• IEIE Transactions on Smart Processing and Computing
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• v.3 no.5
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• pp.331-337
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• 2014

Ge is becoming an increasingly popular semiconductor material with high Si compatibility for on-chip optical interconnect technology. For a better manifestation of the meritorious material properties of Ge, its surface treatment should be performed satisfactorily before the electronic and photonic components are fabricated. Ex-situ rapid thermal annealing (RTA) processes with different gases were carried out to examine the effects of the annealing gases on the thin-film quality of Ge grown epitaxially on Si substrates. The Ge-on-Si samples were prepared in different structures using the same equipment, reduced-pressure chemical vapor deposition (RPCVD), and the samples annealed in $N_2$, forming gas (FG), and $O_2$ were compared with the unannealed (deposited and only cleaned) samples to confirm the improvements in Ge quality. To evaluate the thin-film quality, room-temperature photoluminescence (PL) measurements were performed. Among the compared samples, the $O_2$-annealed samples showed the strongest PL signals, regardless of the sample structures, which shows that ex-situ RTA in the $O_2$ environment would be an effective technique for the surface treatment of Ge in fabricating Ge devices for optical computing systems.

• Journal of the Korean Geotechnical Society
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• v.28 no.10
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• pp.41-54
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• 2012

This paper is to develop the method of surface soil improvement by electric heating equipment. For this purpose, the electric heating systems were invented to apply to the in-situ soil. Iaboratory tests were done to study the behaviors of sea clays by eletric heating. In lab tests, two different heating temperatures, $70^{\circ}C$ and $110^{\circ}C$, were applied to the saturated clays to examine the relationship between evaporation and compaction. In addition, trafficability was analyzed to the heated by applying cone penetrometer to the heated clays Furthermore, in-situ tests were conducted to analyze the range of soil improvement and strength variations. The temperature changes in field were measured and they were compared with those of the commercial program (Temp/W). Also, the bearing capacities of electrically heated field were tested by PBT (plate bearing test). Several conclusions were derived from the results of the numerical analysis and tests (lab and field). The improvement ranges and strength variations of electrically heated soil depended on the heating temperature and time. If the heating temperature is more than $100^{\circ}C$ evaporating the ground water, the bearing capacity and settlement increased rapidly. The bearing capacities of in-situ soil increased more than 3 times, and heated soil emitted a lot of vapors. The soil around electric heater was sintered completely, and its range was almost 20 cm.

• Journal of the Korean Vacuum Society
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• v.22 no.4
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• pp.175-180
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• 2013

We developed the contamination prevention module of an optical window for an In-Situ Particle Monitor (ISPM) system. the core part of the module is the generator of an ultrasonic wave and the module is to remove particles stuck to the window by the transfer of the wave force to the window surface. In order to enhance transfer efficiency of the waves the frequency of the ultrasonic wave was optimized and a low impedance material (plexiglass) and a soft sealing material (Si rubber) were used. The ISPM with the developed module was installed at the exhaust line of a BPSG CVD equipment and the effect of the module was verified.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.33 no.6
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• pp.226-233
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• 2023

In this study, the basic physical properties and microstructure of concrete interlocking blocks with amount of different CO₂ gas injection were analyzed according to determine the applicability of In-situ carbonation technology to construction secondary products. The amount of carbon dioxide gas injection was selected as 0, 0.1, 0.3, 0.5, 0.7 wt.% compared to cement amount. A lab-scale press equipment was designed to apply developed carbonation technology to real construction site. And mixer for stable CO₂ gas injection was designed. Using the designed devices, CO₂ gas injected samples were created and physical property of samples were performed. As a result of the physical property test, as the CO₂ injection amount increased to 0.3 %, it showed higher strength behavior compared to the original mix. And more than 0.5 % samples showed lower strength behavior than original sample, but they satisfied the standard of concrete interlocking block. This results were determined that CO₂ injection contributed to the creation of hydrates such as C-S-H. Therefore, the possibility of applying carbonation technology, which injects CO₂ during mixing, to various secondary construction products was confirmed.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.1
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• pp.91-98
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• 2010

The increasing of power and processing speed and miniaturization of central processor unit (CPU) used in electronics equipment requires better performing thermal management systems. A typical thermal management package consists of thermal interfaces, heat dissipaters, and external cooling systems. There have been a number of experimental techniques and procedures for estimating thermal conductivity of thin, compressible thermal interface material (TIM). The TIM performance is affected by many factors and thus TIM should be evaluated under specified application conditions. In compact packaging of electronic equipment the chip is interfaced with a thin heat spreader. As the package is made thinner, the coupling between heat flow through TIM and that in the heat spreader becomes stronger. Thus, a TIM characterization system for considering the heat spreader effect is proposed and demonstrated in detail in this paper. The TIM test apparatus developed based on ASTM D-5470 standard for thermal interface resistance measurement of high performance TIM, including the precise measurement of changes in in-situ materials thickness. Thermal impedances are measured and compared for different directions of heat dissipation. The measurement of the TIM under the practical conditions can thus be used as the thermal criteria for the TIM selection.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.5
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• pp.818-823
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• 2013

In the process of sterilization during the manufacture of beverages, both the treatment time and the temperature influence the beverage taste and flavor. Therefore, to improve the beverage quality, a nonthermal sterilization method is preferred to a high-temperature one. A nonthermal method, ultrasonic treatment by shock waves from cavitation, has been known to have a sterilizing effect. In this study, to observe the effect of ultrasonic frequency and treatment time on beverage quality, batch type ultrasonic equipment was fabricated and tested. Further, to evaluate the applicability of this ultrasonic method to an in-situ process, flow type ultrasonic heptagonal equipment was fabricated and then used to perform a sterilization experiment. Subsequently, the sterilizing effect was measured under ultrasonic and low-temperature ($55^{\circ}C$) treatments. Based on the obtained results, ultrasonic sterilization technology that can be applied for treatments at flow rates of up to 3 L/min was developed.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2002.09a
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• pp.44-52
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• 2002

Low temperature thermal desorption (LTTD) has become one of the cornerstone technologies used for the treatment of contaminated soils and sediments in the United States. LTTD technology was first used in the mid-1980s for soil treatment on sites managed under the Comprehensive Environmental Respones, Compensation and Liability Act (CERCLA) or Superfund. Implementation was facilitated by CERCLA regulations that require only that spplicable regulations shall be met thus avoiding the need for protracted and expensive permit applications for thermal treatment equipment. The initial equipment designs used typically came from technology transfer sources. Asphalt manufacturing plants were converted to direct-fired LTTD systems, and conventional calciners were adapted for use as indirect-fired LTTD systems. Other innovative designs included hot sand recycle technology (initially developed for synfuels production from tar sand and oil shale), recycle sweep gas, travelling belts and batch-charged vacuum chambers, among others. These systems were used to treat soil contaminated with total petroleum hydrocarbons (TPH), polycyclic aromatic hydrocarbons (PAHs), pesticides, polychlorinated biphenyls (PCBs) and dioxin with varying degrees of success. Ultimately, performance and cost considerations established the suite of systems that are used for LTTD soil treatment applications today. This paper briefly reviews the develpoment of LTTD systems and summarizes the design, performance and cost characteristics of the equipment in use today. Designs reviewed include continuous feed direct-fired and indirect-fired equipment, batch feed systems and in-situ equipment. Performance is compared in terms of before-and-after contaminant levels in the soil and permissible emissions levels in the stack gas vented to the atmosphere. The review of air emissions standards includes a review of regulations in the U.S. and the European Union (EU). Key cost centers for the mobilization and operation of LTTD equipment are identified and compared for the different types of LTTD systems in use today. A work chart is provided for the selection of the optmum LTTD system for site-specific applications. LTTD technology continues to be a cornerstone technology for soil treatment in the U.S. and elsewhere. Examples of leading-edge LTTD technologies developed in the U.S. that are now being delivered locally in global projects are described.

• Journal of the Korean GEO-environmental Society
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• v.15 no.1
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• pp.5-12
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• 2014

In this study, we developed the electric heating equipment and applied for soft ground improvement. The developed heat pipe is 4 m-length and consumes 1 kW/m, which is consisted of Ni-Cr wire. It was installed in 3.5~4.5 m below ground surface and heated for 96 hours (48 hours, 2 times). The temperature variation and vapor pressure caused by electric heating was measured by the thermometer and pressure gauge which were installed in the ground (5.0 m), and the tip resistances were measured by static electronic piezo-cone penetration test (CPT). As the results of experiments, 2-order polynomial curve was shown to adjust the variation of tip resistance and the temperature distribution with the horizontal distance from electric heater, whose R2 value is close to 1. In addition, in-situ pore-water pressure and water content was decreased.

• Proceedings of the Korean Geotechical Society Conference
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• 2008.10a
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• pp.541-548
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• 2008

Active application of auger-drilled piling is expected in Korea considering its advantage in noise and vibration problems against driven piling and its cost-effectiveness in comparison to the cast in-situ piling. The current design practice being used in Korea is adopted from the Japanese one, however the equipment and construction procedure is modified for the geotechnical conditions and construction circumstances in Korea. Therefore there is an urgent need for the establishment of the rational design criteria for the auger-drilled piling in Korea. As the preliminary work for the establishment, this paper presents the current practice in Korean railway constructions. Design criteria of Korea Railway Network Authority are introduced and its characteristics and the problems are described. Application cases of auger-drilled pile to railway construction are introduced as well.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.6
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• pp.354-359
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• 2000

A new method of measuring residual stress in micromachined film is proposed. An estimation of residual stress is performed by using least squares fit with an appropriate deflection modeling. an exact value of residual stress is obtained without any of the ambiguities that exist in conventional buckling method, and a good approximation is also obtained by using a few data points. Therefore, the test structures area could be greatly decreased by using this method. The measurement can be done more easily and simply without any actuation or any specific measuring equipment. The structure and fabrication processes described in this paper are simple and widely used in surface micromachining. In addition, in-situ measurement is available by using the proposed method when the test structure and the measurement structure are fabricated on a wafer simultaneously.