Improved Responsivity of an a-Si-based Micro-bolometer Focal Plane Array with a SiNx Membrane Layer |
Joontaek, Jung
(National Nano Fab Center)
Minsik, Kim (Hanwha Intelligence) Chae-Hwan, Kim (National Nano Fab Center) Tae Hyun, Kim (National Nano Fab Center) Sang Hyun, Park (National Nano Fab Center) Kwanghee, Kim (National Nano Fab Center) Hui Jae, Cho (National Nano Fab Center) Youngju, Kim (National Nano Fab Center) Hee Yeoun, Kim (National Nano Fab Center) Jae Sub, Oh (National Nano Fab Center) |
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