Technology (센서학회지)
- Volume 8 Issue 2
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- Pages.115-123
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- 1999
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Characteristics and Fabrication of Micro-Gas Sensors with Heater and Sensing Electrode on the Same Plane
동일면상에 heater와 감지전극을 형성한 마이크로가스센서의 제작 및 특성
- Lim, Jun-Woo (School of Electronic and Electrical Eng., Kyungpook Nat'l Univ.) ;
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Lee, Sang-Mun
(School of Electronic and Electrical Eng., Kyungpook Nat'l Univ.) ;
- Kang, Bong-Hwi (School of Electronic and Electrical Eng., Kyungpook Nat'l Univ.) ;
- Chung, Wan-Young (School of Information Communication Eng., Dongseo Univ.) ;
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Lee, Duk-Dong
(School of Electronic and Electrical Eng., Kyungpook Nat'l Univ.)
- 임준우 (경북대학교 전자.전기공학부) ;
-
이상문
(경북대학교 전자.전기공학부) ;
- 강봉휘 (경북대학교 전자.전기공학부) ;
- 정완영 (동서대학교 정보통신공학부) ;
-
이덕동
(경북대학교 전자.전기공학부)
- Published : 1999.03.31
Abstract
A micro-gas sensor with heater and sensing electrode on the same plane was fabricated on phosphosilicate glass(PSG, 800nm)/
PSG(800nm)/
Keywords