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http://dx.doi.org/10.5762/KAIS.2012.13.8.3319

Simulation Software for Semiconductor Photolithography Equipment: TrackSim  

Yoon, Hyun-Joong (Faculty of Mechanical and Automotive Engineering, Catholic University of Daegu)
Kim, Jin-Gon (Faculty of Mechanical and Automotive Engineering, Catholic University of Daegu)
Publication Information
Journal of the Korea Academia-Industrial cooperation Society / v.13, no.8, 2012 , pp. 3319-3325 More about this Journal
Abstract
This paper describes the development of the TrackSim, which is a discrete event simulation tool for photolithography equipment of semiconductor industry. The TrackSim is focused on the accurate simulation model of the photolithography equipment and easy-to-use user interfaces. TrackSim provides 3D simulation environment for evaluating, validating, and scheduling the photolithography process. One of the major characteristics of TrackSim is in that it is developed based on Applied Materials' AutoMod, a discrete event simulation software broadly used in semiconductor industry. Accordingly, the photolithography model of TrackSim can be used to perform simulation connected with other simulation models built with AutoMod.
Keywords
Simulator; Semiconductor Manufacturing; Photolithography Processes; Scheduling;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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1 E. Akcalt, K. Nemoto, and R. Uzsoy, "Cycle-Time Improvements for Photolithography Process in Semiconductor Manufacturing," IEEE Trans. on Semicond. Manufact, Vol. 14, No. 1, pp. 48-56, 2001.   DOI   ScienceOn
2 M. Bich, "Trends in Track System Architecture," Solid State Technology, Vol. 38, No. 5, pp. 83-86, May 1995.   DOI
3 A.E. Braun, "Track Systems Meet Throughput and Productivity Challenges," Semiconductor International, Feb. 1998.
4 J.H. Lee and H.J. Lee, "A Study of Semiconductor Process Simulator with User Friendly Framework," Journal of the Korea Academia-Industrial Cooperation Society, Vol. 5, No. 4, pp. 331-335, 2004   과학기술학회마을
5 J.H. Lee and H.J. Lee, "A Study of Semiconductor Process Simulation Framework," in Proceedings of the KAIS Spring Conference, pp. 165-167, June 2004.
6 H.M. Magoon, P.H.Mitchell, "Throughput Monitoring to Track and Improve Semiconductor Lithography Equipment Performance," in Proc. IEEE/SEMI Advanced Semiconductor Manufacturing Conference, Boston, MA, USA, Sept. 8-10, 1999, pp. 48-53.
7 M. Rohrer, "AutoMod Product Suite Tutorial," in Proc. the 1999 Winter Simulation Conference, Phoenix, AZ, USA, Dec. 5-8, 1999, pp. 220-226.
8 J. Suh, "A Layout Comparison Study for Improving Semiconductor Fab System," Journal of the Korea Academia-Industrial Cooperation Society, Vol. 10, No. 5, pp. 1074-1081, 2009.   과학기술학회마을   DOI
9 H.J. Yoon and D.Y. Lee, Identification of Potential Deadlock Set in Semiconductor Track Systems," in Proc. the 2001 IEEE Int. Conf. on Robotics and Automat., Seoul, Korea, May 21-26, 2001.
10 H.J. Yoon and D.Y. Lee, "Deadlock-Free Scheduling of Photolithography Equipment in Semiconductor Fabrication," IEEE Transactions on Semiconductor Manufacturing, Vol. 17, No. 1, pp. 42-54, 2004..   DOI
11 P.V. Zant, Microchip Fabrication: A Practical Guide to Semiconductor Processing. New York: McGraw-Hill, 1997 (3rd edition).