• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.34 no.4
• /
• pp.242-245
• /
• 2021

In this work, we fabricated oxide on an n-type silicon substrate through local anodic oxidation (LAO) using atomic force microscopy (AFM). The resulting oxide thickness was measured and its correlation with load force, scan speed and applied voltage was analyzed. The surface oxide layer was stripped using a buffered oxide etch. Ohmic contacts were created by applying silver paste on the silicon substrate back face. LAO was performed at approximately 70% humidity. The oxide thickness increased with increasing the load force, the voltage, and reducing the scan speed. We confirmed that LAO/AFM can be used to create both lateral and, to some extent, vertical shapes and patterns, as previously shown in the literature.

• Proceedings of the Korean Magnestics Society Conference
• /
• 2003.12a
• /
• pp.113-113
• /
• 2003

• Proceedings of the Korean Magnestics Society Conference
• /
• 2003.12a
• /
• pp.72-72
• /
• 2003

• Proceedings of the Optical Society of Korea Conference
• /
• 2005.07a
• /
• pp.56-57
• /
• 2005

We have studied on the SLDs utilizing InAs chirped QD structure. The output power and spectral bandwidth are obtained as CW 40 mW at RT and about 100 nm, respectively. More high performance of SLD can be possible with optimized design for the chirped QD structures.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2002.02a
• /
• pp.110-110
• /
• 2002

• Proceedings of the Korean Magnestics Society Conference
• /
• 2005.12a
• /
• pp.206-207
• /
• 2005

• Proceedings of the Korean Magnestics Society Conference
• /
• 2008.12a
• /
• pp.199.1-199.1
• /
• 2008

• Proceedings of the KIEE Conference
• /
• 2003.10a
• /
• pp.273-275
• /
• 2003

본 실험은 고출력 반도체 레이저의 p-side-down 마운팅용 솔더로서 AuSn 합금 솔더(80wt%:20wt%)의 적합성에 대해 연구하였다. $1{\mu}m$이하의 균일도로 폴리싱 된 Cu heat sink의 표면에 두께 $1{\mu}m$의 Ni로 코팅을 한다음, AuSn 다층박막은 e-beam 증착기로 AuSn 합금 솔더는 열증착기로 각각 증착하였다. 열처리는 산화 방지를 위해 $N_2$ 분위기에서 행하였으며, 동일한 압력으로 마운팅을 하였다. 표면의 거칠기와 형상은 AFM(Atomic Force Microscope)과 SEM(Scanning Electron Microscopy)으로 그리고 Au와 Sn의 성분비는 AES(Auger Electron Spectroscopy) 로 비교하였다. 또한 CW(연속발진)을 통한 L-I(Light-Current)측정을 통해 본딩상태를 비교하였다.

• Bulletin of the Korean Chemical Society
• /
• v.27 no.4
• /
• pp.479-483
• /
• 2006

We developed a microfluidic immunoassay platform for the detection of various analytes such as bacterial pathogen by packing antibody-immobilized glass beads in spatially-isolated microchambers on a microfluidic device. Primary amines of antibody were covalently conjugated to carboxyl-terminated glass beads previously treated with aminosilane followed by glutaraldehyde. Through this covalent binding, up to 905 $\mu$g immunoglobulin G (IgG) per gram of glass beads was immobilized. For application, glass beads attaching antibody specific to Escherichia coli O157:H7, a foodborne pathogen, were packed into a microfluidic device and used for the detection of the serotype. This prototype immunoassay device can be used for the simultaneous detection of multiple analytes by sequentially packing different-sized glass beads attaching different antibody in discrete microchambers on a single microfluidic device.

• Proceedings of the Korean Magnestics Society Conference
• /
• 2005.06a
• /
• pp.24-25
• /
• 2005