• Title/Summary/Keyword: intervalley phonon mobility

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Temperature Dependence of Electron Mobility in Uniaxial Strained nMOSFETs

  • Sun, Wookyung;Shin, Hyungsoon
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.14 no.2
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    • pp.146-152
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    • 2014
  • The temperature dependence of strain-enhanced electron mobility in nMOSFETs is investigated by using a self-consistent Schr$\ddot{o}$dinger-Poisson solver. The calculated results suggest that vertical compressive stress is more efficient to maintain the strain-enhanced electron mobility than longitudinal tensile stress in high temperature condition.

Substrate Doping Concentration Dependence of Electron Mobility Enhancement in Uniaxial Strained (110)/<110> nMOSFETs

  • Sun, Wookyung;Choi, Sujin;Shin, Hyungsoon
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.14 no.5
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    • pp.518-524
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    • 2014
  • The substrate doping concentration dependence of strain-enhanced electron mobility in (110)/<110> nMOSFETs is investigated by using a self-consistent Schr$\ddot{o}$dinger-Poisson solver. The electron mobility model includes Coulomb, phonon, and surface roughness scattering. The calculated results show that, in contrast to (100)/<110> case, the longitudinal tensile strain-induced electron mobility enhancement on the (110)/<110> can be increased at high substrate doping concentration.

Extraction of empirical formulas for electron and hole mobility in $In_{0.53}(Al_xGa_{1-x})_{0.47}As$ ($In_{0.53}(Al_xGa_{1-x})_{0.47}As$의 전자와 정공 이동도의 실험식 추출)

  • 이경락;황성범;송정근
    • Electrical & Electronic Materials
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    • v.9 no.6
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    • pp.564-571
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    • 1996
  • We calculated the drift-velocities of electrons and holes of I $n_{0.53}$(A $l_{x}$G $a_{1-x}$ )$_{0.47}$As, which is used for semiconductor materials of high performance HBTs, along with the various doping concentrations and Al mole fractions as well as the electric fields by Monte Carlo experiment. Especially, for the valence bands the accuracy of hole-drift-velocity was improved in the consideration of intervalley scattering due to the inelastic scattering of acoustic phonon. From the results the empirical formulas of the low- and high field mobility of electrons and holes were extracted by using nonlinear least square fitting method. The accuracy of the formulas was proved by comparing the formula of low-field electron mobility as well as drift-velocity of I $n_{0.53}$ G $a_{0.47}$As and of low-field hole mobility of GaAs with the measured values, where the error was below 10%. For the high-field mobilities of electron and hole the results calculated by the formulas were very well matched with the MC experimental results except at the narrow field range where the electrons produced the velocity overshoot and the corresponding error was about 30%.0%. 30%.0%.

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Electron Mobility Model in Strained Si Inversion Layer (응력변형을 겪는 Si 반전층에서 전자 이동도 모델)

  • Park Il-Soo;Won Taeyoung
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.42 no.3 s.333
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    • pp.9-16
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    • 2005
  • The mobility in strained Si inversion layer on $Si_{1-x}Ge_x$ is calculated considering a quantum effect(subband energy and wavefunction) in inversion layer and relaxation time approximation. The quantum effect in inversion layer is obtained by using self-consistent calculation of $Schr\ddot{o}dinger$ and Poisson equations. For the relaxation time, intravalley and intervalley scatterings are considered. The result shows that the reason for the enhancement in mobility as Ge mole fraction increases is that the electron mobility in 2-폴드 valleys is about 3 times higher than that of 4-폴드 valleys and most electrons are located in 2-폴드 valleys as Ge mole fraction increases. Meanwhile, for the phonon-limited mobility the fitting to experimental data, Coulomb and surface roughness mobilities are included in total mobility, Deformation potentials are selected for the calculated effective field, temperature, and Ge mole fraction dependent mobilities to be fitted to experimental data, and then upgraded data can be obtained by considering nonparabolicity in Si band structure.