• Korean Journal of Optics and Photonics
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• v.8 no.4
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• pp.267-276
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• 1997

We set up a four-wave holographic interferometer using a symmetric dual-beam illumination which is to measure in-plane and out-of-plane displacement simultaneously. In order to acquire the displacement phase map we applied the phase-shifting method and removed the noise of the phase map with least-squares fitting. In this approach the access to information relative to both the difference and sum of phases existing in the two arms of four-wave holographic interferometer was allowed. As a result, in-plane and out-of-plane displacement was measured to the accuracy of λ/40 and λ/100, respectively at λ=632.8nm

• Korean Journal of Optics and Photonics
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• v.13 no.6
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• pp.521-529
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• 2002

We have recently proposed the new concept of a phase-measuring volumetric interferometer that enables us to accurately measure the xyz-coordinates of the probe without metrology frames. The interferometer is composed of a movable target and a fixed photo-detector array. The target is made of point diffraction sources to emit two spherical wavefronts, whose interference is monitored by an array of photo-detectors. Phase shifting is applied to obtain the precise phase values of the photo-detectors. Then the measured phases are fitted to a geometric model of multilateration so as to determine the xyz-location of the target by minimizing least square errors. The proposed interferometer has been designed and built with a volumetric uncertainty of less than 1.0 $\mu\textrm{m}$ within a cubic working volume of side 120 mm. Here, in this paper, we also present error sources, an evaluated uncertainty, and test results from the prototype system. The self-calibration of two-dimensional precision metrology stages is applied to test the performance of the interferometer.

• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.935-938
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• 2008

Three-dimensional (3D) display systems based on wavefront reconstruction are presented. To obtain the wavefront of 3D objects, we present holographic recording using temporally or spatially phase-shifting interferometer. In the 3D display systems, phase-only reconstruction using a spatial light modulator and an approach to increase the reconstructed power are presented.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.6
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• pp.116-123
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• 1998

An interferometric microscope with an improved lateral resolution is presented. The nanometer resolution XY stage is integrated into standard temporal phase shifting interferometer. The nanometer resolution XY stage is used to position specimen in subpixel of CCD detector, therefore CCD detector's sampling is improved. Two scanning algorithms and those simulation results are also presented. The simulation results show that scanning algorithms improve CCD detector's sampling significantly, and interferometeric microscope's lateral resolution is improved also.

• Korean Journal of Optics and Photonics
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• v.14 no.2
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• pp.200-207
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• 2003

In this paper we present a new method of measuring the relative distance of two point objects in three-dimensional space by using phase-shifting digital holography. In our system the reference beam of a spherical wave is used instead of a plane wave. The system is computer simulated and built on an optical table for experiments. It is shown from computer simulations and experiments that the relative distance can be measured without the exact information on the reference beam used in the hologram record. It is shown from experiments that the relative distance between two point objects separated by 0.5 cm in the distance of about 300 cm from the CCD can be measured with an error less than 10％.

• Korean Journal of Optics and Photonics
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• v.5 no.2
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• pp.191-197
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• 1994

We investigated the properties of various methods of 3 dimensional profilometry to choose the phase shifting technique for the reconstruction of the shape of a given specimen. The pattern was generated by a Twyman-Green interferometer and a PZT was used to shift the fringes on the target surface. The shape was calculated with Hariharan algorithm within the uncertainty of a scaling factor. The optical noise inherent in the laser source was observed to influence the final outcome to a great extent and the need for an exact calibration was noted. noted.

• Korean Journal of Optics and Photonics
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• v.15 no.3
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• pp.248-253
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• 2004

We propose a near- field scanning optical interferometer (NSOI) based on the facet reflection of a nano-sized moveable tapered optical fiber. The interferometer can measure the position and the wave-front of a focused spot simultaneously. The interfering fringes are generated by the reflected beams from the sample surface and from the fiber facet. The wave-front analysis at the focusing position is obtained by using a phase shifting technique with a four-step algorithm. It is found that the resolution for controlling the focal position of our proposed NSOI is less than λ/3 and the measured wave-front aberration at the focal position is in good agreement with the ones obtained by a Twyman-Green interferometer.

• International Journal of Precision Engineering and Manufacturing
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• v.2 no.4
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• pp.81-88
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• 2001

We present a new digital phase measuring method for heterodyne optical interferometry, which providers high measuring speed up to 6 m/s with a fine displacement resolution of 0.1 nanometer. The key idea is combining two distinctive digital phase measuring techniques with mutually complementary characteristics to earth other one is counting the Doppler shift frequency counting with 20 MHz beat frequency for high-velocity measurement and the other is the synchronous phase demodulation with 2.0 kHz beat frequency for extremely fine displacement resolution. The two techniques are operated in switching mode in accordance wish the object speed in a synchronized way. Experimental results prove that the proposed dual mode phase measuring scheme is realized with a set of relatively simple electronic circuits of beat frequency shifting, heterodyne phase detection. and low-pass filtering.

• Korean Journal of Optics and Photonics
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• v.14 no.5
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• pp.504-508
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• 2003

We present a new point-diffraction interferometer, which has been devised for the three-dimensional profile measurement of light scattering rough surfaces. The interferometer system has multiple sources of two-point-diffraction and a CCD camera composed of an array of two-dimensional photodetectors. Each diffraction source is an independent two-point-diffraction interferometer made of a pair of single-mode optical fibers, which are housed in a ceramic ferrule to emit two spherical wave fronts by means of diffraction at their free ends. The two spherical wave fronts then interfere with each other and subsequently generate a unique fringe pattern on the test surface. A He-Ne source provides coherent light to the two fibers through a 2${\times}$l optical coupler, and one of the fibers is elongated by use of a piezoelectric tube to produce phase shifting. The xyz coordinates of the target surface are determined by fitting the measured phase data into a global model of multilateration. Measurement has been performed for the warpage inspection of chip scale packages (CSPs) that are tape-mounted on ball grid arrays (BGAs) and backside profile of a silicon wafer in the middle of integrated-circuit fabrication process. When a diagonal profile is measured across the wafer, the maximum discrepancy turns out to be 5.6 ${\mu}{\textrm}{m}$ with a standard deviation of 1.5 ${\mu}{\textrm}{m}$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.315-316
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• 2008