• 센서학회지
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• 제31권6호
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• pp.366-370
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• 2022

A 12 ㎛ pixel-sized 360 × 240 microbolometer focal plane array (MBFPA) was fabricated using a complementary metaloxide-semiconductor (CMOS)-compatible process. To release the MBFPA membrane, an amorphous carbon layer (ACL) processed at a low temperature (<400 ℃) was deposited as a sacrificial layer. The thermal time constant of the MBFPA was improved by using serpentine legs and controlling the thickness of the SiNx layers at 110, 130, and 150 nm on the membrane, with response times of 6.13, 6.28, and 7.48 msec, respectively. Boron-doped amorphous Si (a-Si), which exhibits a high-temperature coefficient of resistance (TCR) and CMOS compatibility, was deposited on top of the membrane as an IR absorption layer to provide heat energy transformation. The structural stability of the thin SiNx membrane and serpentine legs was observed using field-emission scanning electron microscopy (FE-SEM). The fabrication yield was evaluated by measuring the resistance of a representative pixel in the array, which was in the range of 0.8-1.2 Mohm (as designed). The yields for SiNx thicknesses of SiNx at 110, 130, and 150 nm were 75, 86, and 86%, respectively.

• 한국진공학회지
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• 제18권2호
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• pp.108-115
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• 2009

150 주기의 InAs/GaSb (8/8-ML) 제2형 응력초격자 (SLS)를 활성층에 탑재한 초격자 적외선검출소자 (SLIP) 구조를 MBE 방법으로 성장하고, 직경 $200{\mu}m$의 개구면을 가지는 SLIP 개별소자를 시험 제작하였다 고분해능 투과전자현미경 (TEM) 이미지의 휘도분포와 X선회절 (XRD) 곡선의 위성피크의 분석 결과는 SLS 활성층은 균일한 층두께와 주기적 응력변형을 유지하는 급격한 계면의 초격자임을 입증하였다. 흑체복사 적외선 광원을 이용하여 측정한 입사파장 및 인가전압에 따른 반응도 (R)와 검출률 ($D^*$)로부터, 차단파장은 ${\sim}5{\mu}m$이고 최대 R과 $D^*$ ($\lambda=3.25{\mu}m$)는 각각 ${\sim}10^3mA/W$ (-0.6 V/13 K)와 ${\sim}10^9cm.Hz^{1/2}/W$ (0 V/13 K)임을 보였다. 반응도의 온도의존성으로부터 분석한 활성화에너지 275 meV는 광반응 과정에 개입되어 있는 가전대 및 전도대 부준위 사이의 에너지 간격 (HH1-C)과 잘 일치하였다.

• 한국진공학회지
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• 제22권6호
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• pp.327-334
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• 2013

InAs/GaSb 제2형 응력 초격자(strained layer type II superlattice, T2SL)을 이용한 nBn 구조 장적외선 검출소자의 설계 및 제작을 하였다. InAs와 GaSb 두께에 따른 T2SL 구조의 장적외선 밴드갭 에너지를 Kronig-Penney 모델을 이용하여 계산하였다. 소자의 암전류 밀도를 줄이기 위해서, nBn 구조에서 장벽층인 $Al_{0.2}Ga_{0.8}Sb$ 성장 중에 Te 보상도핑(compansated doping)을 하였다. 온도(T) 80 K 및 인가전압($V_b$) -1.5 V에서, 반응스펙트럼 측정을 통한 소자의 차단파장은 ${\sim}10.2{\mu}m$ (~0.122 eV)로 나타났다. 또한 온도 변화에 따른 암전류 측정으로부터 도출된 활성화 에너지는 0.128 eV로 계산 되었다. T=80 K 및 $V_b$=-1.5 V에서 암전류는 $1.0{\times}10^{-2}A/cm^2$으로 측정되었다. 흑체복사 적외선 광원을 이용한 반응도(Responsivity)는 소자 온도 80 K 및 인가전압 -1.5 V의 조건에서 0.58 A/W로 측정되었다.

• Child Health Nursing Research
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• 제6권2호
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• pp.132-143
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• 2000

The purpose of this correlational study was to find the correlation between the infant temperament, mother-infant interaction, and child-rearing environment. The subjects of this study were 37 dyads of healthy mothers and healthy infants. Data were collected from 15th of March to 3rd of September, 1999. Convenient sampling was done at Obstetric wards of one University hospital, and demographic data were collected before discharge. At one month and three month postpartum, we visited subject's home, and collected the data on the infant temperament, and also video taped the mother-infant interaction during feeding. In addition, child-rearing environment was checked by researcher according to HOME(Home Observation for Measurement of the Environment) at three months postpartum. Mother-infant interactions were rated according to the NCAST Feeding Scale later. Data were analyzed by window SPSS program, and correlations between the infant temperament, mother-infant interaction, and child-rearing environment were analyzed by Pearson's correlational coefficient. The results were as follows: 1. Infant temperament. 1) Among the subscales of infant temperament, mothers perceived cuddliness and amenability most positively at one month, and responsivity and amenability most positively at three months. 2) In subscale analysis of stability, amenability, responsivity, and persistence were stable with the time. 3) Significant relationships were found between the malleability and amenability, between the malleability and responsivity at one month, and also between the malleability and amenability, and between the malleability and cuddliness at three months. 2. Correlations of infant temperament and mother-infant interaction. 1) There was no significant relationship between the infant temperament and mother-infant interaction at one month. 2) There was a significant relationship between the infant temperament and mother-infant interaction at three months(r=.335, p<.05). In subscale analysis, there were significnt relationships between the total score of infant temperament and maternal sensitivity to infant's cues(r=.372, p<.05), and between the total score of infant temperament and maternal response to infant's distress (r=.331, p<.05). 3. Correlations of infant temperament and child-rearing environment. 1) There was no significant relationship between the total score of infant temperament at one month and total score of HOME at three months. In subscal analysis, the total score of infant temperament at one showed significant relationships with the organization of environment(r=.413, p<.05), and the emotional, verbal response at three months(r=.337, p<.05). 2) There was a significant relationship between the total score of infant temperament at three months and the total score of HOME at three months (r=.599, p<.01). In subscal analysis, the total score of infant temperament at three months showed significant relationships with the organization of environment(r=.410, p<.05), maternal involvement(r=.482, p,.01), and the emotional, verbal response(r=.695, p<.01) at three months. 4. Correlations of mother-infant interaction and child-rearing environment. There was a significant relationship between the maternal score of mother-infant interaction at one month and three months and the total score of HOME at three months (r=.474, p<.01; r=.452, p<.01). In conclusion, it was proved that infant temperament had significant relationships with mother-infant interaction and child-rearing environment, especially when the infants were getting older. This showed the possibility for changeability of infant teperament by the maternal factors.

• 한국광학회:학술대회논문집
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• 한국광학회 1991년도 제6회 파동 및 레이저 학술발표회 Prodeedings of 6th Conference on Waves and Lasers
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• pp.135-138
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• 1991

A planar type PIN photodiode has been fabricated and discussed. We used OMVPE systems to grow the structure of u-InP/u-InP/n-InP. P-n junction was formed by Zn-diffusion method at 50$0^{\circ}C$, for 5 minitues. The device characteristics at 5V were as follows: Dark currents were distributed around 1nA. Capacitance was 1.6pF and responsivity was above 0.85 mA/mW for 1.3${\mu}{\textrm}{m}$ wavelength. Measured cut-off frequency(-3dB) at -5V was 1.1㎓.

• 한국광학회:학술대회논문집
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• 한국광학회 2001년도 제12회 정기총회 및 01년도 동계학술발표회
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• pp.160-161
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• 2001

APD(avalanche photo diode)는 수광된 빛에 의해 생성된 캐리어를 강한 역바이어스 전압(40 ～ 400V)으로 가속시켜 avalanche 증배를 일으켜 큰 current를 얻을 수 있도록 제작된 소자이다. APD는 P-N 포토 다이오드에 비하여 수십～수백배의 높은 반응도(responsivity)를 얻을 수 있으며 응답 시간이 매우 짧다는 장점이 있는 반면 불규칙한 전류에 의해 만들어지는 내부 잡음 레벨이 높으며 온도에 민감하다는 단점을 갖고 있다. (중략)

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.2300-2302
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• 2005

Metal-Semiconductor-Metal type photodetector was fabricated with AlGaAs/InGaAs Quantum Well FET structures using simplified processing steps. The DC and RF responses were measured by 850nm wavelength injection laser. A DC responsivity in the quasisaturated regime was 0.45 A/W in CW measurements, and a bandwidth measured using a 850nm 40 ps pulsed laser was 16GHz. An electrical equivalent circuit model was extracted from measured S-parameter.

• 한국광학회:학술대회논문집
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• 한국광학회 1989년도 제4회 파동 및 레이저 학술발표회 4th Conference on Waves and lasers 논문집 - 한국광학회
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• pp.196-200
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• 1989

The physical properties related to the GaInAs/InP crystal grown by LPE are discussed in terms of both the design and operation characteristics of the GaInAs/InP Pin photodiode has cutoff frequency of 358 MHz and responsivity, 0.53 A/W (λ=1.3${\mu}{\textrm}{m}$), with dark current density as low as 4$\times$10-4/$\textrm{cm}^2$ under reverse bias voltage of 5V.

• 한국광학회:학술대회논문집
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• 한국광학회 1989년도 제4회 파동 및 레이저 학술발표회 4th Conference on Waves and lasers 논문집 - 한국광학회
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• pp.230-234
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• 1989

Pyroelectric TGS(triglycine sulfate) detectors, whose thicknesses are 0.1mm and 0.2 mm, are fabricated using the grown TGS crystals from aqueous solution. The outut power and noise from these detectors are measured as a function of chopping frequency in the range from 10Hz to 160Hz with the interval of 10Hz. Response time, responsivity and detectivity are derived from the measured output power and noise of the detectors. The results show that the response time is about 15ms, resposivity is 100V/W at 10Hz and the detectivity at the maximum spectral wavelength D{{{{ lambda }}P* is about 10 cmHz1/2w-1.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1991년도 하계학술대회 논문집
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• pp.194-197
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• 1991

In this study, $(Pb_{0.99}La_{0.01})[(Sb_{1/2}Sn_{1/2})_{0.10}Ti_{0.25}Zr_{0.65}]O_3$, added $MnO_2$ (0-0.30[mol%]) ceramics were fabricated by the mixed oxide method. The sintering temperature and time were $1250[^{\circ}C]$, 2[hr], respectively. In the $(Pb_{0.99}La_{0.01})[(Sb_{1/2}Sn_{1/2})_{0.10}Ti_{0.25}Zr_{0.65}]O_3$ added $MnO_2$ (0.24[mol%]) specimens, relative dielectric constant and dielectric loss were minimum values 3.52, 0.003, respectively, and Curie temperature were highest values $256[^{\circ}C]$. Pyroelectric coefficient and voltage responsivity of the $(Pb_{0.99}La_{0.01})[(Sb_{1/2}Sn_{1/2})_{0.10}Ti_{0.25}Zr_{0.65}]O_3$, and added $MnO_2$ (0.24[mol%]) specimen were good values, $6.73{\times}10^{-8}[C/cm^2K],\;125[v/W]$, respectively. Figure of merit of pyroelectric current, voltage and detectivity of the specimen, $(Pb_{0.99}La_{0.01})[(Sb_{1/2}Sn_{1/2})_{0.10}Ti_{0.25}Zr_{0.65}]O_3$ added $MnO_2$ (0.24[mol%]) were good values $2.714{\times}10^{-8}[Ccm/J],\;7.706{\times}10^{-11}[Ccm/J],\;2.640{\times}10^{-8}[Ccm/J]$, respectively. Voltage responsivity of the $(Pb_{0.99}La_{0.01})[(Sb_{1/2}Sn_{1/2})_{0.10}Ti_{0.25}Zr_{0.65}]O_3$ added $MnO_2$ (0.24[mol%]) specimens were decreased with increasing the chopper frequency.