• Title/Summary/Keyword: multilayer deposition

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Fabrication of Micro Solid Oxide Fuel Cell by Thin Film Processing Hybridization: I. Multilayer Structure of Sputtered YSZ Thin Film Electrolyte and Ni-Based Anodes deposited by Spray Pyrolysis (박막공정의 융합화를 통한 초소형 고체산화물 연료전지의 제작: I. Spray Pyrolysis법으로 증착된 Ni 기반 음극과 스퍼터링으로 증착된 YSZ 전해질의 다층구조)

  • Son, Ji-Won;Kim, Hyoung-Chul;Kim, Hae-Ryoung;Lee, Jong-Ho;Lee, Hae-Weon;Bieberle-Hutter, A.;Rupp, J.L.M.;Muecke, U.P.;Beckel, D.;Gauckler, L.J.
    • Journal of the Korean Ceramic Society
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    • v.44 no.10
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    • pp.589-595
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    • 2007
  • Physical properties of sputtered YSZ thin film electrolytes on anode thin film by spray pyrolisis has been investigated to realize the porous electrode and dense electrolyte multilayer structure for micro solid oxide fuel cells. It is shown that for better crystallinity and density, YSZ need to be deposited at an elevated temperature. However, if pure NiO anode was used for high temperature deposition, massive defects such as spalling and delamination were induced due to high thermal expansion mismatch. By changing anode to NiOCGO composite, defects were significantly reduced even at high deposition temperature. Further research on realization of full cells by processing hybridization and cell performance characterization will be performed in near future.

The Study of Steering Effect in Multilayer Growth (두꺼운 박막 성장시 Steering 효과 연구)

  • Seo J.;Kim J.S.
    • Journal of the Korean Vacuum Society
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    • v.15 no.4
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    • pp.410-420
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    • 2006
  • The dynamic effects, such as the steering and the screening effects during deposition on an epitaxial growth is studied by kinetic Monte Carlo simulation. In the simulation, we incorporates molecular dynamic simulation to rigorously take the interaction of the deposited atom with the substrate atoms into account, We find three characteristic features of the surface morphology developed by grazing angle deposition: (1) enhanced surface roughness, (2) asymmetric mound, and (3) asymmetric slopes of mound sides, Regarding their dependence on both deposition angle and substrate temperature, a reasonable agreement of the simulated results with the previous experimental ones is found. The characteristic growth features by grazing angle deposition are mainly caused by the inhomogeneous deposition flux due to the steering and screening effects, where the steering effects play the major role rather than the screening effects. Newly observed in the present simulation is that the side of mound in each direction is composed of various facets instead of all being in one selected mound angle even if the slope selection is attained, and that the slope selection does not necessarily mean the facet selection.

Characterization of Si/Mo Multilayer Anode for Microbattery (박막전지용 Si/Mo 다층박막 음극의 전기화학적 특성)

  • 이기령;정주영;문희수;이승원;이유기;박종완
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.209-209
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    • 2003
  • The adventages of Li alloys have attracted the attention of many research groups, many of which have investigated tin-based alloys [1-2], Despite interesting performances of these, the irreversible capacity loss systematically observed on the first cycle for these compounds is a main drawback for their use as anode materials in lithium ion cells. Not only Sn is efficient in forming alloys with Li, Si can also react with Li to form alloys with a high Li/Si ratio, like Li$\_$22/Si$\_$5/ at 400$^{\circ}C$. It corresponds to a capacity of 4200mAh/g. Electrochemical Li-Si reaction occurs between 0 and 0.3 V against Li/Li$\^$+/, so that high-energy density battery can be realized. Despite the high theoretical capacity of elements like Si, however, particles of the alloys crack and fragment due to the repeated alloying and do-alloying which occurs as cell are charged and discharged. The research groups of Muggins [3] and Besenhard [4] have proposed that the volume expansion due to the insertion of Li can be reduced in micro- and submicro-structured matrix alloys. For this reason, the research group of J.R. Dahn investigated Sn/Mo sequential sputter deposition to prepare nanocomposites [5]. In this study, we investigated the characterization and the electrochemical characteristics of sequentially sputtered Si/Mo multilayer for microbattery anode.

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Soft Lithographic Patterning Method for Flexible Graphene-based Chemical Sensors with Heaters

  • Kang, Min-a;Jung, Min Wook;Myung, Sung;Song, Wooseok;Lee, Sun Suk;Lim, Jongsun;Park, Chong-Yun;An, Ki-Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.176.2-176.2
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    • 2014
  • In this work, we demonstrated that the fabrication of flexible graphene-based chemical sensor with heaters by soft lithographic patterning method [1]. First, monolayer and multilayer graphene were prepared by thermal chemical vapor deposition transferred onto SiO2 / Si substrate in order to fabrication of patterned-sensor and -heater. Second, patterned-monolayer and multilayer graphene were detached through soft lithography process, which was transferred on top and bottom sides of PET film. Third, Au / Ti (Thickness : 100/30 nm) electrodes were deposited end of the patterned-graphene line by sputtering system. Finally, we measured sensor properties through injection of NO2 and CO2 gas on different temperature with voltage change of graphene heater.

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Measurement of Adhesion Strength and Nanoindentation of Metal Interconnections of Al/Ni and TiW/Ni Layers Formed on Glass Substrate (유리기판 위에 형성된 Al/Ni 및 TiW/Ni 다층 금속배선막의 계면 접합력 및 나노압입특성 평가)

  • Joe, Chul Min;Kim, Jae Ho;Hwang, So Ri;Yun, Yeo Hyeon;Oh, Yong Jun
    • Korean Journal of Metals and Materials
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    • v.48 no.12
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    • pp.1116-1122
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    • 2010
  • Metal interconnections of multilayer Al/Ni and TiW/seed-Ni/Ni were formed on glass, and the adhesion strength and nanoindentation response of the composite layers were evaluated. The Al/Ni multilayer was formed by an anodic bonding of glass to Al and subsequent electroless plating of Ni, while the TiW/Ni multilayer was fabricated by sputter deposition of TiW and seed-Ni onto glass and electroless plating of Ni. Because of the diffusion of aluminum into glass during the anodic bonding, anodically bonded glass/Al joint exhibited greater interfacial strength than the sputtered glass/TiW one. The Al/Ni on glass also showed excellent resistance against delamination by bending deformation compared to the TiW/seed-Ni/Ni on glass. From the nanoindentation experiment of each metal layer on glass, it was found that the aluminum layer had extremely low hardness and elastic modulus similar to the glass substrate and played a beneficial role in the delamination resistance by lessening stress intensification at the joint. The indentation data of the multilayers also supported superior joint reliability of the Al/Ni to glass compared to that of the TiW/seed-Ni/Ni to glass.

Effects of Substrates on Nanofiltration Characteristics of Multilayer Polyelectrolyte Membranes (다층 고분자 전해질 막의 나노여과 특성에 미치는 지지체의 영향)

  • Hong, Seong-Uk
    • Membrane Journal
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    • v.18 no.2
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    • pp.185-190
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    • 2008
  • In a previous study, we probed the potential of poly(styrene sulfonate) (PSS)/poly(diallyldimethylammonium chloride) (PDADMAC) nanofiltration (NF) membranes for the separation of monovalent anions, with an emphasis on the selective rejection of $F^-$. Remarkably, deposition of $(PSS/PBADMAC)_4PSS$ films on porous alumina supports yielded membranes that exhibited $Cl^-/F^-$ selectivity > 3 with minimal $Cl^-$ rejection, and a solution flux of $3.5m^3/m^2$-day at 4.8 bar. When the number of PSS/PDADMAC bilayers was increased from 4.5 to 5.5, however, $F^-$ rejection decreased from 73% to 50% and $Cl^-/F^-$ selectivity dropped to 1.9. Addition of another bilayer to form $(PSS/PDADMAC)_6$ PSS films resulted in a significant increase in $Cl^-$ rejection to give essentially no $Cl^-/F^-$ selectivity. The decrease of selectivity with deposition of more than 4.5 bilayers was not expected and it was unclear whether this characteristic was substrate independent. In this study, to investigate the effect of substrates on NF performance of multilayer polyelectrolyte membranes, PSS/PDADMAC films were deposited on 50 kDa polyethersulfone (PES) ultrafiltration supports instead of porous alumina supports. The results indicate that, although fluoride rejection and the number of bilayers at which a maximum $F^-$ rejection occurs are different, the trend is similar for both types of substrates. Therefore, we can conclude that the M: characteristics of multilayer polyelectrolyte membranes may be substrate independent.

Anisotropy Effect of Exchange Bias Coupling by Unidirectional Deposition Field of NiFe/FeMn Bilayer (NiFe/FeMn 이중박막의 증착시 자기장에 의한 교환결합력 이방성 효과)

  • Park, Young-Seok;Hwang, Do-Guwn;Lee, Sang-Suk
    • Journal of the Korean Magnetics Society
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    • v.18 no.5
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    • pp.180-184
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    • 2008
  • The relation of ferromagnet anisotropic magnetization and the antiferromagnet atomic spin configuration has been investigated for variously angles of unidirectional deposition magnetic field of FeMn layer in Corning glas/Ta(5 nm)/NiFe(7 nm)/FeMn(25 nm)/ Ta(5 nm) multilayer prepared by ion beam deposition. Three unidirectional deposition angles of FeMn layer are $0^{\circ},\;45^{\circ}$, and $90^{\circ}$, respectively. The exchange bias field ($H_{ex}$) obtained from the measuring easy axis MR loop was decreased to 40 Oe in deposition angle of $45^{\circ}$, and to 0 Oe in the angle of $90^{\circ}$. One other side hand, $H_{ex}$ obtained from the measuring hard axis MR loop was increased to 35 Oe in deposition angle of $45^{\circ}$, and to 79 Oe in the angle of $90^{\circ}$. Although the difference of uniderectional axis between ferromagnet NiFe and antiferromagnet FeMn was 90o, the strong antiferromagnetic dipole moment of FeMn caused to rotate the weak ferromagnetic dipole moment of NiFe in the interface. This result implies that one of origins for exchange coupling mechanism depends on the effect of magnetic field angle during deposition of antiferromgnet FeMn layer.

Synthesis of Three-Dimensional Graphene Using Porous Nickel Nanostructure (다공성 니켈 나노 구조체를 이용한 3차원 그래핀의 합성)

  • Song, Wooseok;Myung, Sung;Lee, Sun Sook;Lim, Jongsun;An, Ki-Seok
    • Composites Research
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    • v.29 no.4
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    • pp.151-155
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    • 2016
  • Graphene has been a valuable candidate for use as electrodes for supercapacitors. In order to improve the surface area of graphene, three-dimensional graphene was synthesized on porous Ni nanostructure using thermal chemical vapor deposition and microwave plasma chemical vapor deposition. The structural and chemical characterization of synthesized graphene was performed by scanning electron microscopy, Raman spectroscopy, and X-ray photoelectron spectroscopy. It was confirmed that three-dimensional and high-crystalline multilayer graphene onto various substrates was synthesized successfully.

Development of Cr cold spray-coated fuel cladding with enhanced accident tolerance

  • Sevecek, Martin;Gurgen, Anil;Seshadri, Arunkumar;Che, Yifeng;Wagih, Malik;Phillips, Bren;Champagne, Victor;Shirvan, Koroush
    • Nuclear Engineering and Technology
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    • v.50 no.2
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    • pp.229-236
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    • 2018
  • Accident-tolerant fuels (ATFs) are currently of high interest to researchers in the nuclear industry and in governmental and international organizations. One widely studied accident-tolerant fuel concept is multilayer cladding (also known as coated cladding). This concept is based on a traditional Zr-based alloy (Zircaloy-4, M5, E110, ZIRLO etc.) serving as a substrate. Different protective materials are applied to the substrate surface by various techniques, thus enhancing the accident tolerance of the fuel. This study focuses on the results of testing of Zircaloy-4 coated with pure chromium metal using the cold spray (CS) technique. In comparison with other deposition methods, e.g., Physical vapor deposition (PVD), laser coating, or Chemical vapor deposition techniques (CVD), the CS technique is more cost efficient due to lower energy consumption and high deposition rates, making it more suitable for industry-scale production. The Cr-coated samples were tested at different conditions ($500^{\circ}C$ steam, $1200^{\circ}C$ steam, and Pressurized water reactor (PWR) pressurization test) and were precharacterized and postcharacterized by various techniques, such as scanning electron microscopy, Energy-dispersive X-ray spectroscopy (EDX), or nanoindentation; results are discussed. Results of the steady-state fuel performance simulations using the Bison code predicted the concept's feasibility. It is concluded that CS Cr coating has high potential benefits but requires further optimization and out-of-pile and in-pile testing.

High-temperature Oxidation of Nano-multilayered TiAlSiN Filems (나노 다층 TiAlSiN 박막의 고온 산화)

  • Lee, Dong-Bok;Kim, Min-Jeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2016.11a
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    • pp.189-189
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    • 2016
  • In this study, the Al-rich AlTiSiN thin films that consisted of TiN/AlSiN nano-multilayers were deposited on the steel substrate by magnetron sputtering, and their high-temperature oxidation behavior was investigated, which has not yet been adequately studied to date. Since the oxidation behavior of the films depends sensitively on the deposition method and deposition parameters which affect their crystallinity, composition, stoichiometry, thickness, surface roughness, grain size and orientation, the oxidation studies under various conditions are imperative. AlTiSiN nano-multilayer thin films were deposited on a tool steel substrate, and their oxidation behavior of was investigated between 600 and $1000^{\circ}C$ in air. Since the amount of Al which had a high affinity for oxygen was the largest in the film, an ${\alpha}-Al_2O_3-rich$ scale formed, which provided good oxidation resistance. The outer surface scale consisted of ${\alpha}-Al_2O_3$ incoporated with a small amount of Ti, Si, and Fe. Below this outer surface scale, a thin ($Al_2O_3$, $TiO_2$, $SiO_2$)-intermixed scale formed by the inwardly diffusing oxygen. The film oxidized slower than the $TiO_2-forming$ kinetics and TiN films, but faster than ${\alpha}-Al_2O_3-forming$ kinetics. During oxidation, oxygen from the atmosphere diffused inwardly toward the reaction front, whereas nitrogen and the substrate element of iron diffused outwardly to a certain extent.

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