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http://dx.doi.org/10.7232/IEIF.2012.25.1.127

A Preventive Maintenance Scheduling Model of the Cluster Tool  

Lee, Hyun (Department of Industrial and Management Engineering, Hanyang University)
Park, You-Jin (School of Business Administration, Chung-Ang University)
Hur, Sun (Department of Industrial and Management Engineering, Hanyang University)
Publication Information
IE interfaces / v.25, no.1, 2012 , pp. 127-133 More about this Journal
Abstract
This paper considers the preventive maintenance scheduling problem of the cluster tool which is one of the most important manufacturing equipments in the next-generation semiconductor production environment. We define a random process that expresses the successive amount of chemicals accumulating inside the tool. Based on the renewal theory, we find the expected value and probability distribution of the time that the amount of accumulated chemicals exceeds a predetermined level. For a given probability that the accumulated chemicals exceeds the predetermined level we present a method to obtain the number of chamber operations to perform the preventive maintenance of that chamber. In addition, a method to get the preventive maintenance schedule for the whole cluster tool is presented. A numerical example is provided to illustrate our method.
Keywords
semiconductor; 450mm wafer production; cluster tool; preventive maintenance; renewal process;
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