• Title/Summary/Keyword: p-FET

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Enhanced pH Response of Solution-gated Graphene FET by Using Vertically Grown ZnO Nanorods on Graphene Channel

  • Kim, B.Y;Jang, M.;Shin, K.-S.;Sohn, I.Y;Kim, S.-W.;Lee, N.-E
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.434.2-434.2
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    • 2014
  • We observe enhanced pH response of solution-gated field-effect transistors (SG-FET) having 1D-2D hybrid channel of vertical grown ZnO nanorods grown on CVD graphene (Gr). In recent years, SG-FET based on Gr has received a lot of attention for biochemical sensing applications, because Gr has outstanding properties such as high sensitivity, low detection limit, label-free electrical detection, and so on. However, low-defect CVD Gr has hardly pH responsive due to lack of hydroxyl group on Gr surface. On the other hand, ZnO, consists of stable wurtzite structure, has attracted much interest due to its unique properties and wide range of applications in optoelectronics, biosensors, medical sciences, etc. Especially, ZnO were easily grown as vertical nanorods by hydrothermal method and ZnO nanostructures have higher sensitivity to environments than planar structures due to plentiful hydroxyl group on their surface. We prepared for ZnO nanorods vertically grown on CVD Gr (ZnO nanorods/Gr hybrid channel) and to fabricate SG-FET subsequently. We have analyzed hybrid channel FETs showing transfer characteristics similar to that of pristine Gr FETs and charge neutrality point (CNP) shifts along proton concentration in solution, which can determine pH level of solution. Hybrid channel SG-FET sensors led to increase in pH sensitivity up to 500%, compared to pristine Gr SG-FET sensors. We confirmed plentiful hydroxyl groups on ZnO nanorod surface interact with protons in solution, which causes shifts of CNP. The morphology and electrical characteristics of hybrid channel SG-FET were characterized by FE-SEM and semiconductor parameter analyzer, respectively. Sensitivity and sensing mechanism of ZnO nanorods/Gr hybrid channel FET will be discussed in detail.

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Easy Detection of Amyloid β-Protein Using Photo-Sensitive Field Effect

  • Kim, Kwan-Soo;Ju, Jong-Il;Song, Ki-Bong
    • Journal of Sensor Science and Technology
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    • v.21 no.5
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    • pp.339-344
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    • 2012
  • This article describes a novel method for the detection of amyloid-${\beta}$($A{\beta}$) peptide that utilizes a photo-sensitive field-effect transistor (p-FET). According to a recent study, $A{\beta}$ protein has been known to play a central role in the pathogenesis of Alzheimer's disease (AD). Accordingly, we investigated the variation of photo current generated from p-FET with and without intracellular magnetic beads conjugated with $A{\beta}$ peptides, which are placed on the p-FET sensing areas. The decrease of photo current was observed due to the presence of the magnetic beads on the channel region. Moreover, a similar characteristic was shown when the Raw 264 cells take in magnetic beads treated with $A{\beta}$ peptide. This means that it is possible to simply detect a certain protein using magnetic beads and a p-FET device. Therefore, in this paper, we suggest that our method could detect tiny amounts of $A{\beta}$ for early diagnosis of AD using the p-FET devices.

Complementary FET-The Future of the Semiconductor Transistor (Complementary FET로 열어가는 반도체 미래 기술)

  • S.H. Kim;S.H. Lee;W.J. Lee;J.W. Park;D.W. Suh
    • Electronics and Telecommunications Trends
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    • v.38 no.6
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    • pp.52-61
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    • 2023
  • With semiconductor scaling approaching the physical limits, devices including CMOS (complementary metal-oxide-semiconductor) components have managed to overcome yet are currently struggling with several technical issues like short-channel effects. Evolving from the process node of 22 nm with FinFET (fin field effect transistor), state-of-the-art semiconductor technology has reached the 3 nm node with the GAA-FET (gate-all-around FET), which appropriately addresses the main issues of power, performance, and cost. Technical problems remain regarding the foundry of GAA-FET, and next-generation devices called post-GAA transistors have not yet been devised, except for the CFET (complementary FET). We introduce a CFET that spatially stacks p- and n-channel FETs on the same footprint and describe its structure and fabrication. Technical details like stacking of nanosheets, special spacers, hetero-epitaxy, and selective recess are more thoroughly reviewed than in similar articles on CFET fabrication.

Development of Selective GaN etching Process for p-GaN/AlGaN/GaN E-mode FET Fabrication (p-GaN/AlGaN/GaN E-mode FET 제작을 위한 선택적 GaN 식각 공정 개발)

  • Jang, Won-Ho;Cha, Ho-Young
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.24 no.2
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    • pp.321-324
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    • 2020
  • In this work, we developed a selective etching process for GaN that is a key process in p-GaN/AlGaN/GaN enhancement-mode (E-mode) power switching field-effect transistor (FET) fabrication. In order to achieve a high current density of p-GaN/AlGaN/GaN E-mode FET, the p-GaN layer beside the gate region must be selectively etched whereas the underneath AlGaN layer should be maintained. A selective etching process was implemented by oxidizing the surface of the AlGaN layer and the GaN layer by adding O2 gas to Cl2/N2 gas which is generally used for GaN etching. A selective etching process was optimized using Cl2/N2/O2 gas mixture and a high selectivity of 53:1 (= GaN/AlGaN) was achieved.

SOI 기판을 이용한 back-gated FET 센서의 pH 농도검출에 관한 연구

  • Park, Jin-Gwon;Kim, Min-Su;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.242-242
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    • 2010
  • SiO2박막을 이온 감지막으로 이용한 pH농도센서를 제작하였다. 현재 많은 연구중인 pH센서, pH-ISFET(pH-Ion Sensitive Field Effect Transistor)는 용액과 기준전극간의 전기화학적 변위차를 이용하여 pH를 센싱한다. pH-ISFET는 기존 CMOS공정을 그대로 이용할 수 있고, 이온감지막의 변화만으로 다양한 센서를 제작할 수 있어 최근 많은 연구가 진행 중이다. 하지만 FET를 제작하기 위한 공정의 복잡성과 용액의 전위를 정해주고 FET에 바이어스를 인가해줄 기준전극이 반드시 필요하다는 제한성이 있다. 따라서 본 연구에서는 SOI 기판을 이용하여 간단한 구조의 pH센서를 제작하였다. 센서는 (100)결정면을 가지는 p-타입 SOI(Silicon On Insulator)기판을 사용하였으며 포토리소그래피 공정을 이용하여 back-gated MOSFET구조로 제작하였다. 이온감지막으로 사용할 SiO2박막은 RF 스퍼터링을 이용하여 $100{\AA}$ 증착하였다. 바이어스는 기존 pH-ISFET와는 다르게 기준전극 대신 기판을 backgate로 사용하여 FET에 바이어스를 인가해 주었다. pH 용액 주입을 위해 PDMS재질의 챔버를 제작하고 실리콘글루를 이용하여 센서에 부착하였다. pH12부터 pH4까지 단계적으로 누적시키며 챔버에 주입하였고, pH에 따른 드레인전류의 변화를 관찰하였다. pH용액을 챔버에 주입시, pH농도에 따라 제작된 센서의 문턱전압이 오른쪽으로 이동하는 결과를 관찰할 수 있었다. 결과적으로, 구조가 간단한 pseudo MOSFET을 이용하여 pH센서의 적용가능성을 확인하였으며 SiO2박막 역시 본 pH센서의 이온감지막의 역할과 센서의 안정성을 향상시킬 수 있다는 점을 확인하였다.

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Characteristics Analysis of Class E Frequency Multiplier using FET Switch Model (FET 스위치 모델을 이용한 E급 주파수 체배기 특성 해석)

  • Joo, Jae-Hyun;Koo, Kyung-Heon
    • Journal of Advanced Navigation Technology
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    • v.15 no.4
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    • pp.596-601
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    • 2011
  • This paper has presented research results for the switching mode class E frequency multiplier that has simple circuit structure and high efficiency. Frequency multiplication is coming from the nonlinearity of the active component, and this paper models the FET active component as a simple switch and some parasitics to analyze the characteristics. The matching component parameters for the class E frequency doubler have been derived with modeling the FET as a input controlled switch and some parasitics. A circuit simulator, ADS, is used to simulate the output voltage and current waveform and efficiency with the variation of the parasitic values. With 2.9GHz input and 2V bias, the drain efficiency has been decreased from 98% to 28% with changing the parasitic capacitance from 0pF to 1pF at 5.8GHz output, which shows that the parasitic capacitance CP has the most significant effect on the efficiency among the parasitics of FET.

Characteristics of Protein G-modified BioFET

  • Sohn, Young-Soo
    • Journal of Sensor Science and Technology
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    • v.20 no.4
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    • pp.226-229
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    • 2011
  • Label-free detection of biomolecular interactions was performed using BioFET(Biologically sensitive Field-Effect Transistor) and SPR(Surface Plasmon Resonance). Qualitative information on the immobilization of an anti-IgG and antibody-antigen interaction was gained using the SPR analysis system. The BioFET was used to explore the pI value of the protein and to monitor biomolecular interactions which caused an effective charge change at the gate surface resulting in a drain current change. The results show that the BioFET can be a useful monitoring tool for biomolecular interactions and is complimentary to the SPR system.

Understanding of the Working Principle of Field-effect Transistor (FET) Biosensor with the Review Of Experimental Measurement Set-up (전계효과트랜지스터(FET) 바이오센서 실험 셋업 분석을 통한 동작원리 이해)

  • Kook-Nyung Lee
    • Journal of Sensor Science and Technology
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    • v.32 no.6
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    • pp.487-495
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    • 2023
  • Over the past few decades, considerable research has been conducted on field-effect transistor (FET) biosensors; however, other than electrochemical sensors for pH, they have not reached the commercialization stage and still remain at the basic research level. Although several reports have been published on experiments with real biological samples, no reports exist of developments that have reached commercialization or finalized approval for use. In this paper, we explain the reason for the experiments of FET biosensors to induce spurious signals in an experimental setup and explain the existence of misunderstandings regarding the operating principle of FET biosensors owing to the spurious signals. Based on the thoughtful review of the results of previously published papers, we show that the electrochemical read-out principle of FET biosensors requires our intensive understanding of the interfacial potential between the solution and the sensor electrode for further progress in the FET biosensor research.

Analysis of inverter switched snubber using N-channel MOS-FET

  • Suzuki, Taiju;Ikeda, Hiroaki;Mizutani, Yoko;Ishikawa, Jinichi;Yoshida, Hirofumi
    • 제어로봇시스템학회:학술대회논문집
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    • 1996.10a
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    • pp.207-210
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    • 1996
  • This paper describes the analysis of the operation of the switched snubber in order to depress the surge voltage in the MOS-FET inverter. In this paper, the N-channel MOS-FET which operates faster than the P-channel MOS-FET was used for the inverter circuit. So, the inverter and switched snubber can operate at high-frequency in the order of MHz. The cause of generating the surge voltage in the high frequency inverter has been cleared, and then how to depress the surge voltage using the switched snubber consisting of an N-channel MOS-FET has been given. Furthermore, described is the power loss within the switched snubber which is made of an N-channel MOS-FET. The inverter having the N-channel MOS-FET used as a switched snubber can drive such a low impedance load such as mega-sonic transducer for a mega-sonic studied cleaner sufficiently.

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