Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Improved Lateral Resolution of Interferometric Microscope Using Precision Scanner

정밀 스캐너를 이용한 간섭 현미경의 가로방향 분해능 향상

  • 박성림 (한국과학기술원 기계공학과 대학원) ;
  • 박도민 (한국과학기술원 기계공학과 대학) ;
  • 류재욱 (한국과학기술원 기계공학과 대학) ;
  • 권대갑 (한국과학기술원 기계공학과)
  • Published : 1998.06.01
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Abstract

An interferometric microscope with an improved lateral resolution is presented. The nanometer resolution XY stage is integrated into standard temporal phase shifting interferometer. The nanometer resolution XY stage is used to position specimen in subpixel of CCD detector, therefore CCD detector's sampling is improved. Two scanning algorithms and those simulation results are also presented. The simulation results show that scanning algorithms improve CCD detector's sampling significantly, and interferometeric microscope's lateral resolution is improved also.

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