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http://dx.doi.org/10.5369/JSST.2013.22.6.433

Pyramid and Half-Sphere Type of Surface Texturing for Si-Solar Cell  

Pyo, Dae-Seong (Shool of Electronics Engineering, Kyungpook National University)
Jo, Jun-Hwan (Shool of Electronics Engineering, Kyungpook National University)
Hong, Pyo-Hwan (Shool of Electronics Engineering, Kyungpook National University)
Lee, Jong-Hyun (Shool of Electronics Engineering, Kyungpook National University)
Kim, Bonghwan (Department of Electronics Engineering, Catholic University of Daegu)
Cho, Chan-Seob (Shool of Electrical Engineering, Kyungpook National University)
Publication Information
Journal of Sensor Science and Technology / v.22, no.6, 2013 , pp. 433-438 More about this Journal
Abstract
In this paper, we found surface shapes are affected by several parameters of RIE, such as RF power, pressure, temp, and process times. The reflectance of pyramid and half sphere structures show differences among shapes, size, height, and depth of those structures. We made about $1{\mu}m$ pyramid and half sphere shapes of silicon surface with RIE. For comparing the reflectance, pyramid and half sphere structures are fabricated with same height. Pyramid structure cell shows higher cell efficiency of 12.5% by 1.1% than one of half sphere structure of 11.4%. The light absorption is more increased through the pyramid structure than half sphere structure.
Keywords
Solar cell; Texturing; Pyramid; Half-sphere; RIE;
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