• Korean Journal of Materials Research
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• v.17 no.2
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• pp.96-99
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• 2007

The effects of post-annealing of high-k $HfO_2$ thin films grown by atomic layer deposition method were investigated by the annealing treatments of $400-600^{\circ}C$. $Pt/HfO_2/p-Si\;MOS$ capacitor structures were fabricated, and then the capacitance-voltage and current-voltage characteristics were measured to analyze the electrical characteristics of dielectric layers. The X-ray diffraction analyses revealed that the $500^{\circ}C-annealed\;HfO_2$ film remained to be amorphous, and the $600^{\circ}C-annealed\;HfO_2$ film was crystallized. The annealing treatment at $500^{\circ}C$ resulted in the highest capacitance and the lowest leakage current due to the reduction of defects in the $HfO_2$ films and non-crystallization. Our results suggest that post-annealing treatments are a critical factor in improving the characteristics of gate dielectric layer.

• The Korean Journal of Ecology
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• v.18 no.1
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• pp.121-136
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• 1995

The forest vegetation on Mt. Ch’ongnyang was investigated for phytosociological analysis of the vegetation types and interspecific association. The forest was classified into seven vegetation units; A: Quercus Mongolica community, A-1: Group of Quercus variabilis, A-1-a: Subgroup of Pinus densiflora, A-1-b: Typical subgroup, A-2: Group of Aconitum trilobum, A-3: Group of Quercus dentata, B: Zelkova serrata communty. The group of Quercus variabilis was distributed on southeast- and southwest-facing slopes in 400~830 m above the sea level, and organic matter in the soil was 3.36~4.67％. The group of Aconitum trilobum was distributed on northeast- and northwest-facing slopes in 650~830 m above the sea level, and organic matter in the soil was 7.18％. The group of Quercus dentata was distributed on southwest-facing solpes in the vicinity of 810 m above the sea level, and organic matter in the soil was 9.7％. The Zelkova serrata community was distributed in the vicinity of ravines, and organic matter in the soil was 7.6％. The contents of Mg and Ca, and electric conductivity in the Zelkova serrata community were relatively high, 11.82 me/100mg, and 11.27 me/100mg, 102.2 μ mos/cm, respectively. In the results of polar ordination, environmental gradient of axis Ⅰ and axis Ⅱwere correlated with moisture, inclination and azimuth, respectively. Group of Quercus variabilis has occurred in xeric, group of Aconitum trilobum in submesic, and the Zelrova serrata community in mesic sites. In the meantime the interspecific association analysis based on chi-square yielded three species groupings with high positive affinity(p<0.01), i.e.group Ⅰ consisted of 18 species, including Acer pseudo-sieboldianum, Ansliaea acerifolia, Aconitum trilobum and group Ⅲ consisted of 19 species, in cluding Zelrova serrata, Oplismenus undulatifolius, Acer truncatum var. barbinerve, respectively.

• Journal of Korean Vacuum Science & Technology
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• v.4 no.3
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• pp.73-77
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• 2000

Single crystal and polycrystalline Si thin films were doped with phosphorus by a 2-zone diffusion method to develop the low-resistivity polycrystalline Si electrode for a hemispherical grain. Solid phosphorus source was used in order to achieve uniformly and highly doped surface region of polycrystalline Si films having rough surface morphology. In case of 2-zone diffusion method, it is proved that the heavy doping near the surface area can be achieved even at a relatively low temperature. SIMS analysis revealed that phosphorus doping concentration in case of using solid P as a doping source was about 50 times as that of phosphine source at 750$^{\circ}C$. Also, ASR analysis revealed that the carrier concentration was about 50 times as that of phosphine. In order to evaluate the electrical characteristics of doped polycrystalline Si films for semiconductor devices, MOS capacitors were fabricated to measure capacitance of polycrystalline Si films. In ${\pm}$2 V measuring condition, Si films, doped with solid source, have 8% higher $C_{min}$ than that of unadditional doped Si films and 3% higher $C_{min}$ than that of Si films doped with $PH_3$ source. The leakage current of these films was a few fA/${\mu}m^2$. As a result, a 2-zone diffusion method is suggested as an effective method to achieve highly doped polycrystalline Si films even at low temperature.

• Journal of the Semiconductor & Display Technology
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• v.18 no.1
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• pp.32-37
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• 2019

Titanium dioxide ($TiO_2$) is a promising dielectric material in the semiconductor industry for its high dielectric constant. However, for utilization on Si substrate, $TiO_2$ film meets with a difficulty due to the large leakage currents caused by its small conduction band energy offset from Si substrate. In this study, we propose an in-situ plasma oxidation process in plasma-enhanced atomic layer deposition (PE-ALD) system to form an oxide barrier layer which can reduce the leakage currents from Si substrate to $TiO_2$ film. $TiO_2$ film depositions were followed by the plasma oxidation process using tetrakis(dimethylamino)titanium (TDMAT) as a Ti precursor. In our result, $SiO_2$ layer was successfully introduced by the plasma oxidation process and was used as a barrier layer between the Si substrate and $TiO_2$ film. Metal-oxide-semiconductor ($TiN/TiO_2/P-type$ Si substrate) capacitor with plasma oxidation barrier layer showed improved C-V and I-V characteristics compared to that without the plasma oxidation barrier layer.

• Journal of the Korean Institute of Telematics and Electronics
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• v.16 no.4
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• pp.36-46
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• 1979

Using N_ Ch silicon gate technology . the capacitors and transistors with various dimenssion were fabricated. Although the applied process was somewhat standard the conditions of ion implantation for the gate were varied by changing the implant energies from 30keV to 60keV for B and from 100 keV to 175keV for P . The doses of the implant also changed from 3 $\times$ 10 /$\textrm{cm}^2$ to 5 $\times$ 10 /$\textrm{cm}^2$ for B and from 4$\times$ 10 /$\textrm{cm}^2$ to 7 $\times$ 10 /$\textrm{cm}^2$ for P . The D. C. parameters such as threshold voltage. substrate doping level, the degree of inversion, capacitance. flat band voltage, depletion layer width, gate oxide thickless, surface states, motile charge density, electron mobility. leakage current were evaluated and also compared with the corresponing theoretical values and / or good numbers for application. The threshold voltages measured using curve tracer and C-V plot gave good agreements with the values calculated from SUPREM II which has been developed by Stanford University process group. The threshold vol tapes with back gate bias were used to calculate the change of the substrate doping level. The measured subthreshold slope enabled the prediction of the degree of inversion The D. C. testing results suggest the realized capacitors and transistors are suited for the memory applications.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.46 no.4
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• pp.53-63
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• 2009

This work proposes a 10b 100MS/s 27.2mW $0.8mm^2$ 0.18um CMOS ADC for WLAN such as an IEEE 802.11n standard. The proposed ADC employs a three-stage pipeline architecture and minimizes power consumption and chip area by sharing as many circuits as possible. Two multiplying DACs share a single amplifier without MOS switches connected in series while the shared amplifier does not show a conventional memory effect. All three flash ADCs use only one resistor ladder while the second and third flash ADCs share all pre-amps to further reduce power consumption and chip area. The interpolation circuit employed in the flash ADCs halves the required number of pre-amps and an input-output isolated dynamic latch reduces the increased kickback noise caused by the pre-amp sharing. The prototype ADC implemented in a 0.18um n-well 1P6M CMOS process shows the DNL and INL within 0.83LSB and 1.52LSB at 10b, respectively. The ADC measures an SNDR of 52.1dB and an SFDR of 67.6dB at a sampling rate of 100MS/s. The ADC with an active die area of $0.8mm^2$ consumes 27.2mW at 1.8V and 100MS/s.

• Asian Journal of Turfgrass Science
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• v.16 no.2
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• pp.65-73
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• 2002

Studies were conducted to determine the effect of undersoil heating on growth and quality of turfgrasses including Kentucky bluegrass (Poa pratensis L.‘Nuglade’), perennial ryegrass (Lolium perenne L.‘Accent’), tall fescue (Festuca arundinacea Schreb.‘Pixie’), and Korean lawngrass (Zoysia japonica Steud.) in simulated athletic field during winter season in Korea. Mineral contents in clippings of turfgrasses grown at different soil mixtures and temperatures were also analyzed. Undersoil heating (approximately 20$\pm$2$^{\circ}C$) was effective in protecting turfgrasses except Korean lawngrass from freezing injury and discoloration of shoots due to extremely cold temperatures during midwinter. Among turfgrasses grown at undersoil heating zone, tall fescue and perennial ryegrass showed the highest clipping weights and chlorophyll contents, respectively. However, anthocyanin contents of shoots were higher in Kentucky bluegrass. There was little or no difference in clipping weights, chlorophyll contents, anthocyanin contents and greenness of shoots between turfgrasses grown at two soil mixtures composed of 80% sand＋10% peat moss＋10% soil (v/v/v) and 80% sand＋20% pea moss (v/v). Contents of mineral K, Ca and Mg in clippings of cool-season turfgrasses were comparatively higher in a soil mixture composed of 80% sand＋10% peat moss＋10% soil, but little difference in contents of N and P was observed between two soil treatments. Results indicated that undersoil heating can improve quality of turf surface by thawing soil, melting snow, and maintaining shoot growth and greenness of turfgrasses in sports field during winter season.

• Asian Journal of Turfgrass Science
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• v.15 no.4
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• pp.169-179
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• 2001

This study was conducted to determine the effect of root zone cooling on growth and quality of turfgrasses including Kentucky bluegrass (Poa pratensis L.‘Nuglade’), perennial ryegrass (Lolium perenne L.‘Accent’), tall fescue (Festuca arundinacea Schreb.‘Pixie’), and Japanese lawngrass (Zoysia japonica Steud.) in simulated athletic field during summer season in Korea. Mineral contents in clippings of turfgrasses grown at different soil mixtures and temperatures were also analyzed. Root zone cooling (approximately 4~6$^{\circ}C$ lower than that of untreated-control) resulted in good uniformity, little disease incidence and higher level of chlorophyll contents in cool-season turfgrasses. The effectiveness of root zone cooling in protecting disease incidence from high temperature stress was the most manifest in perennial ryegrass compared to others. Fresh clipping weight in treatment of root zone cooling was increased approximately 2 times in Kentucky bluegrass and perennial ryegrass, and 2.5 times in tall fescue compared to those of control. There was higher growth rate in a soil mixture composed of 80% peat moss ＋10% sand ＋10% soil (v/v/v) than in that of 80% pea moss ＋20% sand (v/v), Mineral contents of N, P, K, Ca, and Mg in clippings of three species of cool-season turfgrasses were significantly increased in treat-ment of root zone cooling but this was not found in Japanese lawngrass. Results showed that root zone cooling has a benefit in keeping good quality and growth of cool-season turfgrasses in sports field under supraoptimal ambient temperature during summer season.

• Radiation Oncology Journal
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• v.7 no.2
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• pp.247-257
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• 1989

Thirty patients with nonresectable hepatocellular carcinoma (HCC) due to either locally advanced lesion or association with liver cirrhosis, treated with combined radiotherapy and hyperthermia between April 1988 and July 1988, at Dept. of Radiation Oncology, Yonsei university College of medicine, were analysed. External radiotherapy of a total dose of 3060cGy/3.5 wks was given. Hyperthermia was given twice a week with a total of 6 treatment sessions using 8MHz radiofrequency capacitive type heating device, i.e., Thermotron RF-8 and Cancermia. In all cases hyperthermia was given within 30 minutes after radiotherapy for 30~60min. Temperature was measured by inserting thermocouple into the tumor mass under the ultrasonographic guidance only for those who had not bleeding tendency. As a result, partial response (PR) was achieved in 12 patients (40%), and symptomatic improvement was observed in 22 patients (78.6%) among 28 patients who had suffered from abdominal pain. The most significant factor affecting the tumor response rate was the type of tumor (single massive: 10/14, 71.4%; diffuse infiltrative: 2/10, 20%; multinodular:0/6, 0%; p<0.005). There were not any significant side effects relating to combined treatment. The overall 1 year survival rate was 34%, with 50% in the PR group and 22% in the no response group (NR), respectively. Median survival was 6.5 months and longer for those of PR than of NR (11 mos. vs 5, p<0.05). In conclusion, combined radiotherapy and hyperthermia appeared to be effective in local control and symptomatic palliation of HCC. Further study including a larger number of the patients to confirm its effect in survival and detrimental side effect should be urged.

• Journal of agricultural medicine and community health
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• v.34 no.1
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• pp.13-23
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• 2009

Objective: The objective of this study was to evaluate the association of social support with health status and health behavior. Methods:　This study was conducted with 79 elderly people in Gunja-ri, Dongsan-myun, Chuncheon. We performed face to face interview which was composed of socio-demographic characteristics, social support, health status and health behavior. The association between social support and result variables was analysed by Chi-square test and logistic regression. We used SAS ver9.1 for statistic analysis. Results: Mean age of the study population was 72.0$\pm$7.0, social support score was 14.3$\pm$4.7 with full marks of 20 and 36.25% of the total population were shown to have depression. When the social support score was changed, depression (p=0.0007) and physical exercise (p=0.0312) showed significant difference. The self-rated health status was significantly related to the relationship with family members (OR=0.25, 95% CI=0.07-0.95) and the quality of sleep was also significantly associated to the relationship with family members (OR=0.21, 95% CI=0.06-0.73). The physical exercise was done significantly less in the group without close friends than in the group with many close friends (OR=0.21, 95% CI=0.05-0.94) and the depression was significantly more in the group without community participation than in the group with community participation (OR=4.79, 95% CI=1.62-14.15). Conclusions: Through this study, we could conclude that the social support factors are associated with health status and health behavior. Therefore, to improve the health status of rural elderly, we need to approach to develop social support.