Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Advancement of Sequential Particle Monitoring System

측정점 교환방식 미세입자 모니터링 시스템 고도화

  • An, Sung Jun (Department of Intelligent Systems Engineering, Cheju Halla University)
  • 안성준 (제주한라대학교 지능형시스템공학과)
  • Received : 2022.01.21
  • Accepted : 2022.03.25
  • Published : 2022.03.31
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Abstract

In the case of the manufacturing industry that produces high-tech components such as semiconductors and large flat panel displays, the manufacturing space is made into a cleanroom to increase product yield and reliability, and various environmental factors have been managed to maintain the environment. Among them, airborne particle is a representative management item enough to be the standard for actual cleanroom grade, and a sequential particle monitoring system is usually used as one parts of the FMS (Fab or Facility monitoring system). However, this method has a problem in that the measurement efficiency decreases as the length of the sampling tube increases. In this study, in order to solve this problem, a multiple regression model was created. This model can correct the measurement error due to the decrease in efficiency by sampling tube length.

Keywords

References

  1. Kwang-Min Choi, Ji-Eun Lee, Kwi-Young Cho, Kwan-Sick Kim, Soo-Hun Cho, "Clean Room Structure, Air Conditioning and Contamination Control Systems in the Semiconductor Fabrication Process" J. of The Korean Society of Occupational and Environmental Hygiene, Vol. 25(2), pp. 202-210, 2015. https://doi.org/10.15269/JKSOEH.2015.25.2.202
  2. International Organization for Standardization (ISO). ISO 14644-1, Cleanrooms and associate controlled environments-Part 1: classification of air cleanliness. 1999.
  3. Seung-Ki Chae, " Particle Measurement and Analysis in Semiconductor Manufacturing Process " J. of The Korean Society of Mechanical Engineers, Vol. 39(5), pp. 398-404, 1995.
  4. PMS, "Airborne Particle Measurements: 100 LPM vs. 1 CFM Particle Counters in a Semiconductor Cleanroom Environment", PMS Application Note 211 (2020).
  5. Kim Yong-Shik, Lee Eun-Tack, Yang Gi-Young, "Development and Performance Verification of Sub-micron Particle Visualization System for the Industrial Clean Room " J. of The Architectural institute of Korea Planning & Design, Vol. 22(11), pp. 357-364, 2006.
  6. PMS, "An Analysis of Acceptable Particle Losses in Transport Tubing", PMS Application Note 81 (2007).
  7. PMS, "Particle Transportation", PMS Application Note 201 (2018).
  8. Boo Hun Choi, Tae Han, Kim," A Study on Particulate Matter Reduction Effects of Vegetation Bio-Filters by Airflow Volume" J. of the Semiconductor & Display Technology, Vol.20(4), pp.89-95, 2021.