SUBSTRATE BIASED PLASMA ETCHING TECHNIQUE FOR FABRICATION OF SPINTRONIC DEVICES

  • Lee K. I, (Department of Materials Science and Engineering, Yonsei University) ;
  • Shim W. Y (Department of Materials Science and Engineering, Yonsei University) ;
  • Chang J. Y. (Nano Device Research Center, Korea Institute of Science and Technology) ;
  • Han S, H. (Nano Device Research Center, Korea Institute of Science and Technology) ;
  • Shim K. H. (Nano Device Research Center, Korea Institute of Science and Technology) ;
  • Lee W. Y. (Department of Materials Science and Engineering, Yonsei University)
  • Published : 2005.12.01