Preparation and Evaluation of the Properties of Al-doped Zinc Oxide (AZO) Films Deposition by Rapid Thermal Annealing (급속 열처리 방법에 의한 Al-doped Zinc Oxide (AZO) Films의 제조 및 특성 평가)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.25 no.7
- /
- pp.543-551
- /
- 2012