Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Soft Lithographic Patterning Method for Flexible Graphene-based Chemical Sensors with Heaters

  • Kang, Min-a (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
  • Jung, Min Wook (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
  • Myung, Sung (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
  • Song, Wooseok (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
  • Lee, Sun Suk (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
  • Lim, Jongsun (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
  • Park, Chong-Yun (Department of Physics, Sungkyunkwan University) ;
  • An, Ki-Seok (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology)
  • Published : 2014.02.10
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Abstract

In this work, we demonstrated that the fabrication of flexible graphene-based chemical sensor with heaters by soft lithographic patterning method [1]. First, monolayer and multilayer graphene were prepared by thermal chemical vapor deposition transferred onto SiO2 / Si substrate in order to fabrication of patterned-sensor and -heater. Second, patterned-monolayer and multilayer graphene were detached through soft lithography process, which was transferred on top and bottom sides of PET film. Third, Au / Ti (Thickness : 100/30 nm) electrodes were deposited end of the patterned-graphene line by sputtering system. Finally, we measured sensor properties through injection of NO2 and CO2 gas on different temperature with voltage change of graphene heater.

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