• Journal of the Semiconductor & Display Technology
• /
• v.21 no.1
• /
• pp.17-21
• /
• 2022

In the case of the manufacturing industry that produces high-tech components such as semiconductors and large flat panel displays, the manufacturing space is made into a cleanroom to increase product yield and reliability, and various environmental factors have been managed to maintain the environment. Among them, airborne particle is a representative management item enough to be the standard for actual cleanroom grade, and a sequential particle monitoring system is usually used as one parts of the FMS (Fab or Facility monitoring system). However, this method has a problem in that the measurement efficiency decreases as the length of the sampling tube increases. In this study, in order to solve this problem, a multiple regression model was created. This model can correct the measurement error due to the decrease in efficiency by sampling tube length.

• 제어로봇시스템학회:학술대회논문집
• /
• 2003.10a
• /
• pp.1196-1200
• /
• 2003

The degree of supersaturation is an important measure for the operation of crystallization processes, because it is directly related to the control of crystal size distribution and shape. A conventional technique utilizing solution composition and temperature has a variety of problems caused from the measurement error and the handling of analyzing samples. A monitoring system of the supersaturation using a quartz crystal sensor is proposed here, and its performance is examined applying different manipulations of coolant temperature. The experimental outcome and photographic examination indicate that the measurements of resonant frequency and resistance of the sensor can be used for the prediction of the formation and growth of solid crystal from the crystallization process. The monitoring system eliminates the intrinsic error source of the conventional system to give the improved measurement and on-line application availability.

• Smart Structures and Systems
• /
• v.17 no.6
• /
• pp.935-956
• /
• 2016

With the help of advanced image acquisition and processing technology, the vision-based measurement methods have been broadly applied to implement the structural monitoring and condition identification of civil engineering structures. Many noncontact approaches enabled by different digital image processing algorithms are developed to overcome the problems in conventional structural dynamic displacement measurement. This paper presents three kinds of image processing algorithms for structural dynamic displacement measurement, i.e., the grayscale pattern matching (GPM) algorithm, the color pattern matching (CPM) algorithm, and the mean shift tracking (MST) algorithm. A vision-based system programmed with the three image processing algorithms is developed for multi-point structural dynamic displacement measurement. The dynamic displacement time histories of multiple vision points are simultaneously measured by the vision-based system and the magnetostrictive displacement sensor (MDS) during the laboratory shaking table tests of a three-story steel frame model. The comparative analysis results indicate that the developed vision-based system exhibits excellent performance in structural dynamic displacement measurement by use of the three different image processing algorithms. The field application experiments are also carried out on an arch bridge for the measurement of displacement influence lines during the loading tests to validate the effectiveness of the vision-based system.

• Smart Structures and Systems
• /
• v.13 no.6
• /
• pp.927-942
• /
• 2014

Structural displacement is an important indicator for assessing structural safety. For structural displacement monitoring, vision-based displacement measurement systems have been widely developed; however, most systems estimate only 1 or 2-DOF translational displacement. To monitor the 6-DOF structural displacement with high accuracy, a vision-based displacement measurement system with a uniquely designed marker is proposed in this paper. The system is composed of a uniquely designed marker and a camera with a zooming capability, and relative translational and rotational displacement between the marker and the camera is estimated by finding a homography transformation. The novel marker is designed to make the system robust to measurement noise based on a sensitivity analysis of the conventional marker and it has been verified through Monte Carlo simulation results. The performance of the displacement estimation has been verified through two kinds of experimental tests; using a shaking table and a motorized stage. The results show that the system estimates the structural 6-DOF displacement, especially the translational displacement in Z-axis, with high accuracy in real time and is robust to measurement noise.

• 제어로봇시스템학회:학술대회논문집
• /
• 2004.08a
• /
• pp.1659-1661
• /
• 2004

Measurement of supersaturation is important in crystallization processes, because it is one of key factors to control crystal size distribution and shape determining product quality. A monitoring system of the supersaturation using a quartz crystal sensor is applied to the supersaturation measurement. From the variation of resonant frequency, the beginning of the formation of salt crystal on the sensor surface is detected while the sensor is directly cooled down. The degree of supersaturation is computed from the solubility difference at the temperatures of the salt solution and the sensor. The performance of the propsed system of the supersaturation measurement is examined by applying the system to the crystallization of three different salt solutions. The experimental outcome compared with eye observation result and photographic analysis indicates that the proposed system is effective and useful to determine the supersaturation in the crystallization process. In addition, the microscopic monitoring of the initial stage crystallization is available with the sensor system.

• Proceedings of the IEEK Conference
• /
• 2001.06e
• /
• pp.81-84
• /
• 2001

This paper presents a potable bio-signal measurement system using Bluetooth for the 24-hours continuous health state monitoring of the elderly and the disabled. The measurement system has the functions of acquisition of various bio-signals, wireless data transmission and adjustment of parameters such as gain and cut-off frequency. This measurement system is designed according to the international specifications of the recommendation of AAMI (Association for the Advancement of Medical Instrumentation). The design targets of the developing system about volume and power consumption are 20x30x5mm$^3$ and 8mW.

• JSTS:Journal of Semiconductor Technology and Science
• /
• v.16 no.5
• /
• pp.702-712
• /
• 2016

A wrist watch type wearable cardiovascular monitoring device is proposed for continuous and convenient monitoring of the patient's cardiovascular system. For comprehensive monitoring of the patient's cardiovascular system, the concurrent electrocardiogram (ECG) and arterial pulse wave (APW) sensor front-end are fabricated in $0.18{\mu}m$ CMOS technology. The ECG sensor frontend achieves 84.6-dB CMRR and $2.3-{\mu}Vrms$-input referred noise with $30-{\mu}W$ power consumption. The APW sensor front-end achieves $3.2-V/{\Omega}$ sensitivity with accurate bio-impedance measurement lesser than 1% error, consuming only $984-{\mu}W$. The ECG and APW sensor front-end is combined with power management unit, micro controller unit (MCU), display and Bluetooth transceiver so that concurrently measured ECG and APW can be transmitted into smartphone, showing patient's cardiovascular state in real time. In order to verify operation of the cardiovascular monitoring system, cardiovascular indicator is extracted from the healthy volunteer. As a result, 5.74 m/second-pulse wave velocity (PWV), 79.1 beats/minute-heart rate (HR) and positive slope of b-d peak-accelerated arterial pulse wave (AAPW) are achieved, showing the volunteer's healthy cardiovascular state.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
• /
• v.14 no.1
• /
• pp.35-44
• /
• 2016

Leading national R&D project to design a PWR spent nuclear fuel interim dry storage system that has been under development since mid-2009, which consists of a dual purpose metal cask and concrete storage cask. To ensure the safe operation of dry storage systems in foreign countries, major confinement monitoring techniques currently consist of pressure and temperature measurement. In the case of a dual purpose metal cask, a pressure sensor is installed in the interspace of bolted double lid(primary and secondary lid) in order to measure pressure. A concrete storage cask is a canister based system made of double/redundant welded lid to ensure confinement integrity. For this reason, confinement monitoring method is real time temperature measurement by thermocouple placed in the air flow(air intake and exit) of the concrete structure(over pack and module). The use of various monitoring technologies and operating experiences for the interim dry storage system over the last decades in foreign countries were analyzed. On the basis of the analysis above, development of the confinement monitoring technology that can be used optimally in our system will be available in the near future.

• Proceedings of the Korea Water Resources Association Conference
• /
• 2006.05a
• /
• pp.1305-1312
• /
• 2006

This study is about the development of measurement system using ubiquitous wireless communication for river flow monitoring. The system can acquire water depth, quality (temperature, pH, conductivity, turbidity etc.) while a GPS module for getting the location data of measurement points. Also this system is able to acquire the field data via RF connection and can be controlled same time. The acquired data is transmitted to a gateway system from the remote buoy using Zigbee wireless connection. And the gateway system is able to monitor the data through GIS monitoring tool. Finally the data are transmitted to a server computer using CDMA wireless connection by gateway system. The D/B of server computer are constructed automatically and monitored the project web site. The resulting system can be used for scour monitoring, environment monitoring and the other monitoring purposes such as a river flow monitoring system.

• Proceedings of the Korean Institute of Building Construction Conference
• /
• 2014.05a
• /
• pp.300-301
• /
• 2014

Measurement of beam deflection is a common procedure to determine proper behavior of the structure. Either LVDT (Linear Variable Displacement Transformer) or strain gauge is usually used in experiments. A newly developed coordinate reading measurement system can be also applied for the deflection measurements. In this study, an experimental measurement was made on a laboratory size beam specimen to examine the possibility of the use of such coordinate measurement system. Results have shown the possibility of utilizing the new system for beam deflection measurement.