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http://dx.doi.org/10.5757/JKVS.2013.22.4.175

The Development of the Contamination Prevention Module of an Optical Window Using Ultrasonic Waves  

Lee, ChangHee (Hyejeon College)
Jeon, KiMun (Vacuum Center KRISS)
Shin, JaeSoo (Department of New Materials Engineering, Daejeon University)
Yun, JuYoung (Vacuum Center KRISS)
Cho, Seonghyun (Safety Measurement Center, KRISS)
Kang, Sang-Woo (Vacuum Center KRISS)
Publication Information
Journal of the Korean Vacuum Society / v.22, no.4, 2013 , pp. 175-180 More about this Journal
Abstract
We developed the contamination prevention module of an optical window for an In-Situ Particle Monitor (ISPM) system. the core part of the module is the generator of an ultrasonic wave and the module is to remove particles stuck to the window by the transfer of the wave force to the window surface. In order to enhance transfer efficiency of the waves the frequency of the ultrasonic wave was optimized and a low impedance material (plexiglass) and a soft sealing material (Si rubber) were used. The ISPM with the developed module was installed at the exhaust line of a BPSG CVD equipment and the effect of the module was verified.
Keywords
Ultrsound transducer; In-situ diagnosis; Contaminant particles; ISPM;
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  • Reference
1 H. S. Chen, Rep. Prog. Phys. 43, 353 (1980).   DOI   ScienceOn
2 X. L. Yeh, K. Samwer, and W. L. Johnson, Appl. Phys. Lett. 42, 242 (1983).   DOI
3 S. Herd, K. N. Tu, and K. Y. Ahn, Appl. Phys. Lett. 42, 597 (1983).   DOI
4 D. R. Uhlmann, J. Non-Cryst. Solids 41, 347 (1980).   DOI   ScienceOn
5 P. P. Wegener, Acta Mech. 21, 65 (1975).   DOI
6 R. C. Reid, Amer. Sci. 64, 146 (1976).
7 M. Blander and J. L. Katz, J. Statistical Phys. 4, 55 (1972).   DOI
8 R. Caldow, D. Y. H. Pui, W. W. Szymanski, and B. Y. H. Liu, Aersol Science and Technology 12, 981 (1990).   DOI