• 센서학회지
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• 제29권6호
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• pp.369-373
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• 2020

A hydrogen sensor was fabricated by utilizing a bundle of metal oxide nanostructures whose growth positions were selectively controlled by utilizing graphene, which is a carbon of atomic-unit thickness. To verify the reducing ability of graphene, it was confirmed that the multi-composition metal oxide V₂O₅ was converted into VO₂ on the graphene surface. Because of the role of graphene as a reducing catalyst, it was confirmed that ZnO and MoO₃ nanostructures were grown at high density only on the graphene surface. The fabricated gas sensor showed excellent sensitivity.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 학술대회 논문집 정보 및 제어부문
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• pp.130-132
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• 2005

This paper presents two ART-based neural networks for the identification of gas mixtures subject to the drift. A fuzzy ARTMAP neural network is used for classifying $H_2S$, $NH_3$ and their mixture gases including a reference gas. The other fuzzy ART neural network is utilized to detect the drift of a tin oxide gas sensor by tracking a cluster center of the reference gas. After detecting the drift, the previous cluster center of each gas is updated as much as the drift of the reference gas. By the simulations, the proposed method is shown to compensate the drift on-line without making many categories of target gases compared with the previous studies.

• 한국재료학회지
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• 제33권5호
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• pp.195-204
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• 2023

Micro-electronic gas sensor devices were developed for the detection of carbon monoxide (CO), nitrogen oxides (NO_x), ammonia (NH₃), and formaldehyde (HCHO), as well as binary mixed-gas systems. Four gas sensing materials for different target gases, Pd-SnO₂ for CO, In₂O₃ for NO_x, Ru-WO₃ for NH₃, and SnO₂-ZnO for HCHO, were synthesized using a sol-gel method, and sensor devices were then fabricated using a micro sensor platform. The gas sensing behavior and sensor response to the gas mixture were examined for six mixed gas systems using the experimental data in MEMS gas sensor arrays in sole gases and their mixtures. The gas sensing behavior with the mixed gas system suggests that specific adsorption and selective activation of the adsorption sites might occur in gas mixtures, and allow selectivity for the adsorption of a particular gas. The careful pattern recognition of sensing data obtained by the sensor array made it possible to distinguish a gas species from a gas mixture and to measure its concentration.

• 센서학회지
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• 제30권6호
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• pp.381-383
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• 2021

Light-activated metal oxide gas sensors have been investigated in recent decades. Light illumination enhances the sensing attributes, including the operational temperature, sensitivity, and selectivity. Unfortunately, high operating temperature is a major problem for gas sensors because of the huge energy consumption. Therefore, the importance of light-activated room-temperature sensing has increased. This paper reviews recent light-activated sensors and their sensing mechanisms with a specific focus on metal oxide gas sensors. Studies use the outstanding ZnO and SnO₂ sensors to research photoactivation when illuminated by various sources such as ultraviolet (UV), halogen lamp, or monochromatic light. Photon induction generates electron-hole pairs that increase the number of adsorption sites of gas molecules and ions improving the sensor's sensing properties.

• 한국전기전자재료학회논문지
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• 제26권12호
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• pp.882-887
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• 2013

We investigated a SiC-based hydrogen gas sensor with metal-insulator-semiconductor (MIS) structure for high temperature process monitoring and leak detection applications. The sensor was fabricated by Pd/$Ta_2O_5$/SiC structure, and a thin tantalum oxide ($Ta_2O_5$) layer was exploited with the purpose of sensitivity improvement, because tantalum oxide has good stability at high temperature as well as high permeability for hydrogen gas. In the experiment, dependence of I-V characteristics and capacitance response properties on hydrogen gas concentrations from 0 to 2,000 ppm was analyzed at room temperature to $500^{\circ}C$. As the result, our sensor exploiting a $Ta_2O_5$ dielectric layer showed possibilities with regard to use in hydrogen gas sensors for high-temperature applications.

• 센서학회지
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• 제30권3호
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• pp.175-180
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• 2021

In this paper, methods for improving the sensitivity of gas sensors to NO₂ gas are presented. A gas sensor was fabricated based on an SnO₂ nanowire network using the vapor-phase-growth method. In the gas sensor, the Au electrode was replaced with a fluorinedoped tin oxide (FTO) electrode, to achieve high sensitivity at low temperatures and concentrations. The gas sensor with the FTO electrode was more sensitive to NO₂ gas than the sensor with the Au electrode: notably, both sensors were based on typical SnO₂ nanowire network. When the Au electrode was replaced by the FTO electrode, the sensitivity improved, as the contact resistance decreased and the surface-to-volume ratio increased. The morphological features of the fabricated gas sensor were characterized in detail via field-emission scanning electron microscopy and X-ray diffraction analysis.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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• pp.51.3-51.3
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• 2010

Due to the recent public awareness of global warming and sustainable economic growth, there has been a growing interest in alternative clean energy sources. Hydrogen is considered as a clean fuel for the next generation. One of the technical challenges related to the use of hydrogen is safe monitoring of the hydrogen leak during separation, purification and transportation. For detecting various gases, chemiresistor-type gas sensors have been widely studied and used due to their well-established detection scheme and low cost. However, it is known that many of them have the limited sensitivity and slow response time, when used at low temperature conditions. In our work, a sensor based on Schottky barriers at the electrode/sensing material interface showed promising results that can be utilized for developing fast and highly sensitive gas sensors. Our hydrogen sensor was designed and fabricated based on indium oxide (In2O3)-doped tin oxide (SnO2) semiconductor nanoparticles with platinum (Pt) nanoclusters in combination with interdigitated electrodes. The sensor showed the sensitivity as high as $10^7%$ (Rair/Rgas) and the detection limit as low as 30 ppm. The sensor characteristics could be obtained via optimized materials synthesis route and sensor electrode design. Not only the contribution of electrical resistance from the film itself but also the interfacial effect was identified as an important factor that contribute significantly to the overall sensor characteristics. This promises the applicability of the developed sensor for monitoring hydrogen leak at room temperature.

• 센서학회지
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• 제29권6호
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• pp.365-368
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• 2020

As a green and abundant source of energy, H2 has attracted the attention of researchers for use in different applications. Nevertheless, it is highly flammable, and because of its significantly small size, extreme attention is needed to detect its leakage. In this review, we discuss different effects of noble metals on the H2 gas response and performance of metal oxide-based gas sensors. In this regard, we discuss the effects of noble metals, in combination with metal oxides, on H2 gas detection. The catalytic activity towards H2 gas and the formation of heterojunctions with metal oxides are the main contributions of noble metals to the sensing improvement of H2 gas sensors. Furthermore, in the special case of Pd and somewhat Pt, the formation of PdHx and PtHx also affects the H2 sensing performance. This review paper provides useful information for researchers working in the field of H2 gas detection.

• 한국재료학회지
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• 제25권4호
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• pp.171-176
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• 2015

We present the detection characteristics of nitrogen monoxide(NO) gas using p-type copper oxide(CuO) thin film gas sensors. The CuO thin films were fabricated on glass substrates by a sol-gel spin coating method using copper acetate hydrate and diethanolamine as precursors. Structural characterizations revealed that we prepared the pure CuO thin films having a monoclinic crystalline structure without any obvious formation of secondary phase. It was found from the NO gas sensing measurements that the p-type CuO thin film gas sensors exhibited a maximum sensitivity to NO gas in dry air at an operating temperature as low as $100^{\circ}C$. Additionally, these CuO thin film gas sensors were found to show reversible and reliable electrical response to NO gas in a range of operating temperatures from $60^{\circ}C$ to $200^{\circ}C$. It is supposed from these results that the p-type oxide semiconductor CuO thin film could have significant potential for use in future gas sensors and other oxide electronics applications using oxide p-n heterojunction structures.

• 센서학회지
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• 제17권3호
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• pp.183-187
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• 2008

A sub-ppm level MEMS gas sensor that can be used for the detection of formaldehyde (HCHO) is presented. It is realized by using a zinc oxide (ZnO) thin-film material with a Ni-seed layer as a sensing material and by bulk micromachining technology. To enhance sensitivity of the MEMS gas sensor with Ni-seed layer was embedded with ZnO sensing material and sensing electrodes. As experimental results, the changed sensor resistance ratio for HCHO gas was 9.65 % for 10 ppb, 18.06 % for 100 ppb, and 35.7 % for 1 ppm, respectively. In addition, the minimum detection level of the fabricated MEMS gas sensor was 10 ppb for the HCHO gas. And the measured output voltage was about 0.94 V for 10 ppb HCHO gas concentration. The noise level of the fabricated MEMS gas sensor was about 50 mV. The response and recovery times were 3 and 5 min, respectively. The consumption power of the Pt micro-heater under sensor testing was 184 mW and its operating temperature was $400^{\circ}C$.