Measurement of Adhesion Strength and Nanoindentation of Metal Interconnections of Al/Ni and TiW/Ni Layers Formed on Glass Substrate
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Joe, Chul Min
(Dept. of Mat. Sci. & Eng., Hanbat National University)
Kim, Jae Ho (Dept. of Mat. Sci. & Eng., Hanbat National University) Hwang, So Ri (Dept. of Mat. Sci. & Eng., Hanbat National University) Yun, Yeo Hyeon (Dept. of Mat. Sci. & Eng., Hanbat National University) Oh, Yong Jun (Dept. of Mat. Sci. & Eng., Hanbat National University) |
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