Effect of Size and Morphology of Silica Abrasives on Oxide Removal Rate for Chemical Mechanical Polishing
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Lee, Jinho
(Eco Composite Materials Center, Korea Institute of Ceramic Engineering and Technology)
Lim, Hyung Mi (Eco Composite Materials Center, Korea Institute of Ceramic Engineering and Technology) Huh, Su-Hyun (Young Il Chemiced Co., Ltd.) Jeong, Jeong-Hwan (Eco Composite Materials Center, Korea Institute of Ceramic Engineering and Technology) Kim, Dae Sung (Eco Composite Materials Center, Korea Institute of Ceramic Engineering and Technology) Lee, Seung-Ho (Eco Composite Materials Center, Korea Institute of Ceramic Engineering and Technology) |
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