• Korean Journal of Materials Research
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• v.17 no.1
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• pp.31-36
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• 2007

Nanoimprint lithography (NIL) is a new lithographic method that offers a sub-10nm feature size, high throughput, and low cost. One of the most serious problems of NIL is the stiction between mold and resist. The antistiction layer coating is very effective to prevent this stiction and ensure the successful NIL results. In this paper, an antistiction layer was deposited by VSAM (vapor self assembly monolayer) method on silicon samples with FOTS (perfluoroctyltrichlorosilane) as a precursor for making an antistiction layer. A specially designed LPCVD (low pressure chemical vapor deposition) was used for this experiment. All experiments were achieved after removing the humidity. First, the evaporation test of FOTS was performed for checking the evaporation temperature at low pressure. FOTS was evaporated at 5 Tow and $110^{\circ}C$. In order to evaluate the temperature effect on antistiction layer, chamber temperature was changed from 50 to $170^{\circ}C$ with 0.1ml of FOTS for 1 minute. Good hydrophobicity of all samples was shown at about $110^{\circ}$ of contact angle and under $20^{\circ}$ of hysteresis. The surface energies of all samples calculated by Lewis acid/base theory was shown to be about 15mN/m. The deposited thicknesses of all samples measured by ellipsometry were almost 1nm that was similar value of the calculated molecular length. The surface roughness of all samples was not changed after deposition but the friction force showed relatively high values and deviations deposited at under $110^{\circ}$. Also the white circles were founded in LFM images under $110^{\circ}$. High friction forces were guessed based on this irregular deposition. The optimized VSAM process for FOTS was achieved at $170^{\circ}C$, 5 Torr for 1 hour. The hot embossing process with 4 inch Si mold was successfully achieved after VSAM deposition.

• Proceedings of the Korean Magnestics Society Conference
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• 2007.05a
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• pp.324.2-324.2
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• 2007

• Polymer(Korea)
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• v.29 no.4
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• pp.392-398
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• 2005

Self-assembled multilayer thin films of poly(ethylene-alt-maleic anhydride) (PEMAh) and poly(4-vinyl pyridine) (P4VP) were fabricated by layer-by-layer (LbL) sequential adsorption. Fourier transform infrared (FT-IR) spectroscopic analysis of the self-assembled PEMAh/P4VP multilayer films confirms that the driving forces for the multilayer buildup are the intermolecular hydrogen bonding and electrostatic interactions. The linear increase of absorption peak of P4VP at 256 nm with increasing number of PEMAh/P4VP bilayers indicates that the multilayer buildup is an uniform assembling process. We also investigate the effects of polyelectrolyte concenhation variation of the dipping solution and pH variation of the PEMAh solution on the multilayer film formation. Thickness. adsorbed polyelectrolyte mass and surface roughness of the multilayer films were measured by UV-visible spectroscopy, quartz crystal microbalance (QCM), and atomic force microscopy (AFM), respectively.

• KIEE International Transactions on Electrophysics and Applications
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• v.5C no.3
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• pp.115-118
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• 2005

Currently, molecular devices are reported utilizing active self-assembled monolayers (SAMs) containing the nitro group as the active component, which has active redox centers [1]. SAMs are ordered molecular structures formed by the adsorption of an active surfactant on a solid surface. The molecules will be spontaneously oriented toward the substrate surface and form an energetically favorable ordered layer. During this process, the surface-active head group of the molecule chemically reacts with and chemisorbs onto the substrate In this paper, the electrical properties of the 4'4- di(ethynylphenyl)-2'-nitro-1-benzenethiolate was confirmed. This material is well known as a conducting molecule having possible application to molecular level negative differential resistance (NDR) device. To deposit the self-assembly monolayers onto the gold electrode, the prefabricated Au(1 l l) substrates were immersed into 0.5[mM/l] self-assembly molecule in THF solution. Then, the electrical properties and surface morphologies of 4' 4-di(ethynylphenyl)-2' -nitro-1-benzenethiolate were measured by using the ultra-high vacuum scanning tunneling microscopy (UHV-STM).

• Journal of the Korean Electrochemical Society
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• v.11 no.4
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• pp.256-261
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• 2008

In this study, Nafion membrane was modified to prevent methanol crossover by layer-by-layer self assembly using polyaniline (PANi) as a polycation and sulfonated poly(ether sulfone) (SPES) as a polyanion onto the Nafion surface. Since PANi and SPES possess thermal and chemical stability and rigid backbone, their layer-by-layer self-assembled films on the Nafion are expected to reduce methanol permeability and to increase mechanical stability. UV-Vis absorption spectroscopy verified a linear build-up of the multilayers of PANi and SPES. We found that the thickness per bilayer was about 10 nm by TEM measurement. Although modified Nafion membrane exhibited 15% decrease of proton conductivity, it reduceded 67% of methanol permeability compared to that of the pristine Nafion membrane, resulting in 2.5 times larger selectivity. At the performance test of the fuel cell using 5M methanol as a fuel, the modified Nafion membrane showed 2.4 times higher maximum power density at $30^{\circ}C$ and 1.4 times larger at $60^{\circ}C$ than the pristine Nafion.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.98-100
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• 2004

We report a novel manner for preparing single layer anti-reflective coatings with excellent optical properties (<1% reflection) over a broad wavelength regime. The technology is based upon the self-assembly and UV curing of reactive nano-particles, leading to nano-structured coatings with a gradient in refractive index. The single processing step leading to such coatings is fast, robust and cost effective. Furthermore in this paper we will address the mechanical durability of such nano-structured coatings.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.230-230
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• 2012

Graphene have showed promising performance as electrodes of organic devices such as organic transistors, light-emitting diodes, and photovoltaic solar cells. In particular, among various organic materials of graphene-based organic devices, pentacene has been regarded as one of the promising organic material because of its high mobility, chemical stability. In the bottom-contact device configuration generally used as graphene based pentacene devices, the morphology of the organic semiconductors at the interface between a channel and electrode is crucial to efficient charge transport from the electrode to the channel. For the high quality morphology, understanding of initial stages of pentacene growth is essential. In this study, we investigate self-assembly of pentacene molecules on graphene formed on a 6H-SiC (0001) substrate by scanning tunneling microscopy. At sub-monolayer coverage, adsorption of pentacene molecules on epitaxial graphene is affected by $6{\times}6$ pattern originates from the underlying buffer layer. And the orientation of pentacene in the ordered structure is aligned with the zigzag direction of the edge structure of single layer graphene. As coverage increased, intermolecular interactions become stronger than molecule-substrate interaction. As a result, herringbone structures the consequence of higher intermolecular interaction are observed.

• Membrane Journal
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• v.25 no.4
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• pp.332-342
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• 2015

In this study, to solve the major problem of reverse osmosis (RO) membrane, surface of reverse osmosis membrane was modified by silane-epoxy multi layer. Octyltrimethoxysilane (OcTES) was polymerized to membrane surface via cross-linking by Sol-gel method. n = 8 alkylgroup of OcTES formed the branch structure by self assembly. And for improve fouling resistance of RO membrane, Ether group of ethylene glycol diglycidyl ether (EGDE) was given to improve hydrophilicity of RO membrane surface by ring-opening. To analyze structure of RO membrane surface with FE-TEM and AFM. Membrane surface of the ridge and valley structure and the bridge structure was confirmed due to the multi-layer surface modification of OcTES and EGDE. And through the increase of the roughness, the branch structure was formed well on membrane surface. Through the XPS analysis was identified chemical structure of membrane surface. And confirmed that the hydrophilic surface modification is given to the surface of the film through a Contact angle analysis. In optimization of EGDE surface modification condition, was suitable 0.5 wt% EGDE concentraion and $70^{\circ}C$ ring-opening temperature. In result of fouling resistance test and MFI is SUL-H10, $PA-OcTES_{1.0}$, $PA-OcTES_{1.0}-EGDE_{0.5}$ 68.7, 60.4, 5.4 ($10E-8hr/mL^2$), multi-layer surface modified membrane improved fouling resistance.

• Korean Journal of Materials Research
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• v.25 no.12
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• pp.647-654
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• 2015

Self-assembled monolayers(SAM) of microspheres such as silica and polystyrene(PS) beads have found widespread application in photonic crystals, sensors, and lithographic masks or templates. From a practical viewpoint, setting up a high-throughput process to form a SAM over large areas in a controllable manner is a key challenging issue. Various methods have been suggested including drop casting, spin coating, Langmuir Blodgett, and convective self-assembly(CSA) techniques. Among these, the CSA method has recently attracted attention due to its potential scalability to an automated high-throughput process. By controlling various parameters, this process can be precisely tuned to achieve well-ordered arrays of microspheres. In this study, using a restricted meniscus CSA method, we systematically investigate the effect of the processing parameters on the formation of large area self-assembled monolayers of PS beads. A way to provide hydrophilicity, a prerequisite for a CSA, to the surface of a hydrophobic photoresist layer, is presented in order to apply the SAM of the PS beads as a mask for photonic nanojet lithography.

• Advances in nano research
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• v.2 no.1
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• pp.57-67
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• 2014

This article shows the coarsening behavior of nanoparticle multilayers during heat treatments which produce larger metallic nanostructures with varying shapes and sizes on glass slides. Nanoparticle multilayer films are initially constructed via the layer-by-layer self-assembly of small and monodispersed gold and/or palladium nanoparticles with different compositions (gold only, palladium only, or both gold and palladium) and assembly orders (compounding layers of gold layers over palladium layers or vice versa). Upon heating the slides at $600^{\circ}C$, the surface nanoparticles undergo coalescence becoming larger nanostructured metallic films. UV-Vis results show a clear reliance of the layering sequence on the optical properties of these metal films, which demonstrates an importance of the outmost (top) layers in each nanoparticle multilayer films. Topographic surface features show that the heat treatments of nanoparticle multilayer films result in the nucleation of nanoparticles and the formation of metallic cluster structures. The results confirm that different composition and layering sequence of nanoparticle multilayer films clearly affect the coalescence behavior of nanoparticles during heat treatments.