Influence of Oxide Fabricated by Local Anodic Oxidation in Silicon |
Jung, Seung-Woo
(Semiconductor Nano Device Laboratory, Department of Electronic Materials Engineering, Kwang-woon University)
Byun, Dong-Wook (Semiconductor Nano Device Laboratory, Department of Electronic Materials Engineering, Kwang-woon University) Shin, Myeong-Cheol (Semiconductor Nano Device Laboratory, Department of Electronic Materials Engineering, Kwang-woon University) Schweitz, Michael A. (Semiconductor Nano Device Laboratory, Department of Electronic Materials Engineering, Kwang-woon University) Koo, Sang-Mo (Semiconductor Nano Device Laboratory, Department of Electronic Materials Engineering, Kwang-woon University) |
1 | J. H. Lee, J. J. Ahn, and S. M. Koo, J. Korean Inst. Electr. Electron. Mater. Eng., 25, 294 (2012). [DOI: https://doi.org/10.4313/JKEM.2012.25.4.294] DOI |
2 | X. Jiang, G. Wu, J. Zhou, S. Wang, A. A. Tseng, and Z. Du, Nanoscale Res. Lett., 6, 518 (2011). [DOI: https://doi.org/10.1186/1556-276X-6-518] DOI |
3 | M.G.Z. Khorasani, D. Silbernagl, D. Platz, and H. Sturm, Polymers, 11, 235 (2019). [DOI: https://doi.org/10.3390/polym11020235] DOI |
4 | M. Salerno and S. Dante, Materials, 11, 951 (2018). [DOI: https://doi.org/10.3390/ma11060951] DOI |
5 | X. Wang, B. Theogene, H. Mei, J. Zhang, C. Huang, X. Ren, and M. Xu, Ferroelectrics, 549, 70 (2019). [DOI: https://doi.org/10.1080/00150193.2019.1592545] DOI |
6 | A. J. Ulrich and A. D. Radadia, Nanotechnology, 26, 465201 (2015). [DOI: https://doi.org/10.1088/0957-4484/26/46/465201] DOI |