• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.366-367
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• 2006

In general, HF chemistry lifts off the particles during scrubbing after polishing and effectively removes particles. It is sometimes impossible to apply HF chemistry on W plug due to the degradation of electrical characteristics of a device. In this paper, a post W CMP cleaning process is proposed to remove residue particles without applying HF chemistry. After W CMP, recessed plugs are created, therefore they easily trap slurry particles during CMP process. These particles in recessed plug are not easy to remove by brush scrubbing when $NH_4OH$ chemistry is used for the cleaning because the brush surface can not reach the recessed area of plugs. Buffing with oxide slurry was followed by W CMP due to its high selectivity to W. The buffing polishes only oxide slightly which creates higher plug profiles than surrounding oxide. Higher profiles make the brush contact much more effectively and result in a similar particle removal efficiency even in $NH_4OH$ cleaning to that in HF brush scrubbing.

• The Journal of Korean Academy of Prosthodontics
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• v.34 no.3
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• pp.620-631
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• 1996

Bonding of resin to cast alloy has traditionally been provided by mechanical retention. But, chemical bonding methods such as silicoating, tin plating, heat treatment, application of 4-META adhesives, have been developed to overcome the problems of the mechanical bonding methods. Silicoating has been used availaby in fixed prosthodontics, but is also reported to be used in removable prosthodontics. The aim of this study is to measure the tensile bond strength between resin and metal, and compare the effect of the type of metal and the grain size of the aluminum oxide on the bond strength, after metal surface roughening, coating of the opaque resin, and curing of heat-curing resin were performed. The test groups were divided into 4 groups according to the cast alloys and the aluminum oxide particles used. Group 1 : Type 4 gold alloy(DM66) blasted with $$50{\mu}m\;Al_{2}O_3$$ Group 2 : Type 4 gold alloy(DM66) blasted with $$250{\mu}m\;Al_{2}O_3$$, Group 3 : Co-Cr alloy(Nobilium) blasted with $$50{\mu}m\;Al_{2}O_3$$ Group 4 : Co-Cr alloy(Nobilium) blasted with $$250{\mu}m\;Al_{2}O_3$$ * 10 test specimens were made on each group. The specimens were thermocycled, and Instron Universal testing machine was used to measure the tensile bond strength of the finished specimens. The results were as follows : 1. Bond strengths showed that the group of gold alloy blasted with $250{\mu}m$ aluminum oxide particle had higher bond strength, and the group of gold alloy blasted with $50{\mu}m$ aluminum oxide particles had lower bond strength than any of the other groups. 2. Gold alloy had significantly higher bond strength when blasted with $250{\mu}m$ aluminum oxide particles than $50{\mu}m$, but. Co-Cr alloy showed no statistically significant difference between the two particle sizes. 3. When blasted with $50{mu}m$ aluminum oxide particles, Co-Cr alloy showed significantly higher bond strength than gold alloy. And, when blasted with $250{\mu}m$ aluminum oxide particles, gold alloy had significantly higher bond strength than Co-Cr alloy. 4. On the examination of the fractured sites, only the group of Co-Cr alloy blasted with $50{\mu}m$ aluminum oxide particles showed a part of residual opaque resin, but all the samples of the other groups fractured between the resin and the metal.

• Korean Journal of Materials Research
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• v.23 no.2
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• pp.81-88
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• 2013

In this study, using a tin chloride solution as the raw material, a nano-sized tin oxide powder with an average particle size below 50 nm is generated by a spray pyrolysis process. The properties of the tin oxide powder according to the nozzle tip size are examined. Along with an increase in the nozzle tip size from 1 mm to 5 mm, the generated particles that appear in the shape of droplets maintain an average particle size of 30 nm. When the nozzle tip size increases from 1 mm to 2 mm, the average size of the generated particles is around 80-100 nm, and the ratio of the independent particles with a compact surface structure increases significantly. When the nozzle tip size is at 3 mm, the majority of the generated particles maintain the droplet shape, the average size of the droplet-shaped particles increases remarkably compared to the cases of other nozzle tip sizes, and the particle size distribution also becomes extremely irregular. When the nozzle tip size is at 5 mm, the ratio of droplet-shaped particles decreases significantly and most of the generated particles are independent ones with incompact surface structures. Along with an increase in the nozzle tip size from 1 mm to 3 mm, the XRD peak intensity increases, whereas the specific surface area decreases greatly. When the nozzle tip size increases up to 5 mm, the XRD peak intensity decreases significantly, while the specific surface area increases remarkably.

• Particle and aerosol research
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• v.9 no.4
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• pp.209-219
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• 2013

We have used the modified diffusion flame burner to synthesize silica coated iron oxide nanoparticles having enhanced superparamagnetic property. Silica-encapsulated iron oxide particles were directly observed using a high resolution transmission electron microscope. From the energy dispersive X-ray spectroscopy (EDS) and zeta potential measurements, the iron oxide particles were found to be completely covered by a silica coating layer. X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) measurements revealed that the iron oxide core consists of ${\gamma}-Fe_2O_3$ rather than ${\alpha}-Fe_2O_3$. Our magnetization measurements support this conclusion. Biocompatibility test of the silica-coated iron oxide nanoparticles is also conducted using the protein adsorption onto the coated particle.

• Carbon letters
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• v.14 no.4
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• pp.206-209
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• 2013

Nanocomposites comprised of graphene oxide (GO) nanosheets and magnesium oxide (MgO) nanoparticles were synthesized by a sol-gel process. The synthesized samples were studied by X-ray powder diffraction, atomic force microscopy, transmission electron microscopy, and energy-dispersive X-ray analysis. The results show that the MgO nanoparticles, with an average diameter of 70 nm, are decorated uniformly on the surface of the GOs. By controlling the concentration of the MgO precursors and reaction cycles, it was possible to control the loading density and the size of the resulting MgO particles. Because the MgO particles are robustly anchored on the GO structure, the MgO/GOs nanocomposites will have future applications in the fields of adsorption and chemical sensing.

• The Journal of the Convergence on Culture Technology
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• v.9 no.3
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• pp.593-599
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• 2023

Nickel oxide (NiO) nanoparticles were successfully synthesized by a simple liquid phase process for producing ceramics powder using a precursor impregnated with a nickel(II) nitrate hexahydrate aqueous solution in an industrial pulp. The microfibrile structure of the precursor impregnated with nickel nitrate hexahydrate aqueous solution was confirmed by scanning electron microscope (SEM), and the crystal structure and particle size of nickel oxide (NiO) particles produced as the heat treatment temperature of the precursor were analyzed by X-ray diffraction (XRD) and SEM. As a result, it was confirmed through XRD and SEM analysis that the temperature at which the organic material of the precursor is completely thermally decomposed was 495-500℃, and the size and crystallinity of the nickel oxide particles produced increased as the heat treatment temperature increased. The size of the nickel oxide particles obtained by heat treatment at 500-800℃ for 1 hour was 50-200 nm. It was confirmed by XRD and SEM analysis that a NiO crystal phase was formed at a heat treatment temperature of 380℃, only a single NiO phase existed until 800℃.

• The Journal of the Convergence on Culture Technology
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• v.9 no.6
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• pp.855-859
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• 2023

Copper oxide (CuO) nanoparticles were successfully synthesized using a precursor in which industrial starch was impregnated with an aqueous solution of copper (II) nitrate trihydrate. The microstructure of the precursor impregnated with an aqueous solution of copper nitrate trihydrate was confirmed with a scanning electron microscope (SEM), and the particle size and the crystal structure of the copper oxide particles produced as the temperature of the heat treatment of the precursor increased was analyzed by X-ray diffraction (XRD) and the scanning electron microscope (SEM). As a result of the analysis, it was confirmed that the temperature at which the organic matter of the precursor is completely thermally decomposed is 450-490℃, and that the size and crystallinity of the copper oxide particles increased as the heat treatment temperature increased. The size of the copper oxide particles obtained through heat treatment at 500-800℃ during 1 hour was 100nm~2㎛. It was confirmed that the copper oxide crystalline phase is formed at a heat treatment temperature of 400℃, and only the copper oxide single phase existed up to 800℃. And it was also confirmed that the size of particles produced increased as the calcination temperature increased.

• Transactions of the Korean Society of Mechanical Engineers
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• v.15 no.2
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• pp.618-629
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• 1991

The purpose of this experiment is to understand the distribution of coal particles inside CWM droplet which is believed to be a very important factor controlling the flame stability. CWM slurry is atomized by an air assisted twin fluid nozzle. An experimental rig is designed and fabricated. The mean size of coal particle distribution in CWM slurry, atomizing air pressure, coal particle loading in slurry and sampling position inside spray are main experimental variables. The atomized CWM droplets are sampled on the thin white layer of magnesium oxide by the emergency sampling shutter. The sampled coal particles on magnesium oxide layers are collected into test tubes and dispersed completely by Ultra-Sonicator. The size distribution of coal particles inside droplets are measured by Coulter Counter. The presence of coal particle inside the impressions of droplets on magnesium oxide layer are investigated by photo technique. There are quite many droplets which do not have any coal particles. Those are just water droplets, not CWM droplets. The population ratio of droplets without coal particles to toal number of droplets is strongly affected by the mean size of coal particle distribution in slurry and this ration becomes bigger number as the mean size of coal particles be larger. The size distribution of coal particles inside CWM droplets is not even and depends on the size of droplet. Experimental results show that the larger CWM droplets has droplets has bigger mean value of particle size distribution. This trend becomes more evident as the atomizing air pressure is raised and the mean size of coal particles in CWM slurry is bigger. That is, the distribution of coal particles inside CWM dropolets is very much affected by the atomizing air pressure and the mean size of pulverized coal particles in CWM slurry.

• Applied Chemistry for Engineering
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• v.22 no.6
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• pp.631-635
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• 2011

Spherical and non-spherical silica particles prepared by the direct oxidation were studied for the effect of the particle size and shape of these particles on oxide CMP removal rate. Spherical silica particles, which have 10~100 nm in size, were prepared by the direct oxidation process from silicon in the presence of alkali catalyst. The 10 nm silica particles were aggregated by addition of an acid, an alcohol, or a silane as an aggregation inducer between the particles. Two or more aggregated silica particles were used as a seed to grow non spherical silica particles in the direct oxidation process of silicon in the presence of alkali catalyst. The oxide removal rate of spherical silica particles increased with increasing an average particle size for spherical silica abrasives in the oxide CMP. It further increased non-spherical particles, compared with the spherical particles in the similar average particle size.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2012.05a
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• pp.429-434
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• 2012

Ignition delay of micro/nano aluminum particles is caused by aluminum oxide shell. The method of minimizing this ignition delay is proposed in the study. Generating and heating of particles are processed at the same time. As soon as heated particles are produced, they immediately contact with oxygen. Chemical reaction is induced on the contact surface instead of crystallization of oxide shell. Finally particles are ignited. Aluminum particles are generated by laser ablation on an aluminum plate using Nd:YAG pulse laser. Injected particles are confirmed through visualization of particles using scattering method. $CO_2$ continuous laser supplies heat to aluminum plate and generated particles. Trace of burning particles is observed in the experiment.