• Title/Summary/Keyword: interdiffusion

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Effects of Rapid Thermal Annealing on Thermal Stability of FeMn Spin Valve Sensors

  • Park, Seung-Young;Choi, Yeon-Bong;Jo, Soon-Chul
    • Journal of Magnetics
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    • v.10 no.2
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    • pp.52-57
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    • 2005
  • In this research, magnetoresistance (MR) ratio (MR), resistivity, and exchange coupling field $(H_{ex})$ behaviors for sputter deposited spin valves with FeMn antiferromagnetic layer have been extensively investigated by rapid thermal annealing (RTA) as well as conventional annealing (CA) method. 10 s of RTA revealed that interdiffusion was not significant up to $325^{\circ}C$ at the interfaces between the layers when the RTA time was short. The MR of FeMn spin valves were reduced when the spin valves were exposed to temperature of $250^{\circ}C$, even for a short time period of 10 s prior to CA. $H_{ex}$ was maintained up to $325^{\circ}C$ of CA when the specimen was subjected to 10 s of RTA at $200^{\circ}C$ prior to CA, which is $25^{\circ}C$ higher than the result obtained from the CA without prior RTA. Therefore, the stability of $H_{ex}$ could be enhanced by a prior RTA before performing CA up to annealing temperature of $325^{\circ}C$. MR and sensitivity of the specimens annealed without magnetic field up to $275^{\circ}C$ were recovered to the values prior to CA, but $H_{ex}$ was not recovered. This means that reduced MR sensitivity and MR during the device fabrication can be recovered by a field RTA.

A Study on Cu(B)/Ti/SiO2/Si Structure for Application to Advanced Manufacturing Process (차세대 공정에 적용 가능한 Cu(B)/Ti/SiO2/Si 구조 연구)

  • Lee Seob;Lee Jaegab
    • Korean Journal of Materials Research
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    • v.14 no.4
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    • pp.246-250
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    • 2004
  • We have investigated the effects of boron added to Cu film on the Cu-Ti reaction and microstructural evolution of Cu(B) alloy film during annealing of Cu(B)/Ti/$SiO_2$/Si structure. The result were compared with those of Cu(B)/$SiO_2$ structure to identify the effects of Ti glue layers on the Boron behavior and the result grain growth of Cu(B) alloy. The vacuum annealing of Cu(B)/Ti/$SiO_2$ multilayer structure allowed the diffusion of B to the Ti surface and forming $TiB_2$ compounds at the interface. The formed $TiB_2$ can act as a excellent diffusion barrier against Cu-Ti interdiffusion up to $800^{\circ}C$. Also, the resistivity was decreased to $2.3\mu$$\Omega$-cm after annealing at $800^{\circ}C$. In addition, the presence of Ti underlayer promoted the growth Cu(l11)-oriented grains and allowed for normal growth of Cu(B) film. This is in contrast with abnormal growth of randomly oriented Cu grains occurring in Cu(B)/$SiO_2$ upon annealing. The Cu(B)/Ti/$SiO_2$ structure can be implemented as an advanced metallization because it exhibits the low resistivity, high thermal stability and excellent diffusion barrier property.

Effect of ZrO2 Buffer Layers for Pt/Bi3.25La0.75Ti3O12/ZrO2/Si (MFIS)-FET Structures (Pt/Bi3.25La0.75Ti3O12/ZrO2/Si (MFIS)-FET 구조를 위한 ZrO2 Buffer Layer의 영향)

  • Kim, Kyoung-Tae;Kim, Chang-Il
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.5
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    • pp.439-444
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    • 2005
  • We investigated the structural and electrical properties of BLT films grown on Si covered with $ZrO_{2}$ buffer layer. The BLT thin film and $ZrO_{2}$ buffer layer were fabricated using a metalorganic decomposition method. The electrical properties of the MFIS structure were investigated by varying thickness of the $ZrO_{2}$ layer. AES and TEM show no interdiffusion and reaction that suppressed using the $ZrO_{2}$ film as a buffer layer The width of the memory window in the C-V curves for the MFIS structure decreased with increasing thickness of the $ZrO_{2}$ layer. It is considered that the memory window width of MFIS is not affected by remanent polarization. Leakage current density decreased by about four orders of magnitude after using $ZrO_{2}$ buffer layer. The results show that the $ZrO_{2}$ buffer layers are prospective candidates for applications in MFIS-FET memory devices.

A First-principles Study on Magnetism of $Fe_2 /Ir_4$(001) Superlattice

  • Kim, Jae Il;Lee, In Gee
    • Journal of Magnetics
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    • v.6 no.3
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    • pp.80-82
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    • 2001
  • We have investigated magnetism of $Fe_2 /Ir_4$(001) superlattice in terms of a first-principles calculation by using an all-electron full-potential linearized augmented plane-wave (FLAPW) method within the generalized gradient approximation (GGA). We considered two magnetic states, the ferromagnetic (FM) and antiferromagnetic (AFM) coupled states between the Fe layers. It was found that the FM state was energetically more stable than the AFM one by 0.166 eV. Calculated magnetic moments of the Fe layers were, in absolute values, 2.45$\mu_B$ and 2.30 $\mu_B$for the FM and AFM states, respectively. We also found that the Ir layers had very small magnetic moments less than 0.1 $\mu_B$ for both magnetic states. In all the magnetic states, the subinterface Ir layers were coupled antiferromagnetically to the interface Ir layers, while the interface Ir layers were always coupled frerromagnetically to the interface Fe layers. These results contradicted to recent experimental reports of magnetically "dead"Fe layers in Fe/Ir superlattices for which the Fe layer thickness was less than two atomic layers. We attributed that the experimentally observed "dead"Fe layers were due to possible interdiffusion between Ir and Fe layers.en Ir and Fe layers.

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Characterization of Planar Defects in Annealed SiGe/Si Heterostructure

  • Lim, Young-Soo;Seo, Won-Seon
    • Korean Journal of Materials Research
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    • v.19 no.12
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    • pp.699-702
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    • 2009
  • Due to the importance of the SiGe/Si heterostructure in the fields of thermoelectric and electronic applications, SiGe/Si heterostructures have been extensively investigated. For practical applications, thermal stability of the heterostructure during the thermoelectric power generation or fabrication process of electronic devices is of great concern. In this work, we focused on the effect of thermal annealing on the defect configuration in the SiGe/Si heterostructure. The formation mechanism of planar defects in an annealed SiGe/Si heterostructure was investigated by transmission electron microscopy. Due to the interdiffusion of Si and Ge, interface migration phenomena were observed in annealed heterostructures. Because of the strain gradient in the migrated region between the original interface and the migrated interface, the glide of misfit dislocation was observed in the region and planar defects were produced by the interaction of the gliding misfit dislocations. The planar defects were confined to the migrated region, and dislocation pileup by strain gradient was the origin of the confinement of the planar defect.

PERFORMANCE EVALUATION OF U-Mo/Al DISPERSION FUEL BY CONSIDERING A FUEL-MATRIX INTERACTION

  • Ryu, Ho-Jin;Kim, Yeon-Soo;Park, Jong-Man;Chae, Hee-Taek;Kim, Chang-Kyu
    • Nuclear Engineering and Technology
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    • v.40 no.5
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    • pp.409-418
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    • 2008
  • Because the interaction layers that form between U-Mo particles and the Al matrix degrade the thermal properties of U-Mo/Al dispersion fuel, an investigation was undertaken of the undesirable feedback effect between an interaction layer growth and a centerline temperature increase for dispersion fuel. The radial temperature distribution due to interaction layer growth during irradiation was calculated iteratively in relation to changes in the volume fractions, the thermal conductivities of the constituents, and the oxide thickness with the burnup. The interaction layer growth, which is estimated on the basis of the temperature calculations, showed a reasonable agreement with the post-irradiation examination results of the U-Mo/Al dispersion fuel rods irradiated at the HANARO reactor. The U-Mo particle size was found to be a dominant factor that determined the fuel temperature during irradiation. Dispersion fuel with larger U-Mo particles revealed lower levels of both the interaction layer formation and the fuel temperature increase. The results confirm that the use of large U-Mo particles appears to be an effective way of mitigating the thermal degradation of U-Mo/Al dispersion fuel.

Crystalline Phases and Superconductor Characteristics of the Plasma Sprayed YBa2Cu$\chi$O7-y High Tc Superconductor Thick Film (플라즈마 용사법에 의해 제조된 YBa2Cu$\chi$O7-y(X=3, 3.5, 4) 고온초전도체 후막층의 결정상 및 초전도 특성)

  • 한명섭;서동수
    • Journal of the Korean Ceramic Society
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    • v.29 no.2
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    • pp.152-160
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    • 1992
  • High-Tc superconductor thick films of YBa2Cu$\chi$O7-y (X=3, 3.5, 4) of which thickness varies from 100 $\mu\textrm{m}$ to 200 $\mu\textrm{m}$ were successfully prepared by plasma spraying method, and the characteristics of thick film depending on copper content and heat treatment conditions were investigated. Regardless of heat-treated temperature, the specimens with X=3 were composed of YBa2Cu$\chi$O7-y, Y2BaCuO5 and BaCuO3 phases. The specimens with X=4, however, were composed of YBa2Cu$\chi$O7-y phase at all heat treatment conditions. The specimens with X=4 composition showed the best superconducting characteristics after heat treatment at 925$^{\circ}C$, and the superconducting transition temperature with zero resistivity (Tc,zero) was 87K. The thick film lost superconductivity when the specimens were heat-treated at 950$^{\circ}C$ because of interdiffusion between superconductor elements and bond coating elements and Y2BaCuO5 phase was found was found to be main phase at the interface.

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Characterization of BLT/insulator/Si structure using $ZrO_2$ and $CeO_2$ insulator ($ZrO_2$$CeO_2$ 절연체를 이용한 BLT/절연체/Si 구조의 특성)

  • Lee, Jung-Mi;Kim, Kyoung-Tae;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.05c
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    • pp.186-189
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    • 2003
  • The MFIS capacitors were fabricated using a metalorganic decomposition method. Thin layers of $ZrO_2$ and $CeO_2$ were deposited as a buffer layer on Si substrate and BLT thin films were used as a ferroelectric layer. The electrical and structural properties of the MFIS structure were investigated. X -ray diffraction was used to determine the phase of the BLT thin films and the quality of the $ZrO_2$ and $CeO_2$ layer. AES show no interdiffusion and the formation of amorphous $SiO_2$ layer is suppressed by using the $ZrO_2$ and $CeO_2$ film as buffer layer between the BLT film and Si substrate. The width of the memory window in the C-V curves for the $BLT/ZrO_2/Si$ and $BLT/CeO_2/Si$ structure is 2.94 V and 1.3V, respectively. The experimental results show that the BLT-based MFIS structure is suitable for non-volatile memory FETs with large memory window.

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Structural and electrical properties of MFISFET using a $Pt/Bi_{3.25}La_{0.75}Ti_3O_{12}/CeO_2/Si$ structure ($Pt/Bi_{3.25}La_{0.75}Ti_3O_{12}/CeO_2/Si$ 구조를 이용한 MFISFET의 구조 및 전기적 특성)

  • Kim, K.T.;Kim, C.I.;Lee, C.I.;Kim, T.A.
    • Proceedings of the KIEE Conference
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    • 2004.11a
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    • pp.183-186
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    • 2004
  • The metal-ferroelectric-insulator-semiconductor(MFIS) capacitors were fabricated using a metalorganic decomposition (MOD)method. The $CeO_2$ thin films were deposited as a buffer layer on Si substrate and $Bi_{3.25}La_{0.75}Ti_3O_{12}$ (BLT) thin films were used as a ferroelectric layer. The electrical and structural properties of the MFIS structure were investigated by varying the $CeO_2$ layer thickness. The width of the memory window in the capacitance-voltage (C-V)curves for the MFIS structure decreased with increasing thickness of the $CeO_2$ layer. Auger electron spectroscopy (AES) and transmission electron microscopy (TEM) show no interdiffusion by using the $CeO_2$ film as buffer layer between the BLT film and Si substrate. The experimental results show that the BLT-based MFIS structure is suitable for non-volatile memory field-effect-transistors (FETs) with large memory window.

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The Dielectric Properties of $BaTiO_3/SrTiO_3$ Heterolayered Thick Films with Stacking Periodicity (적층주기에 따른 $BaTiO_3/SrTiO_3$ 이종층 후막의 유전 특성)

  • Lee, Yoe-Bok;Choi, Eui-Sun;Lee, Moon-Kee;Ryu, Ki-Won;Lee, Young-Hie
    • Proceedings of the KIEE Conference
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    • 2004.11a
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    • pp.194-196
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    • 2004
  • $BaTiO_3/SrTiO_3$ heterolayered thick films on the $Al_2O_3$ substrate by screen printing method with stacking periodicity. The stacking periodicity of $BaTiO_3/SrTiO_3$ heterolayer structure was varied from $(BaTi_O_3)_1/(SrTiO_3)_1$ to $(BaTi_O_3)_3/(SrTiO_3)_3$. The total thickness of the $BaTiO_3/SrTiO_3$ films was about $120{\mu}m$. There was an interdiffusion at the interface of the $BaTiO_3$ and $SrTiO_3$ layers. The dielectric constant of $BaTiO_3/SrTiO_3$ heterolayered thick films was increased with decreasing stacking periodicity of the $BaTiO_3/SrTiO_3$. The dielectric constant of the ($(BaTi_O_3)_1/(SrTiO_3)_1$ herterolayered thick films was about 1780.

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