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DOI
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Boo Hun Choi, Tae Han, Kim," A Study on Particulate Matter Reduction Effects of Vegetation Bio-Filters by Airflow Volume" J. of the Semiconductor & Display Technology, Vol.20(4), pp.89-95, 2021.
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PMS, "Airborne Particle Measurements: 100 LPM vs. 1 CFM Particle Counters in a Semiconductor Cleanroom Environment", PMS Application Note 211 (2020).
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7 |
PMS, "An Analysis of Acceptable Particle Losses in Transport Tubing", PMS Application Note 81 (2007).
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8 |
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