• Title/Summary/Keyword: metal gate process

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Highly-Sensitive Gate/Body-Tied MOSFET-Type Photodetector Using Multi-Finger Structure

  • Jang, Juneyoung;Choi, Pyung;Kim, Hyeon-June;Shin, Jang-Kyoo
    • Journal of Sensor Science and Technology
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    • v.31 no.3
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    • pp.151-155
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    • 2022
  • In this paper, we present a highly-sensitive gate/body-tied (GBT) metal-oxide semiconductor field-effect transistor (MOSFET)-type photodetector using multi-finger structure whose photocurrent increases in proportion to the number of fingers. The drain current that flows through a MOSFET using multi-finger structure is proportional to the number of fingers. This study intends to confirm that the photocurrent of a GBT MOSFET-type photodetector that uses the proposed multi-finger structure is larger than the photocurrent per unit area of the existing GBT MOSFET-type photodetectors. Analysis and measurement of a GBT MOSFET-type photodetector that utilizes a multi-finger structure confirmed that photocurrent increases in ratio to the number of fingers. In addition, the characteristics of the photocurrent in relation to the optical power were measured. In order to determine the influence of the incident the wavelength of light, the photocurrent was recorded as the incident the wavelength of light varied over a range of 405 to 980 nm. A highly-sensitive GBT MOSFET-type photodetector with multi-finger structure was designed and fabricated by using the Taiwan semiconductor manufacturing company (TSMC) complementary metal-oxide-semiconductor (CMOS) 0.18 um 1-poly 6-metal process and its characteristics have been measured.

2500 fps High-Speed Binary CMOS Image Sensor Using Gate/Body-Tied Type High-Sensitivity Photodetector (Gate/Body-Tied 구조의 고감도 광검출기를 이용한 2500 fps 고속 바이너리 CMOS 이미지센서)

  • Kim, Sang-Hwan;Kwen, Hyeunwoo;Jang, Juneyoung;Kim, Young-Mo;Shin, Jang-Kyoo
    • Journal of Sensor Science and Technology
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    • v.30 no.1
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    • pp.61-65
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    • 2021
  • In this study, we propose a 2500 frame per second (fps) high-speed binary complementary metal oxide semiconductor (CMOS) image sensor using a gate/body-tied (GBT) p-channel metal oxide semiconductor field effect transistor-type high-speed photodetector. The GBT photodetector generates a photocurrent that is several hundred times larger than that of a conventional N+/P-substrate photodetector. By implementing an additional binary operation for the GBT photodetector with such high-sensitivity characteristics, a high-speed operation of approximately 2500 fps was confirmed through the output image. The circuit for binary operation was designed with a comparator and 1-bit memory. Therefore, the proposed binary CMOS image sensor does not require an additional analog-to-digital converter (ADC). The proposed 2500 fps high-speed operation binary CMOS image sensor was fabricated and measured using standard CMOS process.

EEPROM Charge Sensors (EEPROM을 이용한 전하센서)

  • Lee, Dong-Kyu;Jin, Hai-Feng;Yang, Byung-Do;Kim, Young-Suk;Lee, Hyung-Gyoo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.8
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    • pp.605-610
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    • 2010
  • The devices based on electrically erasable programmable read-only memory (EEPROM) structure are proposed for the detection of external electric charges. A large size charge contact window (CCW) extended from the floating gate is employed to immobilize external charges, and a control gate with stacked metal-insulator-metal (MIM) capacitor is adapted for a standard single polysilicon CMOS process. When positive voltage is applied to the capacitor of CCW of an n-channel EEPROM, the drain current increases due to the negative shift of its threshold voltage. Also when a pre-charged external capacitor is directly connected to the floating gate metal of CCW, the positive charges of the external capacitor make the drain current increase for n-channel, whereas the negative charges cause it to decrease. For an p-channel, however, the opposite behaviors are observed by the external voltage and charges. With the attachment of external charges to the CCW of EEPROM inverter, the characteristic inverter voltage behavior shifts from the reference curve dependent on external charge polarity. Therefore, we have demonstrated that the EEPROM inverter is capable of detecting external immobilized charges on the floating gate. and these devices are applicable to sensing the pH's or biomolecular reactions.

A Wide Dynamic Range CMOS Image Sensor Based on a Pseudo 3-Transistor Active Pixel Sensor Using Feedback Structure

  • Bae, Myunghan;Jo, Sung-Hyun;Lee, Minho;Kim, Ju-Yeong;Choi, Jinhyeon;Choi, Pyung;Shin, Jang-Kyoo
    • Journal of Sensor Science and Technology
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    • v.21 no.6
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    • pp.413-419
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    • 2012
  • A dynamic range extension technique is proposed based on a 3-transistor active pixel sensor (APS) with gate/body-tied p-channel metal oxide semiconductor field effect transistor (PMOSFET)-type photodetector using a feedback structure. The new APS consists of a pseudo 3-transistor APS and an additional gate/body-tied PMOSFET-type photodetector, and to extend the dynamic range, an NMOSFET switch is proposed. An additional detector and an NMOSFET switch are integrated into the APS to provide negative feedback. The proposed APS and pseudo 3-transistor APS were designed and fabricated using a $0.35-{\mu}m$ 2-poly 4-metal standard complementary metal oxide semiconductor (CMOS) process. Afterwards, their optical responses were measured and characterized. Although the proposed pixel size increased in comparison with the pseudo 3-transistor APS, the proposed pixel had a significantly extended dynamic range of 98 dB compared to a pseudo 3-transistor APS, which had a dynamic range of 28 dB. We present a proposed pixel that can be switched between two operating modes depending on the transfer gate voltage. The proposed pixel can be switched between two operating modes depending on the transfer gate voltage: normal mode and WDR mode. We also present an imaging system using the proposed APS.

A Study on Mechanical Properties Evaluation of Fiber-reinforced Plastic Cellular Injection-molded Specimens for the Development of High-strength Lightweight MHEV Battery Housing Molding Technology (고강성 경량 MHEV 배터리 하우징 성형기술개발을 위한 섬유강화 플라스틱 발포 사출 시험편의 기계적 물성평가에 관한 연구)

  • Eui-Chul Jeong;Yong-Dae Kim;Jeong-Won Lee;Sung-Hee Lee
    • Design & Manufacturing
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    • v.17 no.3
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    • pp.55-60
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    • 2023
  • The fiber-reinforced plastics and cellular injection molding process can be used to efficiently reduce the weight of battery housing components of mild hybrid electronic vehicles(MHEV) made of metal. However, the fiber orientation of fiber-reinforced plastics and the growth of foaming cells are intertwined during the injection molding process, so it is difficult to predict the mechanical properties of products in the design process. Therefore, it is necessary to evaluate the mechanical properties of the materials prior to the efficient stiffness design of the target product. In this study, a study was conducted to evaluated the mechanical properties of fiber reinforced cellular injection-molded specimens. Two types of fiber-reinforced plastics that can be used in the target product were evaluated for changes in tensile properties of cellular injection-molded specimens depending on the foaming ratio and position from the injection gate. The PP and PA66 specimens showed a decrease of tensile modulus and strength of approximately 30% and 17% depending on the foaming ratio, respectively. Also, the tensile strength decreased approximately 26% and 17% depending on the position from the injection gate, respectively. As a result, it was confirmed that the PP specimens have a significantly mechanical property degradation compared to the PA66 specimens depending on the foaming ratio and position.

Fabrication and Characteristics of Pd/Pt Gate MISFET Sensor for Dissolved Hydrogen in Oil (유중 용존수소 감지를 위한 Pd/Pt Gate MISFET 센서의 제조와 그 특성)

  • Baek, Tae-Sung;Lee, Jae-Gon;Choin, Sie-Young
    • Journal of Sensor Science and Technology
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    • v.5 no.4
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    • pp.41-46
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    • 1996
  • The Pd/Pt gate MISFET type hydrogen sensors, for detecting dissolved hydrogen gas in the transformer oil, were fabricated and their characteristics were investigated. These sensors including diffused resister heater and temperature monitoring diode were fabricated on the same chip by a conventional silicon process technique. The differential pair plays a role in minimizing the intrinsic voltage drift of the MISFET. To avoid the drift of the sensors induced by the hydrogen, the gate insulators of both FETs were constructed with double layers of silicon dioxide and silicon nitride. In order to eliminate the blister formation on the surface of the hydrogen sensing gate metal, Pt and Pd double metal layers were deposited on the gate insulator. The hydrogen response of the Pd/Pt gate MISFET suggests that the proposed sensor can detect the dissolved hydrogen in transformer oil with 40mV/10ppm of sensitivity and 0.14mV/day of stability.

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A SPICE-Compatible Model for a Gate/Body-Tied PMOSFET Photodetector With an Overlapping Control Gate

  • Jo, Sung-Hyun;Bae, Myunghan;Choi, Byoung-Soo;Choi, Pyung;Shin, Jang-Kyoo
    • Journal of Sensor Science and Technology
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    • v.24 no.5
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    • pp.353-357
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    • 2015
  • A new SPICE-compatible model for a gate/body-tied PMOSFET photodetector (GBT PD) with an overlapping control gate is presented. The proposed SPICE-compatible model of a GBT PD with an overlapping control gate makes it possible to control the photocurrent. Research into GBT PD modeling was proposed previously. However, the analysis and simulation of GBT PDs is not lacking. This SPICE model concurs with the measurement results, and it is simpler than previous models. The general GBT PD model is a hybrid device composed of a MOSFET, a lateral bipolar junction transistor (BJT), and a vertical BJT. Conventional SPICE models are based on complete depletion approximation, which is more applicable to reverse-biased p-n junctions; therefore, they are not appropriate for simulating circuits that are implemented with a GBT PD with an overlapping control gate. The GBT PD with an overlapping control gate can control the sensitivity of the photodetector. The proposed sensor is fabricated using a $0.35{\mu}m$ two-poly, four-metal standard complementary MOS (CMOS) process, and its characteristics are evaluated.

Improving the Whitening Phenomenon Technology for Preform PET Injection Molding by Using a Ceramic Insulation Gate (세라믹 단열 게이트를 이용한 블로우성형용 PET 프리폼의 백화현상 저감 기술)

  • Kwak, Tae-Soo;Hwang, Deok-Sang;Kang, Byung-Ook;Kim, Tae-Kyu
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.16 no.6
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    • pp.63-68
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    • 2017
  • The purpose of this study is to improve the whitening phenomenon around the PET preform gate for blow molding. CAE analysis of plastic injection molding has been applied to design of preform shape and select the injection molding conditions. A ceramic insulation gate with lower thermal conductivity than metal is applied to improve the whitening phenomenon created around the gate in the injection molding process. According to the results of CAE analysis, the warpage deformation at the square corner was estimated to be about 0.34 mm at the bottom. From the results of the temperature history analysis, it was confirmed that the resin near the gate cooled more rapidly than the cavity. Ceramic insulated gates were fabricated to reduce the cooling rate and experiments were conducted to confirm the effectiveness of the whitening phenomenon improvement. As a result of the ceramic insulation gate experiment, it was confirmed that the whitening phenomenon was significantly reduced around the gate.

Fabrication and its characteristics of $WN_x$ self-align gate GaAs LDD MESFET ($WN_x$ Self-Align Gate GaAs LDD MESFET의 제작 및 특성)

  • 문재경;김해천;곽명현;강성원;임종원;이재진
    • Journal of the Korean Vacuum Society
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    • v.8 no.4B
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    • pp.536-540
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    • 1999
  • We have developed a refractory WNx self-aligned gate GaAs metal-semiconductor field-effect transistor(MESFET) using $SiO_2$ side-wall process. The MESFET hasa fully ion-implanted, planar, symmetric self-alignment structure, and it is quite suitable for integration. The uniform trans-conductance of 354nS/mm up to Vgs=+0.6V and the saturation current of 171mA/mm were obtained. As high as 43GHz of cut-off frequency hs been realized without any de-embedding of parasitic effects. The refractory WNx self-aligned gate GaAs MESFET technology is one of the most promising candidates for realizing linear power amplifier ICs and multifunction monolithic ICs for use in the digital mobile communication systems such as hand-held phone(HHP), personal communication system (PCS) and wireless local loop(WLL).

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The performance of the Co gate electrode formed by using selectively chemical vapor deposition coupled with micro-contact printing

  • Yang, Hee-Jung;Lee, Hyun-Min;Lee, Jae-Gab
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1119-1122
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    • 2005
  • A selective deposition of Co thin films for thin film transistor gate electrode has been carried out by the growth with combination of micro-contact printing and metal organic chemical vapor deposition (MOCVD). This results in the elimination of optical lithography process. MOCVD has been employed to selectively deposit Co films on preformed OTS gate pattern by using micro-contact printing (${\mu}CP$). A hydrogenated amorphous silicon TFT with a Co gate selectively formed on SAMs patterned structure exhibited a subthreshold slope of 0.88V/dec, and mobility of $0.35cm^2/V-s$, on/off current ratio of $10^6$, and a threshold voltage of 2.5V, and thus demonstrating the successful application of the novel bottom-up approach into the fabrication of a-Si:H TFTs.

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