• Title/Summary/Keyword: multi-layer structure

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Conversion from SIMS depth profiling to compositional depth profiling of multi-layer films

  • Jang, Jong-Shik;Hwang, Hye-Hyen;Kang, Hee-Jae;Kim, Kyung-Joong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.347-347
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    • 2011
  • Secondary ion mass spectrometry (SIMS) was fascinated by a quantitative analysis and a depth profiling and it was convinced of a in-depth analysis of multi-layer films. Precision determination of the interfaces of multi-layer films is important for conversion from the original SIMS depth profiling to the compositional depth profiling and the investigation of structure of multi-layer films. However, the determining of the interface between two kinds of species of the SIMS depth profile is distorted from original structure by the several effects due to sputtering with energetic ions. In this study, the feasibility of 50 atomic % definition for the determination of interface between two kinds of species in SIMS depth profiling of multilayer films was investigated by Si/Ge and Ti/Si multi-layer films. The original SIMS depth profiles were converted into compositional depth profiles by the relative sensitivity factors from Si-Ge and Si-Ti alloy reference films. The atomic compositions of Si-Ge and Si-Ti alloy films determined by Rutherford backscattering spectroscopy (RBS).

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A Behavior of the Wet Etching of CoNbZr/Cu/CoNbZr Multi-Layer Films (CoNbZr/Cu/CoNbZr 다층막의 습식 식각 거동)

  • 김현식;이영생;송재성;오영두;윤재홍
    • Electrical & Electronic Materials
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    • v.10 no.7
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    • pp.645-650
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    • 1997
  • We manufactured CoNbZr/Cu/CoNbZr multi-layer films by rf magnetron sputtering methods and formed the patterns on the deposited multi-layer films. In this study, we fabricated a new etchant for forming the patterns by the wet etching with etchant and we searched for the best etching conditions and the etchant composition. Cu was etched selectively independent on the concentration of iron chloride solution, but amorphous CoNbZr thin film did not. The etchant was achieved by iron chloride solution(17.5 mol%) mixed with HF (20 mol%) during 150 sec, which etched CoNbZr/Cu/CoNbZr multi-layer films at the same time. Also, the etchant etched CoNbZr/Cu/CoNbZr multi-layer films by the three-step. It was shown that the cross-section had the isotropic structure and excellent etching characteristics with the above etchant.

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Efficient Signal Integrity Verification in Complicated Multi-Layer VLSI Interconnects (복잡한 다층 VLSI 배선구조에서의 효율적인 신호 무결성 검증 방법)

  • Jin, U-Jin;Eo, Yun-Seon;Sim, Jong-In
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.39 no.3
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    • pp.73-84
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    • 2002
  • Fast and accurate new capacitance determination methodology for non-uniform complicated multi-layer VLSI interconnects is presented. Since a capacitance determination of intricate multi-layer interconnects using 3-dimensional field-solver is not practical, quasi-3-dimensional methodology is presented. Interconnects with discontinuity (i.e., bend structure and different spacing between lines, etc.) are partitioned. Then, each partial capacitance of divided parts is extracted by using 2-dimensional extraction methodology. For a multi-layer interconnects with shielding layer, the system can be simplified by investigating a distribution of charge in it. Thereby, quasi-3-dimensional capacitance for multi-layer interconnects can be determined by combining solid-ground based 2-dimensional capacitance and shielding effect which is independently determined with layout dimensions. This methodology for complicated multi-layer interconnects is more accurate and cost-efficient than conventional 3-dimensional methodology It is shown that the quasi-3-dimensional capacitance methodology has excellent agreement with 3-dimensional field- solver-based results within 5% error.

A Study of Robust Vibration Control for a Multi-Layer Structure (다층상구조물의 강인 진동제어에 관한 연구)

  • Kim, Chang-Hwa;Jung, Byung-Gun;Jung, Hae-Jong
    • Journal of Advanced Marine Engineering and Technology
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    • v.33 no.8
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    • pp.1212-1219
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    • 2009
  • In this paper, a state feedback gain controller using linear matrix inequality(LMI) for the multi-objective synthesis is designed, in the multi-layer structure with integral type servo system. The design objectives include $H_{\infty}$ performance, asymptotic disturbance rejection, time-domain constraints, on the closed-loop pole location. The results of computer simulation show the validity of the designed controller.

Fabrication of phosphorus doped ZnO thin film using multi-layer structure (다층 구조를 이용한 Phosphorus 도핑된 ZnO 박막 제작)

  • Kang, Hong-Seong;Lim, Sung-Hoon;Chang, Hyun-Woo;Kim, Gun-Hee;Kim, Jong-Hoon;Lee, Sang-Yeol
    • Proceedings of the KIEE Conference
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    • 2005.11a
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    • pp.27-29
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    • 2005
  • ZnO and phosphorus doped ZnO thin films (ZnO:P) are deposited by pulsed laser deposition grown on (001) $Al_{2}O_{3}$. ZnO/ZnO:P/ZnO/$Al_{2}O_{3}$ (multi-layer) structure was used for phosphorus doped ZnO fabrication. This multi-layer structure thin film was annealed at $400^{\circ}C$ for 40 min. The electron concentration of that was changed from $10^{19}$ to $10^{16}/cm^{-3}$ after annealing. ZnO thin films with encapsulated structure showed the enhanced structural and optical properties than phosphorus doped ZnO without encapsulated layer. In this study, encapsulated ZnO structure was suggested to enhance electrical, structural and optical properties of phosphorus doped ZnO thin film and it was identified that encapsulated structure could be used to fabricate high quality phosphorus doped ZnO thin film.

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A Study on Vibration Control of Multi-layer Structure by $H_{\infty}$ Control ($H_{\infty}$ 제어기법에 의한 다층 층상 구조물의 진동제어에 관한 연구)

  • 정해종;김창화;변정환;양주호
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 1997.04a
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    • pp.293-300
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    • 1997
  • This paper is concerned with the vibration control of multi-layer structure for ultra-tall buildings and main tower of large bridge etc. We have modeled the multi-layer structure with the distributed mass system as the lumped mass system of two-degree-of-freedom structure and made experimental equipment. The H$_{\infty}$ control theory is applied to the design of the control system. The designed control system is simulated by computer. As a result, the designed H$_{\infty}$ controller showed good vibration control performance to impact excitation and the good frequency response.e.

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A Study on Electric Characteristics of Multi-layer by Light Organic Emitting Diode (유기발광소자(Organic Light Emitting Diode)의 다층박막에 대한 전기적 특성 연구)

  • Lee Jung-Ho
    • Journal of Korea Society of Industrial Information Systems
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    • v.10 no.2
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    • pp.76-81
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    • 2005
  • This research approached electrical characteristics of organic light emitting diodes getting into the spotlight by next generation display device. Basic mechanism of OLED's emitting is known as that electron by cathode of lower work function and hole by anode of higher work function are driven and recombine exciton-state being flowed in emitting material layer passing carrier transport layer In order to make many electron-hole pairs, we must manufacture device in multi-layer structure. There are Carrier Injection Layer(CIL), Carrier Transport Layer(CTL) and Emitting Material Layer(EML) in multi-layer structure. It is important that regulate thickness of layer for high luminescence efficiency and set mobility of hole and electron.

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Analysis of Wear Properties for $Ni_{3}Al$ Layer coated on Ferrous Materials by Diffusion Treatment after Combustion Synthesis at low Temperature (저온 연소합성 후 확산 열처리한 $Ni_{3}Al$ 금속간화합물 코팅층의 미끄럼 마모거동)

  • Lee, Han-Young
    • Tribology and Lubricants
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    • v.25 no.1
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    • pp.7-12
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    • 2009
  • Coating brittle intermetallic compounds on metal can enlarge the range of their use. It is found that intermetallic compound coating layers made by only combustion synthesis in an electric furnace have porous multi-phase structures containing several intermediate phases, even though the coating layers show good wear resistance. In this study, dense $Ni_{3}Al$ single phase layer corresponding to the initial composition of the mixed powder is coated on two different ferrous materials by the diffusing treatment after combustion synthesis. After- ward, sliding wear behaviors of the coating layer are evaluated in comparison with that of the coating layer with porous multi-phase structure made by only combustion synthesis. As a result, the wear properties of the coating layer composed of dense $Ni_{3}Al$ single phase are considerably improved at the range of low sliding speed com- pared with that of the coating layer with porous multi-phase structure, particularly in the running-in wear region. This is attributed to the fact that wear of the coating layer is progressed by shearing as a sequence of adhesion, not by occurring of pitting on the worn surface due to having dense structure without pores.

Multi-layer Structure Method for Manufacturing SiOB with Low Capacitance (낮은 정전용량을 가진 실리콘 광학벤치를 제작하기 위한 적층구조 방법)

  • 김유식;이중희;박문규;장동훈;김태일
    • Proceedings of the Optical Society of Korea Conference
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    • 2003.02a
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    • pp.300-301
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    • 2003
  • As the demand for high frequency(bandwidth) optical module is increased, there is a need for fabricating silicon optical bench(SiOB) with low parasitic impedance. In this paper, we discuss multi-layer structure method for manufacturing SiOB with low capacitance. This structure method decreases the capacitance between the conductive patterns for about 94∼97% compared to the conventional structure without raising the resistivity of silicon, or increasing the thickness of the dielectric film.

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Effect of Fines Distribution on Press Dewatering and Physical Properties of Multi-ply Sheet

  • Lee, Hak-Lae;Youn, Hye-Jung;Kang, Tae-Young;Choi, Ik-Sun
    • Journal of Korea Technical Association of The Pulp and Paper Industry
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    • v.40 no.5
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    • pp.36-41
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    • 2008
  • Multi-ply sheet forming has many advantages including the possibility of using wide range of materials in a given structure, lowering production cost, making higher grammage products and so on. But, incorrect structure of sheet makes flow resistance higher so that it shows poor dewatering in press section. One of major factors that affect sheet structure and dewatering property is fines content in each layer. We, therefore, examined the press dewatering of multi-ply sheet that has the different fines content in each layer and the effect of fines distribution on physical properties of sheet to find a technology for optimum utilization of raw materials. In case of two layered sheet, the sheet which was composed of layers with the different flow resistance showed higher dewatering rate than one which has the same flow resistance. And the more difference in fines content for layers existed, the more dewatering occurred. For three layered sheets, dewatering is mainly dependent on fines content of bottom layer. Strength properties were affected by dewatering degree and multi-ply sheet structure.