• 한국산학기술학회논문지
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• 제13권8호
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• pp.3319-3325
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• 2012

본 논문은 반도체 포토장비의 이산 이벤트 시뮬레이터인 TrackSim의 개발에 관한 것이다. TrackSim은 포토 장비의 시뮬레이션 엔진과 사용하기 쉬운 사용자 환경을 포함하는 시뮬레이터로, 다양한 프로세스 모듈의 구성 및 운영 방법을 효율적으로 평가, 검증, 스케쥴링할 수 있는 3차원 시뮬레이션 환경을 제공한다. TrackSim은 반도체 산업에서 많이 사용되는 이산 사건 시뮬레이션 소프트웨어인 AutoMod를 기반으로 개발되어 시뮬레이션 신뢰성이 보장되며, AutoMod로 개발된 반도체 제조라인 시뮬레이션 모델 속에 함께 연동하여 사용이 가능하다는 특징이 있다.

• 한국경영과학회:학술대회논문집
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• 대한산업공학회/한국경영과학회 1996년도 춘계공동학술대회논문집; 공군사관학교, 청주; 26-27 Apr. 1996
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• pp.565-565
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• 1996

• 한국시뮬레이션학회논문지
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• 제26권1호
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• pp.69-75
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• 2017

MCP(Multi-chip Package)는 두 개 이상의 Chip을 적층하여 하나의 패키지로 합친 제품이다. MCP를 만들기 위해서는 두 개 이상의 Chip이 동일한 Substrate에 적층되기 때문에 다수의 조립 공정이 필요하다. Package 공정에서는 Lot들이 동일한 특성을 가지는 Chip으로 구성되고 MCP를 구성하는 Chip의 특성은 Layer sequence에 의해 결정된다. MCP 생산 공정에서 WIP Balance 뿐만 아니라 Throughput을 달성하기 위해서는 Chip의 Layer sequence가 중요하다. 본 논문에서는 Chip들의 Layer sequence의 제약 조건을 고려한 스케쥴링 방법론을 제안한다.

• 산업공학
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• 제25권1호
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• pp.127-133
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• 2012

This paper considers the preventive maintenance scheduling problem of the cluster tool which is one of the most important manufacturing equipments in the next-generation semiconductor production environment. We define a random process that expresses the successive amount of chemicals accumulating inside the tool. Based on the renewal theory, we find the expected value and probability distribution of the time that the amount of accumulated chemicals exceeds a predetermined level. For a given probability that the accumulated chemicals exceeds the predetermined level we present a method to obtain the number of chamber operations to perform the preventive maintenance of that chamber. In addition, a method to get the preventive maintenance schedule for the whole cluster tool is presented. A numerical example is provided to illustrate our method.

• 경영과학
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• 제29권1호
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• pp.131-141
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• 2012

The automated material handling systems today are playing ever more important roles in semiconductor/LCD fabrication facilities. Recently they became more flexible, intelligent, and speedy than in the past. The facilities have been fully automated because the size and weight of the unit loads used in the facilities were being increased beyond the limits that a human operator can handle. This research develops an efficient procedure to streamline the delivery of unit loads by the automated material handling system (AMHS). For this task, the research employs the event scheduling theory that has been successfully used in the both academia and industry. The developed procedure was applied to an actual LCD fabrication facility and improved the performance of an existing material handling system.

• 반도체디스플레이기술학회지
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• 제12권4호
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• pp.1-7
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• 2013

This paper presents the AMR (Automatic Meter Reading) system using the binary CDMA (Code Division Multiple Access) radio technology. The binary CDMA is the new radio technology in domestic research. Main implementation topics includes the binary CDMA remote meter reading system, the wireless piconet configuration for the wireless automatic meter reading, and the transmission scheduling for sending and receiving data. Also, the wireless packet data encryption is very important topics for the wireless automatic meter reading. The proposed AMR system is implemented as a pilot project in Jeju and Gangwon. It can be seen that the wireless remote reading using the binary CDMA wireless technology can be applied to the AMR system.

• 대한산업공학회지
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• 제33권2호
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• pp.166-173
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• 2007

In this paper, we propose a model-based approach to estimating production parameters of semiconductor FAB equipment. For FAB scheduling, for example, we need to know equipment's production parameters such as flow time, tact time, setup time, and down time. However, these data are not available, and they have to be estimated from material move data such as loading times and unloading times that are automatically collected in modern automated semiconductor FAB. The proposed estimation method may be regarded as a Bayes estimation method because we use additional information about the production parameters. Namely, it is assumed that the technical ranges of production parameters are known. The proposed estimation method has been applied to a LCD FAB, and found to be valid and useful.

• 반도체디스플레이기술학회지
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• 제22권4호
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• pp.76-80
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• 2023

This study is about a service that allows people to naturally learn to bask in the sun, which is a habit to relieve depression. Modern people do not have enough time to bask in the sun due to their busy lives, and as a result, depression and fatigue are increasing day by day. Therefore, in order to relieve depression, there is a need for the development of technology to manage the schedule of sunlight basking so that users can experience sunlight more naturally. The sunlight service developed through this study can help you easily plan your sunlight schedule by recommending good dates, times, and locations for sunbathing. In addition, users can receive coins as much as they bask in the sun, and they can be motivated by the act of basking in the sun by raising their character with those coins.

• 산업경영시스템학회지
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• 제35권1호
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• pp.79-86
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• 2012

This study focuses on the problem of scheduling wafer lots of several recipe(operation condition) types in the photolithography workstation in a semiconductor wafer fabrication facility, and sequence-dependent recipe set up times may be required at the photolithography machines. In addition, a lot is able to be operated at a machine when the reticle(mask) corresponding to the recipe type is set up in the photolithography machine. We suggest various heuristic algorithms, in which developed recipe selection rules and lot selection rules are used to generate reasonable schedules to minimizing the total weighted flowtime. Results of computational tests on randomly generated test problems show that the suggested algorithms outperform a scheduling method used in a real manufacturing system in terms of the total weighted flowtime of the wafer lots with ready times.

• JSTS:Journal of Semiconductor Technology and Science
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• 제9권1호
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• pp.29-36
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• 2009

Power supply noise is fundamentally caused by large current peaks. Since large current peaks are induced by simultaneous switching of many circuit elements, power supply noise can be minimized by deliberate clock scheduling which utilizes nonzero clock skew. In this paper, nonzero skew clock scheduling is used to avoid the large peak current and consequently reduce power supply noise. While previous approaches require extra characterization efforts to acquire current waveform of a circuit, we approximate it only with existing cell library information to be easily adapted to conventional design flow. A simulated annealing based algorithm is performed, and the peak current values are estimated for feasible clock schedules found by the algorithm. The clock schedule with the minimum peak current is selected for a solution. Experimental results on ISCAS89 benchmark circuits show that the proposed method can effectively reduce the peak current.