센서학회지 (Journal of Sensor Science and Technology)

  • 제17권3호
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  • Pages.183-187
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  • 2008
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  • 1225-5475(pISSN)
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  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
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서브 피피엠 레벨 미세기전 가스 센서

Sub-ppm level MEMS gas sensor

  • 고상춘 (한국전자통신연구원(ETRI) BT 융합연구부) ;
  • 전치훈 (한국전자통신연구원(ETRI) BT 융합연구부) ;
  • 송현우 (한국전자통신연구원(ETRI) BT 융합연구부) ;
  • 박선희 (한국전자통신연구원(ETRI) BT 융합연구부)
  • Ko, Sang-Choon (Electronics and Telecommunications Research Institute, BT Convergence Technology Research Department) ;
  • Jun, Chi-Hoon (Electronics and Telecommunications Research Institute, BT Convergence Technology Research Department) ;
  • Song, Hyun-Woo (Electronics and Telecommunications Research Institute, BT Convergence Technology Research Department) ;
  • Park, Seon-Hee (Electronics and Telecommunications Research Institute, BT Convergence Technology Research Department)
  • 발행 : 2008.05.31
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초록

A sub-ppm level MEMS gas sensor that can be used for the detection of formaldehyde (HCHO) is presented. It is realized by using a zinc oxide (ZnO) thin-film material with a Ni-seed layer as a sensing material and by bulk micromachining technology. To enhance sensitivity of the MEMS gas sensor with Ni-seed layer was embedded with ZnO sensing material and sensing electrodes. As experimental results, the changed sensor resistance ratio for HCHO gas was 9.65 % for 10 ppb, 18.06 % for 100 ppb, and 35.7 % for 1 ppm, respectively. In addition, the minimum detection level of the fabricated MEMS gas sensor was 10 ppb for the HCHO gas. And the measured output voltage was about 0.94 V for 10 ppb HCHO gas concentration. The noise level of the fabricated MEMS gas sensor was about 50 mV. The response and recovery times were 3 and 5 min, respectively. The consumption power of the Pt micro-heater under sensor testing was 184 mW and its operating temperature was $400^{\circ}C$.

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참고문헌

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