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Advancement of Sequential Particle Monitoring System  

An, Sung Jun (Department of Intelligent Systems Engineering, Cheju Halla University)
Publication Information
Journal of the Semiconductor & Display Technology / v.21, no.1, 2022 , pp. 17-21 More about this Journal
Abstract
In the case of the manufacturing industry that produces high-tech components such as semiconductors and large flat panel displays, the manufacturing space is made into a cleanroom to increase product yield and reliability, and various environmental factors have been managed to maintain the environment. Among them, airborne particle is a representative management item enough to be the standard for actual cleanroom grade, and a sequential particle monitoring system is usually used as one parts of the FMS (Fab or Facility monitoring system). However, this method has a problem in that the measurement efficiency decreases as the length of the sampling tube increases. In this study, in order to solve this problem, a multiple regression model was created. This model can correct the measurement error due to the decrease in efficiency by sampling tube length.
Keywords
FMS; Sequential particle monitoring system; Multiple linear regression; Cleanroom;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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