• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집E
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• pp.456-462
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• 2001

Comprehensive numerical computations are made of a homogenous spin-up in a cylindrical cavity with a time-dependent rotation rate. Numerical solutions are acquired to the governing axisymmetric cylindrical Navier-Stokes equation. A rotation rate formula is ${\Omega}_f={\Omega}_i+{\Delta}{\Omega}(1-{\exp}(-t/t_c))$. If $t_c$ is large, it implies that a rotation change rate is small. The Ekman number, E, is set to $10^{-4}$ and the aspect ratio, R/H, fixed to I. For a linear spin-up(${\epsilon}<<$), the major contributor to spin-up in the interior is not viscous-diffusion term but inviscid term, especially Coriolis term, though $t_c$ is very large. The viscous-diffusion term only works near sidewall. But for spin-up from rest, when $t_c$ is very large, viscous-diffusion term affects interior area as well as sidewall, initially. So azimuthal velocity of interior for large $t_c$ appears faster than that of interior for relatively small $t_c$. However, the viscous-diffusion term of interior decreases as time increases. Instead, inviscid term appears in the interior.

• 대한전자공학회논문지SD
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• 제37권2호
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• pp.46-54
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• 2000

기존 건물의 실내에서 가입자 단말기까지 광케이블을 포설하기가 어렵기 때문에 실내의 주 출입구까지만 광케이블을 포설 종단하고 가입자 단말까지는 광무선 전송방식을 도입할 수 있다. 본 논문에서 광무선 송신기가 벽면에 위치할 경우 세 번 반사하는 경우까지 포함하는 임펄스응답을 구하고 이 계산된 임펄스응답을 사용하여 광전력 페널티를 구하였다. 벽면에 송신기가 위치하여도 한번 반사되어 수신되는 광전력이 크므로 실내 적용이 가능함을 알 수 있었다. 또한 2 Mb/s의 전송속도에서 광전력 페널티는 무시할 수 있을 정도로 적었다.

• 마이크로전자및패키징학회지
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• 제21권4호
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• pp.63-68
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• 2014

For a nanoscale Cu/low-k wafer, inter-layer dielectric (ILD) and metal layers peelings, cracks, chipping, and delamination are the most common dicing defects by traditional diamond blade saw process. Sidewall void in sawing street is one of the key factors to bring about cracks and chipping. The aim of this research is to evaluate laser grooving & mechanical sawing parameters to eliminate sidewall void and avoid top-side chipping as well as peeling. An ultra-fast pico-second (ps) laser is applied to groove/singulate the 28-nanometer node wafer with Cu/low-k dielectric. A series of comprehensive parametric study on the recipes of input laser power, repetition rate, grooving speed, defocus amount and street index has been conducted to improve the quality of dicing process. The effects of the laser kerf geometry, grooving edge quality and defects are evaluated by using scanning electron microscopy (SEM) and focused ion beam (FIB). Experimental results have shown that the laser grooving technique is capable to improve the quality and yield issues on Cu/low-k wafer dicing process.

• JSTS:Journal of Semiconductor Technology and Science
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• 제6권3호
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• pp.162-168
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• 2006

To fabricate nanometer scale InGaAs HEMTs, we have successfully developed various novel nano-patterning techniques, including sidewall-gate process and e-beam resist flowing method. The sidewall-gate process was developed to lessen the final line length, by means of the sequential procedure of dielectric re-deposition and etch-back. The e-beam resist flowing was effective to obtain fine line length, simply by applying thermal excitation to the semiconductor so that the achievable final line could be reduced by the dimension of the laterally migrated e-beam resist profile. Applying these methods to the device fabrication, we were able to succeed in making 30nm $In_{0.7}Ga_{0.3}As$ HEMTs with excellent $f_T$ of 426GHz. Based on nanometer scale InGaAs HEMT technology, several high performance millimeter-wave integrated circuits have been successfully fabricated, including 77GHz MMIC chipsets for automotive radar application.

• 한국정밀공학회지
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• 제28권2호
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• pp.239-244
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• 2011

Nano Imprint Lithography(NIL) is technique for copying a pattern from stamp with nano size pattern in order to replicated the materials. It is very important to demold in order to make NIL process effectively. Self Assembled Monolayers(SAM) coater is manufactured by means of decreasing surface energy with the stamp surface treatment to improve release characteristics. Manufactured device contains tilting and rotation option for increasing process life time by coating on the sidewall of the pattern in stamp. The stamp coated with optimized tilting angle $30^{\circ}$ and rotation speed of 10rpm has more imprinting cycles than the stamping coated without tilting and rotation. Effective SAM coating on the sidewall of the pattern in stamp will improve by 50% of process life time.

• Journal of Welding and Joining
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• 제21권3호
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• pp.85-91
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• 2003

Narrow gap welding has many advantages over conventional V-grooved butt welding such as high productivity, small deformation and improved mechanical property of joints. With narrower groove gap, less arc heat input is expected will all the other advantages of narrow gap welding. The main defects of narrow gap welding include the lack of root fusion, convex bead surface and irregular surface, all of which have negative effects on the next welding pass. This paper suggests an up-and-down torch oscillation for ultra narrow gap welding with gap size of 5mm and investigates the proper welding conditions to fulfill the reliable and high welding quality. First, GMA welding model was suggested for ultra narrow gap welding system with Halmoy's model referenced for wire melting modeling. And the arc length in ultra narrow gap was defined. Secondly, based on the experimental results of up-and-down torch oscillation welding, phase shift of current and wire extension length were simulated for varying oscillation frequency to show that weld the bead shape in ultra narrow gap welding can be predicted. As the result, it was confirmed that reliable weld quality in ultra narrow gap welding can be achieved with up-and-down torch oscillation above 15Hz due to its ability to provide uniform heat input along the sidewall of gap.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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• pp.279-281
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• 1997

The properties of Platinum dry etching were investigated in MICP(Magnetized Inductively Coupled Plasma). The problem with Platinum etching is the redeposition of sputtered Platinum on the sidewall. Because of the redeposits on the sidewall, the etching of patterned Platinum structure produce feature sizes that exceed the original dimension of the PR size and the etch profile has needle-like shape.[1] Generally, $Cl_2$ plasma is used for the fence-free etching.[1][2][3] The main object of this study was to investigate a new process technology for the fence-free Pt etching. Platinum was etched with Ar plasma at the cryogenic temperature and with Ar/$SF_6$ plasma at room temperature. In cryogenic etching, the height of fence was reduced to 20% at $-190^{\circ}C$ compared with that of room temp., but the etch profile was not fence-free. In Ar/$SF_6$ Plasma, chemical reaction took part in etching process. The trend of properties of Ar/$SF_6$ Plasma etching is similar to that of $Cl_2$ Plasma etching. Fence-free etching was possible, but PR selectivity was very low. A new gas chemistry for fence-free Platinum etching was proposed in this study.

• 대한기계학회논문집B
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• 제40권4호
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• pp.245-253
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• 2016

타이어의 반복적 변형과 노면과의 마찰은 열발생을 야기하여 타이어의 온도를 상승시킨다. 이 온도 증가는 타이어 손상을 가져오는 요인이 될 수 있다. 이 같은 온도 상승을 억제하고자 타이어 측면에 냉각핀을 적용하고, 이에 따른 냉각 효과를 규명하는 것이 본 연구의 목적이다. 이를 위하여 8개의 냉각핀 형상이 검토 되었으며, 냉각핀 형상에 따른 사이드월 표면 온도 저감 효과를 수치해석적 분석을 통해 규명하였다. 또한 핀 후류에서의 와류에 의한 유동특성과 열전달특성을 비교하였다.

• 한국산학기술학회논문지
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• 제5권2호
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• pp.128-131
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• 2004

본 연구에서는 STS-ICP ASEHR을 이용하여 Etch와 Deposition 공정을 반복하여 에칭을 하는 Bosch 식각에 관하여 연구하였다. 기본적인 Etch rate의 변화는 Etching하고자 하는 Wafer에 Deposition된 PR 또는 SiO₂의 두께와 Etching하고자 하는 Wafer의 Depth 및 Pattern size가 영향을 준다. 그러나 이러한 기본적인 변수 외에 STS-ICP ASEHR 장비의 Platen power, Coil power 및 Process pressure에 다양한 변화를 주어 각 변수에 따른 Etch rate을 관찰하였다. 각 공정별 변수를 준 결과 Platen power 12W, Coil power 500W, Etch/Passivation Cycle 6/7sec 일 경우 Etch rate은 1.2㎛/min 이었고, Sidewall prpfile은 90±0.2˚로 나타나 매우 우수한 결과를 보였다. 이는 ICP를 이용한 Bosch Process에 의한 결과임을 확인할 수 있었다.

• 설비공학논문집
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• 제14권11호
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• pp.972-980
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• 2002

This work is aimed at estimating the effects of various factors on the energy consumption of Korean-style apartment houses using TRNSYS. The factors considered here include the nominal size of floor area, type of remodeling, azimuth, sidewall insulation, and window type. Based on some assumptions, an actual apartment house is simplified into a model that is used for thermal load calculations. The simplified model is validated by showing a good agreement with the actual one in the predicted result. Remodeling balconies into unconditioned buffer spaces yields a favorable thermal performance in comparison with the original type regardless of the nominal size. Incorporating balconies into a conditioned indoor space leads to sharp increases in thermal loads, which must be avoided in view of energy conservation as well as structural problem. A quantitative assessment on the azimuthal effect indicates that the heating energy can be saved up to 16％ by taking the south or southeast direction. Reduction in the heating load with enhancing the sidewall insulation is gradual, so that a cost-effectiveness analysis may be needed when amending the regulations concerned. Glazing appears to significantly affect the heat transfer through window. A typical case illustrates that the heating load is decreased about 25％ by simply adopting triple glazing instead of double glazing.