• Title/Summary/Keyword: high dielectric-constant

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Correlation between Dielectric Constant Change and Oxidation Behavior of Silicon Nitride Ceramics at Elevating Temperature up to 1,000 ℃ (질화규소 세라믹스의 고온(~1,000 ℃) 유전상수 변화와 산화 거동의 상관관계 고찰)

  • Seok-Min, Yong;Seok-Young, Ko;Wook Ki, Jung;Dahye, Shin;Jin-Woo, Park;Jaeho, Choi
    • Journal of the Korea Institute of Military Science and Technology
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    • v.25 no.6
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    • pp.580-585
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    • 2022
  • In this study, the high-temperature dielectric constant of Si3N4 ceramics, a representative non-oxide-based radome material, was evaluated and the cause of the dielectric constant change was analyzed in relation to the oxidation behavior. The dielectric constant of Si3N4 ceramics was 7.79 at room temperature, and it linearly increased as the temperature increased, showing 8.42 at 1,000 ℃. As results of analyzing the microstructure and phase for the Si3N4 ceramics before and after heat-treatment, it was confirmed that oxidation did not occur at all or occurred only on the surface at a very insignificant level below 1,000 ℃. Based on this, it is concluded that the increase in the dielectric constant according to the temperature increase of Si3N4 ceramics is irrelevant to the oxidation behavior and is only due to the activation of charge polarization.

Effects of UV ozone annealing on conduction mechanism in Ta2O5 thin films deposited by atomic layer deposition (Atomic layer deposition으로 증착된 Ta2O5 박막의 전도기구에 대한 UV ozone annealing 효과)

  • 엄다일;전인상;노상용;황철성;김형준
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.57-57
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    • 2003
  • High dielectric constant materials (high K) have attracted a great deal of interest because of the dramatic scaling down of DRAM capacitor reaching its physical limit in terms of reduction of thickness. Among high-K materials that can replace silicon dioxide, tantalum pentoxide (Ta2O5) thin film, with their high dielectric constant (∼25) and good step coverage, is the candidate of choice.

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Microwave Dielectric Properties of $ZnWO_4$ Ceramics ($ZnWO_4$ 세라믹의 마이크로파 유전특성)

  • Yoon, Sang-Ok;Yun, Jong-Hun;Kim, Dae-Min;Hong, Sang-Heung;Kang, Ki-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.642-645
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    • 2002
  • Microwave dielectric properties of $ZnWO_4$ ceramic were investigated with calcination and sintering temperatures. The dielectric properties required for such application are high dielectric constant$(\varepsilon_r)$, high $Q{\times}f_o$ value and low temperature coefficient of resonant frequency$(\tau_f)$. These requirement correspond to necessities for size reduction, excellent frequency selectivity, good temperature stability of devices. $ZnWO_4$ ceramics could be sintered at low $1075^{\circ}C$, which was comparatively low temperature for microwave dielectrics. As a result, $ZnWO_4$ showed the dielectric constant of 13, quality factor($Q{\times}f_o$ value) of 22000 and 'temperature coefficient of resonant frequency$(\tau_f)$ of $-65{\pm}5ppm/^{\circ}C$.

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The Effect of $Ba^{2+}$ion Dissolution on Microstructural Changes and Electrical Properties in $BaTiO_3$ Aqueous Slurry System (나노 $BaTiO_3$ 수계슬러리에서 미세구조 및 전기적 특성에 미치는 $Ba^{2+}$이온 용출의 영향)

  • 김상우;신용욱;이해원;윤기현
    • Journal of the Korean Ceramic Society
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    • v.37 no.5
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    • pp.511-515
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    • 2000
  • The effect of Ba2+ ion dissolution with different pH and amount of PAA on microstructural changes of green and sintered bodies and its electrical properties was studied in aqueous nano-size BaTiO3 slurry system. The dissolution of Ba2+ was least at strong base, pH 10.8 and by addition of amount of 0.15 wt% PAA. The green body with the lowest of dissolution of Ba2+ at pH 10.8 and 0.15 wt% PAA had minimum values of average pore size, 40nm and shown high increase of sintered density. The compact sintered at 125$0^{\circ}C$ for 2 hr with highest Ba2+ dissolution had low density and dielectric constant due to abnormal grian growth. However, the sintered body with the lowest Ba2+ dissolution had high sintered density and then shown high dielectric constant.

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Electric Permittivity Properties and $ZnO/TiO_2$Thin Film Fabrication ($ZnO/TiO_2$ 박막 제작과 유전율 특성)

  • 김창석;최창주;이우선;오무송;김태성;김병인
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.290-294
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    • 2001
  • In this study, ZnO is evaporated to be coated on n-type Si wafer substrate. Refractive coefficient of thin film that is evaporating TiO$_2$ onto ZnO increases linearly as thickness is getting thinner to have high value and high angle and it satisfies theoretical equation I(x)=Io exp (-$\alpha$x) theory that represents the strength of photon energy advancing through ZnO thin film. And dielectric constant of TiO$_2$ thin film evaporated onto ZnO is high and $\varepsilon$$_2$ is smaller than $\varepsilon$$_1$. The specimen TiO$_2$ thin film evaporated onto ZnO has much higher dielectric constant when photon energy is increased.

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Design of CPW fed antenna using high dielectric constant materials (고유전율 유전체를 이용한 CPW 급전 안테나의 설계)

  • 심성훈;강종윤;윤석진;윤영중;김현재
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.559-562
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    • 2000
  • In this paper, coplanar waveguide fed antennas (CPWFAs) insetting two slits to boundary of the square microstrip patch are presented. These slits play roles in not only lowering a resonant frequency but also fine-tuning for the proposed antenna together with open stub of CPW feed line. The CPWFAs were designed and manufactured using microwave dielectrics (Al,Mg)TaO$_2$ having high dielectric-constant ($\varepsilon$r=20). The return loss and input impedance of the CPWFAs were investigated in terms of the slit length and open stub length of CPW feed line. It is shown that a resonant frequency decreases as the slit length increases.

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Necklace Type UHF RFID Tag Antenna for the Material with High Dielectric Constant for a Tree (고유전율에 적합한 목걸이 형태의 생목용 UHF RFID 태그 안테나 설계)

  • Chung, You-Chung
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.37 no.1C
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    • pp.34-37
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    • 2012
  • The paper introduces the an necklace type UHF RFID tag for a live tree having high dielectric constant. When a general UHF RFID tag is used for the metal and the material with high dielectric constant, the electrical characteristics and impedance of antenna have been changed, and the tag is not recognized by an UHF RFID reader. The necklace type UHF RFID tag has been designed with consideration of the high dielectric constant of the tree material. The name tag for a live tree has been designed with the developed tag antenna. The performance of tag has been measured and the reading range is about 4~5m. The developed UHF RFID tag antenna can be applied to any high dielectric material for various industrial applications.

Low k Materials for High Frequency High Integration Modules (고주파대응 고집적 모듈용 저유전율 소재)

  • Na, Yoon-Soo;Hwang, Jong-Hee;Lim, Tae-Young;Shin, Hyo-Soon;Kim, Jong-Hee;Cho, Yong-Soo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.328-328
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    • 2008
  • As a low K material for high frequency high integration modules, glass/ceramic composites were investigated. Glass composition were selected from $SiO_2-B_2O_3-Al_2O_3-R_2O$-RO system which having very low dielectric constant and cordierite was used as a ceramic filler. These composites were sintered at temperature range from $850^{\circ}$ to $950^{\circ}$ and XRD, SEM microstructure analysis of sintered bodies were performed for understanding sintering behavior. Any crystallization was not occurred and dense sintered bodies were attained. Dielectric and mechanical properties of these sintered glass/cordierite composites were analysed by network analyzer and UTM. Glass/ceramic composite with 50 wt% cordierite showing a dielectric constant (${\varepsilon}_r$) of 5.4, Q${\times}f_0$ (Q) of 1600 at 1 GHz and maximum bending strength of 163 MPa was attained.

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The Structure and Dielectric Properties of the (Ba,Sr)TiO$_3$ Thin Films with the Substrate Temperature (기판온도에 따른 (Ba,Sr)TiO$_3$ 박막의 구조와 유전특성)

  • 이상철;이문기;이영희
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.49 no.11
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    • pp.603-608
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    • 2000
  • $(Ba, Sr)TiO_{3}$[BST] thin films were fabricated on the Pt/TiO$_2$/SiO$_2$/Si substrate by the RF sputtering. The structure and dielectric properties of the BST thin films with the substrate temperature were investigated. Increasing the substrate temperature, The BST phase increased and barium multi titanate phases decreased. Increasing the frequency, the dielectric constant decreased and the dielectric loss increased. The dielectric constant and dielectric loss of the BST thin films deposited at 50$0^{\circ}C$ were 300 and 0.018, respectively at 1 kHz. The leakage current density of the BST thin films deposited at 50$0^{\circ}C$ was $10^{-9}$ A/$\textrm{cm}^2$ with applied voltage of 3V. Because of the high dielectric constant(300), low dielectric loss(0.018) and low leakage current($10^{-9}$ A/$\textrm{cm}^2$), BST thin films deposited at 50$0^{\circ}C$ is expecting for the application of DRAM.

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Characterization of Dielectric Relaxation and Reliability of High-k MIM Capacitor Under Constant Voltage Stress

  • Kwak, Ho-Young;Kwon, Sung-Kyu;Kwon, Hyuk-Min;Sung, Seung-Yong;Lim, Su;Kim, Choul-Young;Lee, Ga-Won;Lee, Hi-Deok
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.14 no.5
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    • pp.543-548
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    • 2014
  • In this paper, the dielectric relaxation and reliability of high capacitance density metal-insulator-metal (MIM) capacitors using $Al_2O_3-HfO_2-Al_2O_3$ and $SiO_2-HfO_2-SiO_2$ sandwiched structure under constant voltage stress (CVS) are characterized. These results indicate that although the multilayer MIM capacitor provides high capacitance density and low dissipation factor at room temperature, it induces greater dielectric relaxation level (in ppm). It is also shown that dielectric relaxation increases and leakage current decreases as functions of stress time under CVS, because of the charge trapping effect in the high-k dielectric.