Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2004.11a
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- Pages.183-186
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- 2004
Structural and electrical properties of MFISFET using a $Pt/Bi_{3.25}La_{0.75}Ti_3O_{12}/CeO_2/Si$ structure
$Pt/Bi_{3.25}La_{0.75}Ti_3O_{12}/CeO_2/Si$ 구조를 이용한 MFISFET의 구조 및 전기적 특성
Abstract
The metal-ferroelectric-insulator-semiconductor(MFIS) capacitors were fabricated using a metalorganic decomposition (MOD)method. The
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