• Title/Summary/Keyword: school bonding

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A design of silicon based vertical interconnect for 3D MEMS devices under the consideration of thermal stress (3D MEMS 소자에 적합한 열적 응력을 고려한 수직 접속 구조의 설계)

  • Jeong, Jin-Woo;Kim, Hyeon-Cheol;Chun, Kuk-Jin
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.45 no.2
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    • pp.112-117
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    • 2008
  • Vertical interconnection scheme using novel silicon-through-via for 3D MEMS devices or stacked package is proposed and fabricated to demonstrate its feasibility. The suggested silicon-through-via replaces electroplated copper, which is used as an interconnecting material in conventional through-via, with doped silicon. Adoption of doped silicon instead of metal eliminates thermal-mismatch-induced stress, which can make troubles in high temperature MEMS processes, such as wafer bonding and LP-CVD(low pressure chemical vapor deposition). Two silicon layers of $30{\mu}m$ thickness are stacked on the substrate. The through-via arrays with spacing $40{\mu}m$ and $50{\mu}m$ are fabricated successfully. Electrical characteristics of the through-via are measured and analyzed. The measured resistance of the silicon-through-via is $169.9\Omega$.

Properties of Diamond-like Carbon(DLC) Thin Films deposited by Negative Ion Beam Sputter (I) (Negative ion beam sputter 법으로 증착한 DLC 박막의 특성 (I))

  • Kim, Dae-Yeon;Gang, Gye-Won;Choe, Byeong-Ho
    • Korean Journal of Materials Research
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    • v.10 no.7
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    • pp.459-463
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    • 2000
  • Direct use of negative ions for modification of materials has opened new research such as charging-free ion implantation and new materials syntheses by pure kinetic bonding reactions. For these purposes, a new solid-state ce-sium ion source has been developed in the laboratory scale. In this paper, diamond like carbon(DLC) films were prepared on silicon wafer by a negative cesium ion gun. This system does not need any gas in the chamber; deposition occurs under high vacuum. The ion source has good control of the C- beam energy(from 80 to 150eV). The result of Raman spectrophotometer shows that the degree of diamond-like character in the films, $sp^3$ fraction, increased as ion beam energy increases. The nanoindentation hardness of the films also increases from 7 to 14 GPa as a function of beam energy. DLC films showed ultra-smooth surface(Ra~1$\AA$)and an impurity-free quality.

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Understanding and trends of esthetic treatment in prosthodontics : IPS e.max (심미보철 치료의 경향과 이해 : part 1. IPS e.max)

  • Kang, Jung-In;Heo, Yu-Ri;Lee, Myeong-Seon;Son, Mee-Kyoung
    • Journal of Korean society of Dental Hygiene
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    • v.14 no.4
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    • pp.447-452
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    • 2014
  • With the increase of esthetic demands, most patients want to have restorations which are not only functional but also esthetic. For the esthetic restoration, many ceramic systems have been introduced and applied in dentistry. Among those ceramic restorations, IPS e.max system composed of lithium disilicate glass ceramic is one of the most commonly used systems because it has strength and esthetic characteristics. IPS e.max system is divided into IPS e.max Press and IPS e.max CAD according to the manufacturing methods. IPS e.max Press is fabricated through heat-pressed technique with ceramic ingot, which is very simple. The restorations which are made using IPS e.max system can apply to 3 units restoration for the anterior teeth and premolar, and single posterior tooth restoration. Cementation is one of the most important clinic procedure for the longevity of the restorations. All ceramics are bonded by resin cements, it is classified into three groups including adhesive, self-adhesive, and conventional. Variolink N, which is an adhesive resin cement and manufactured by same company with IPS e.max, is recommended for the bonding of IPS e.max restoration. Conventional and self-adhesive resin cement is also available. The aim of this review article is to provide the understanding of material properties, production procedure and clinical application of IPS e.max system.

Characteristics of polycrystalline 3C-SiC thin films grown on AlN buffer layer for M/NEMS applications (AlN 버퍼층위에 성장된 M/NEMS용 다결정 3C-SiC 박막의 특성)

  • Chung, Gwiy-Sang;Kim, Kang-San;Lee, Jong-Hwa
    • Journal of Sensor Science and Technology
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    • v.16 no.6
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    • pp.457-461
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    • 2007
  • This paper describes the characteristics of poly (polycrystalline) 3C-SiC grown on $SiO_{2}$ and AlN substrates, respectively. The crystallinity and the bonding structure of poly 3C-SiC grown on each substrate were investigated according to various growth temperatures. The crystalline quality of poly 3C-SiC was improved from resulting in decrease of FWHM (full width half maximum) of XRD and FT-IR by increasing the growth temperature. The minimum growth temperature of poly 3C-SiC was $1100^{\circ}C$. The surface chemical composition and the electron mobility of poly 3C-SiC grown on each substrate were investigated by XPS and Hall Effect, respectively. The chemical compositions of surface of poly 3C-SiC films grown on $SiO_{2}$ and AlN were not different. However, their electron mobilities were $7.65{\;}cm^{2}/V.s$ and $14.8{\;}cm^{2}/V.s$, respectively. Therefore, since the electron mobility of poly 3C-SiC films grown on AlN buffer layer was two times higher than that of 3C-SiC/$SiO_{2}$, a AlN film is a suitable material, as buffer layer, for the growth of poly 3C-SiC thin films with excellent properties for M/NEMS applications.

Facile synthesis and characteristics of monodispersed ZnGa2O4 microsphere via solvothermal method (용매열합성법을 통한 단분산된 ZnGa2O4 구형 입자의 제조 및 특성)

  • Woo, Moo Hyun;Kang, Bong Kyun;Yoon, Dae Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.26 no.3
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    • pp.109-114
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    • 2016
  • Monodispersed $ZnGa_2O_4$ microspheres were synthesized by a facile two-step process consisting of a solvothermal method and calcination process. The prepared monodispersed $ZnGa_2O_4$ microspheres were aggregated into 3D microstructures by self-assembly with a large number of small $ZnGa_2O_4$ particles generated in nucleation. This nucleation and self-assembly making hierarchical microstructures were depended on the concentration of PEG (polyethylene glycol) due to CAC (critical aggregation concentration) theory. And also we controlled the amount of zinc acetate to make pure $ZnGa_2O_4$ phase. Additionally, to fix the optimized calcination condition, sample was characterized by TG-DTA to prove the thermal property in the calcination process and by FT-IR to identify the changes of functional group bonding between each element of the $ZnGa_2O_4$ precursor and oxide calcined at $900^{\circ}C$ for 1 h.

EFFECT OF LASER IRRADIATION ON DENTIN SURFACE STRUCTURE AND SHEAR BOND STRENGTH OF LIGHT-CURED GLASS IONOMER. (상아질 표면 구조와 광중합형 글라스 아이오노머의 전단강도에 대한 레이저 조사의 효과)

  • Park, Mi-Ryoung;Kim, Jong-Soo;Kim, Yong-Kee
    • Journal of the korean academy of Pediatric Dentistry
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    • v.25 no.1
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    • pp.76-92
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    • 1998
  • The purpose of this study was to evaluate the possible efficacy of Nd-YAG laser as a dentin conditioner by observing the laser irradiation dentin surface under scanning electron micrograph and measuring shear bond strength of restored light-cured glass ionomer mold. Fifty intact premolars were prepared for shear bond strength tests. The teeth were randomly divided into five groups as follows; Group I. no treatment Group II. 10% poly acrylic acid, 20 sec Group III. laser treatment 2 w, 20 Hz, 2 sec Group IV. laser treatment 2 w, 20 Hz, 5 sec Group V. laser treatment 2 w, 20 Hz, 10 sec Samples of each group were restored with light-cured glass ionomer cement after dentin conditioning and then measuring the shear bond strength of each specimen were measured using universal testing machine. Additional ten premolars were prepared for SEM analysis The result from the this study can be summarized as follows. 1. Shear bond strength of polyacrylic acid-treated group (II) was significantly higher than other groups (p<0.05). 2. No statistically significant difference could be found between three laser-treated groups (III, IV, V) in shear bond strength(p>0.05) 3. According to the result of observation under SEM, Polyacrylic acid was shown to have removed the smear layer effectively and opened the dentinal tubules, whereas the laser has produced the irregular surface mainly composed of melted and fused structure. The microcracks found in laser-treated groups increased in number with irradiation time and formed the regular mesh-type in 10 sec-irradiation group. 4. The ultrastructural change of dentin surface created by laser irradiation was found to the improper for bonding of the glass ionomer restorative materials. And the lower shear bond strength of laser irradiated group might have been due to the failure to form the suit able dentin surface for the glass ionomer to penetrated into and form the proper micromechanical retention.

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A Study on the Tensile Strength between Light-cured Relining Resin and Metal Denture Base (광중합형 이장재와 금속의치상 간의 결합력에 관한 연구)

  • Park, In-Chae;Lee, Joon-Kyu;Chung, Chae-Heon
    • Journal of Dental Rehabilitation and Applied Science
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    • v.16 no.3
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    • pp.211-220
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    • 2000
  • The use of autopolymerizing-cured resin and light-cured resin for direct relining of complete and partial dentures has been popular. This investigation compared the adhesion of autopolymerizing-cured reline resin(Tokuso Rebase, Mild Rebaron) or light-cured reline resin(Mild Rebaron LC, Lighton-U) to metal base or resin base. Cylindrical samples were made from metal($Biosil^{(R)}$) or heat-cured resin(QC-20) and were prepared to produce a flat bonding surface. Cylindrical metal samples were roughened by scratch or by scratch and sandblast and were treated with primer(MR Bond) after scratch and sandblast. And then, liners were prossesed to the cylindrical metal or resin samples according to the manufacturer's recommendations so as to bond metal base or resin base. The specimens were tested in pure tension by using an Instron Univesal testing machine for the four direct reline resins. The results were as follows ; 1. In comparison with tensile bond strength of material relined on resin base or metal base, the case of resin base produced significantly higher tensile bond strength than the case of metal base. 2. Metal surface pretreatment or primer improved the tensile bond strength between the reline resin and the metal($Biosil^{(R)}$) base. 3. The tensile bond strength of Mild Rebaron LC relined on resin base or metal base were similar to those of the other reline resins.

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A Study on the Tensile Strength between Light-cured Relining Resin and Metal Denture Base (광중합형 이장재와 금속의치상 간의 결합력에 관한 연구)

  • Park, In-Chae;Lee, Joon-Kyu;Chung, Chae-Heon
    • Journal of Dental Rehabilitation and Applied Science
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    • v.16 no.2
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    • pp.161-170
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    • 2000
  • The use of autopolymerizing-cured resin and light-cured resin for direct relining of complete and partial dentures has been popular. This investigation compared the adhesion of autopolymerizing-cured reline resin(Tokuso Rebase, Mild Rebaron) or light-cured reline resin(Mild Rebaron LC, Lighton-U) to metal base or resin base. Cylindrical samples were made from metal($Biosil^{(R)}$) or heat-cured resin(QC-20) and were prepared to produce a flat bonding surface. Cylindrical metal samples were roughened by scratch or by scratch and sandblast and were treated with primer(MR Bond) after scratch and sandblast. And then, liners were prossesed to the cylindrical metal or resin samples according to the manufacturer's recomendations so as to bond metal base or resin base. The specimens were tested in pure tension by using an Instron Univasal testing machine for the four direct reline resins. The results were as follows ; 1. In comparison with tensile bond strength of material relined on resin base or metal base, the case of resin base produced significantly higher tensile bond strengths than the case of metal base. 2. Metal surface pretreatment or primer improved the tensile bond strength between the reline resin and the metal($Biosil^{(R)}$) base. 3. The tensile bond strengths of Mild Rebaron LC relined on resin base or metal base were similar to those of the other reline resins.

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Interfacial Adhesion between Screen-Printed Ag and Epoxy Resin-Coated Polyimide (에폭시수지가 도포된 폴리이미드와 스크린 프린팅 Ag 사이의 계면접착력 평가)

  • Park, Sung-Cheol;Kim, Jae-Won;Kim, Ki-Hyun;Park, Se-Ho;Lee, Young-Min;Park, Young-Bae
    • Journal of the Microelectronics and Packaging Society
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    • v.17 no.1
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    • pp.41-46
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    • 2010
  • The interfacial adhesion strengths between screen-printed Ag film and epoxy resin-coated polyimide were evaluated by $180^{\circ}$ peel test method. Measured peel strength value was initially around $164.0{\pm}24.4J/m^2$, while the heat treatment during 24h at $120^{\circ}C$ increase peel strength up to $220.8{\pm}19.2J/m^2$. $85^{\circ}C/85%$ RH temperature/humidity treatment decrease peel strength to $84.1{\pm}50.8J/m^2$, which seems to be attributed to hydrolysis bonding reaction mechanism between metal and adhesive epoxy resin coating layer.

The effect of continuous application of MDP-containing primer and luting resin cement on bond strength to tribochemical silica-coated Y-TZP

  • Lim, Myung-Jin;Yu, Mi-Kyung;Lee, Kwang-Won
    • Restorative Dentistry and Endodontics
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    • v.43 no.2
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    • pp.19.1-19.10
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    • 2018
  • Objectives: This study investigated the effect of continuous application of 10-methacryloyloxydecyldihydrogen phosphate (MDP)-containing primer and luting resin cement on bond strength to tribochemical silica-coated yttria-stabilized tetragonal zirconia polycrystal (Y-TZP). Materials and Methods: Forty bovine teeth and Y-TZP specimens were prepared. The dentin specimens were embedded in molds, with one side of the dentin exposed for cementation with the zirconia specimen. The Y-TZP specimen was prepared in the form of a cylinder with a diameter of 3 mm and a height of 10 mm. The bonding surface of the Y-TZP specimen was sandblasted with silica-coated aluminium oxide particles. The forty tribochemical silica-coated Y-TZP specimens were cemented to the bovine dentin (4 groups; n = 10) with either an MDP-free primer or an MDP-containing primer and either an MDP-free resin cement or an MDP-containing resin cement. After a shear bond strength (SBS) test, the data were analyzed using 1-way analysis of variance and the Tukey test (${\alpha}=0.05$). Results: The group with MDP-free primer and resin cement showed significantly lower SBS values than the MDP-containing groups (p < 0.05). Among the MDP-containing groups, the group with MDP-containing primer and resin cement showed significantly higher SBS values than the other groups (p < 0.05). Conclusions: The combination of MDP-containing primer and luting cement following tribochemical silica coating to Y-TZP was the best choice among the alternatives tested in this study.