Journal of Korean Institute of Industrial Engineers (대한산업공학회지)

Korean Institute of Industrial Engineers (대한산업공학회)
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Model-based Estimation of Production Parameters of Electronics FAB Equipment

모델기반의 전자부품 FAB설비 생산기준정보 추정

  • 강동훈 (한국과학기술원 산업공학과) ;
  • 김민규 (한국과학기술원 산업공학과) ;
  • 최병규 (한국과학기술원 산업공학과) ;
  • 박범철 (삼성전자 HDD 센터)
  • Published : 2007.06.30
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Abstract

In this paper, we propose a model-based approach to estimating production parameters of semiconductor FAB equipment. For FAB scheduling, for example, we need to know equipment's production parameters such as flow time, tact time, setup time, and down time. However, these data are not available, and they have to be estimated from material move data such as loading times and unloading times that are automatically collected in modern automated semiconductor FAB. The proposed estimation method may be regarded as a Bayes estimation method because we use additional information about the production parameters. Namely, it is assumed that the technical ranges of production parameters are known. The proposed estimation method has been applied to a LCD FAB, and found to be valid and useful.

Keywords

References

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