Korean Management Science Review (경영과학)

The Korean Operations Research and Management Science Society (한국경영과학회)
권호 표지
DOI QR코드

DOI QR Code

Congestion Management with Arrival Estimation of Unit Loads in an Automated Material Handling System

운송시간의 예측을 통한 물류정체 통제 모형

  • Received : 2011.09.26
  • Accepted : 2012.01.25
  • Published : 2012.03.31
Download PDF
⟨ Previous Next ⟩

Abstract

The automated material handling systems today are playing ever more important roles in semiconductor/LCD fabrication facilities. Recently they became more flexible, intelligent, and speedy than in the past. The facilities have been fully automated because the size and weight of the unit loads used in the facilities were being increased beyond the limits that a human operator can handle. This research develops an efficient procedure to streamline the delivery of unit loads by the automated material handling system (AMHS). For this task, the research employs the event scheduling theory that has been successfully used in the both academia and industry. The developed procedure was applied to an actual LCD fabrication facility and improved the performance of an existing material handling system.

Keywords

References

  1. Lee, Y.H., "Supply Chain Model for the Semiconductor Industry of Global Market," Journal of Systems Integration, Vol.10, No.3 (2001), pp.189-206. https://doi.org/10.1023/A:1011297726485
  2. Chung, S.L. and M. Jeng, "Fabulous MESs and C/Cs：An overview of semiconductor fab automation," IEEE Robotics and Automation Magazine, (2004), pp.8-18.
  3. Campbell, P.L. and G. Laitinen, "Overhead Intrabay Automation and Microstocking-a virtual fab case study," Proceedings of IEEE/SEMI Advanced Semiconductor Manufacturing Conference, (1997), pp.368-372.
  4. Weiss, M., "300 Fab Automation Technology options and selection criteria," IEEE/SEMI Advanced Semiconductor Manufacturing Conference, (1997), pp.373-379.
  5. Cardarelli, G., P.M. Pelagagge, and A. Granito, "Performance analysis of automated interbay material-handling and storage systems for large Wafer Fab," Robotics and Computer-Integrated Manufacturing, Vol.12, No.3(1996), pp.227-234. https://doi.org/10.1016/0736-5845(96)00010-5
  6. Jang, Y.J. and G.H. Choi, "Introduction to Automated Material Handling Systems in LCD Panel Production Lines," IEEE International Conference on Automation Science and Engineering, (2006), pp.223-229.
  7. Agrawal, G.K. and S.S. Heragu, "A survey of automated material handling systems in 300-mm Semiconductor Fabs," IEEE Transactions on Semiconductor Manufacturing, Vol.19, No.1(2006), pp.112-120. https://doi.org/10.1109/TSM.2005.863217
  8. Montoya-Torres, J.R., "A literature survey on the design approaches and operational issues of automated wafer-transport systems for wafer fabs," Production Planning and Control, Vol.17, No.7(2006), pp.648-663. https://doi.org/10.1080/09537280600900774
  9. Ting, J.H., J.M.A. Tanchoco, "Unidirectional circular layout for overhead material handling systems," International Journal of Production Research, Vol.38, No.16(2000), pp. 3913-3935. https://doi.org/10.1080/00207540050176085
  10. Ting, J.J. and J.M.A. Tanchoco, "Optimal Bidirectional Spine Layout for Overhead Material Handling Systems," IEEE Transactions on Semiconductor Manufacturing, Vol.14, No.1(2001), pp.57-64. https://doi.org/10.1109/66.909655
  11. Koo, P.H. and J. Jang, "Vehicle Travel Time Models for AGV Systems under Various Dispatching Rules," International Journal of Flexible Manufacturing Systems, Vol.14, No.3 (2002), pp.249-261. https://doi.org/10.1023/A:1015831711304
  12. Nazzal, D. and L.F. Mcginnis, "Analytical approach to estimating AMHS performance in 300mm fabs," International Journal of Production Research, Vol.45, No.3(2007), pp. 571-590. https://doi.org/10.1080/00207540600792333
  13. Mackulak, G.T. and P. Savory, "A simulation-based experiment for comparing AMHS performance in a semiconductor fabrication facility," IEEE Transactions on Semiconductor Manufacturing, Vol.14, No.3(2001), pp. 273-280. https://doi.org/10.1109/66.939828
  14. Sun, D.S., N.S. Park, Y.J. Lee, Y.C. Jang, C.S. Ahn, and T.E. Lee, "Integration of lot dispatching and AMHS control in a 300mm wafer FAB," Advanced Semiconductor Manufacturing Conference and Workshop, IEEE/SEMI, 2005.
  15. Jang, Y.J., G.H. Choi, and S.I. Kim, "Modeling and analysis of stocker system in semiconductor and LCD fab," IEEE International Symposium on Semiconductor Manufacturing, (2005), pp.273-276.
  16. Li, B., J. Wu, W. Carriker, and R. Giddings, "Factory throughput improvements through intelligent integrated delivery in semiconductor fabrication facilities," IEEE Transactions on Semiconductor Manufacturing, Vol.18, No.1(2005), pp.222-231. https://doi.org/10.1109/TSM.2004.840530
  17. Sargent, R.G., "Event Graph Modelling for Simulation with an Application to Flexible Manufacturing Systems," Management Science, Vol.34, No.10(1988), pp.1231-1251. https://doi.org/10.1287/mnsc.34.10.1231
  18. Bondy, J.A. and U.S.R. Murty, "Graph theory with applications," North-holland, NY, 1976.